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${NH}_{3}$ 분위기에서 급속열처리에 의한 TiN/${TiSi}_{2}$ 이중구조막의 특성에 대한 고찰 (A Study on the Properties of TiN/${TiSi}_{2}$ Bilayer by a Rapid Thermal Anneal in ${NH}_{3}$ Ambient)

  • 이철진;성영권
    • 대한전기학회논문지
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    • 제41권8호
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    • pp.869-874
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    • 1992
  • The physical and electrical properties of TiN/TiSiS12T bilayer were studied. The TiN/TiSiS12T bilayer was formed by rapid thermal anneal in NHS13T ambient after the Ti film was deposited on silicon substrate. The Ti film reacts with NHS13T gas to make a TiN layer at the surface and reacts with silicon to make a TiSiS12T layer at the interface respectively. It was found that the formation of TiN/TiSiS12T bilayer depends on RTA temperature. In this experiment, competitive reaction for TiN/TiSiS12T bilayer occured above $600^{\circ}C$. Ti-rich TiNS1xT layer and Ti-rich TiSiS1xT layer and Ti-rich TiSiS1xT layer were formed at $600^{\circ}C$. stable structure TiN layer TiSiS12T layer which has CS149T phase and CS154T phase were formed at $700^{\circ}C$. Both stable TiN layer and CS154T phase TiSiS12T layer were formed at 80$0^{\circ}C$. The thickness of TiN/TiSiS12T bilayer was increased as the thickness of deposited Ti film increased.

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RECURRENCE RELATION FOR QUOTIENTS OF THE POWER DISTRIBUTION BY RECORD VALUES

  • Lee, Min-Young;Chang, Se-Kyung
    • Korean Journal of Mathematics
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    • 제12권1호
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    • pp.15-22
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    • 2004
  • In this paper we establish some recurrence relations satisfied by quotient moments of upper record values from the power distribution. Let {$X_n$, $n{\geq}1$} be a sequence of independent an identically distributed random variables with a common continuous distribution function(cdf) $F(x)$ and probability density function(pdf) $f(x)$. Let $Y_n=max\{X_1,X_2,{\cdots},X_n\}$ for $n{\geq}1$. We say $X_j$ is an upper record value of {$X_n$, $n{\geq}1$}, if $Y_j$ > $Y_{j-1}$, $j$ > 1. The indices at which the upper record values occur are given by the record times {$u(n)$}, $n{\geq}1$, where $u(n)=min\{j{\mid}j>u(n-1),X_j>X_{u(n-1)},n{\geq}2\}$ and $u(1)=1$. Suppose $X{\in}POW(0,1,{\theta})$ then $$E\left(\frac{X^r_{u(m)}}{X^{s+1}_{u(n)}}\right)=\frac{\theta}{s}E\left(\frac{X^r_{u(m)}}{X^s_{u(n-1)}}\right)+\frac{(s-\theta)}{s}E\left(\frac{X^r_{u(m)}}{X^s_{u(n)}\right)\;and\;E\left(\frac{X^{r+1}_{u(m)}}{X^s_{u(n)}}\right)=\frac{\theta}{n+1}\left[E\left(\frac{X^{r+1}_{u(m-1)}}{X^s_{u(n+1)}}\right)-E\left(\frac{X^{r+1}_{u(m)}}{X^s_{u(n-1)}}\right)+\frac{r+1}{\theta}E\left(\frac{X^r_{u(m)}}{X^s_{u(n)}}\right)\right]$$.

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WEAKLY LAGRANGIAN EMBEDDING $S^m\;{\times}\;S^n$ INTO $C^{m+n}$

  • Byun, Yang-Hyun;Yi, Seung-Hun
    • 대한수학회보
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    • 제36권4호
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    • pp.799-808
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    • 1999
  • We investigate when the .product of two smooth manifolds admits a weakly Lagrangian embedding. Assume M, N are oriented smooth manifolds of dimension m and n,. respectively, which admit weakly Lagrangian immersions into $C^m$ and $C^n$. If m and n are odd, then $M\;{\times}\;N$ admits a weakly Lagrangian embedding into $C^{m+n}$ In the case when m is odd and n is even, we assume further that $\chi$(N) is an even integer. Then $M\;{\times}\;N$ admits a weakly Lagrangian embedding into $C^{m+n}$. As a corollary, we obtain the result that $S^n_1\;{\times}\;S^n_2\;{\times}\;...{\times}\;S^n_k$, $\kappa$>1, admits a weakly Lagrang.ian embedding into $C^n_1+^n_2+...+^n_k$ if and only if some ni is odd.

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THE CHARACTERIZATION OF SORT SEQUENCES

  • Yun, MIn-Young
    • Journal of applied mathematics & informatics
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    • 제4권2호
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    • pp.513-528
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    • 1997
  • A sort sequence $S_n$ is a sequence of all unordered pairs of indices in $I_n\;=\;{1,\;2,v...,\;n}$. With a sort sequence Sn we assicuate a sorting algorithm ($AS_n$) to sort input set $X\;=\;{x_1,\;x_2,\;...,\;x_n}$ as follows. An execution of the algorithm performs pairwise comparisons of elements in the input set X as defined by the sort sequence $S_n$, except that the comparisons whose outcomes can be inferred from the outcomes of the previous comparisons are not performed. Let $X(S_n)$ denote the acverage number of comparisons required by the algorithm $AS_n$ assuming all input orderings are equally likely. Let $X^{\ast}(n)\;and\;X^{\circ}(n)$ denote the minimum and maximum value respectively of $X(S_n)$ over all sort sequences $S_n$. Exact determination of $X^{\ast}(n),\;X^{\circ}(n)$ and associated extremal sort sequenes seems difficult. Here, we obtain bounds on $X^{\ast}(n)\;and\;X^{\circ}(n)$.

CONVOLUTION SUMS OF ODD AND EVEN DIVISOR FUNCTIONS

  • Kim, Daeyeoul
    • 호남수학학술지
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    • 제35권3호
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    • pp.445-506
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    • 2013
  • Let ${\sigma}_s(N)$ denote the sum of the s-th power of the positive divisors of N and ${\sigma}_{s,r}(N;m)={\sum_{d{\mid}N\\d{\equiv}r\;mod\;m}}\;d^s$ with $N,m,r,s,d{\in}\mathbb{Z}$, $d,s$ > 0 and $r{\geq}0$. In a celebrated paper [33], Ramanuja proved $\sum_{k=1}^{N-1}{\sigma}_1(k){\sigma}_1(N-k)=\frac{5}{12}{\sigma}_3(N)+\frac{1}{12}{\sigma}_1(N)-\frac{6}{12}N{\sigma}_1(N)$ using elementary arguments. The coefficients' relation in this identity ($\frac{5}{12}+\frac{1}{12}-\frac{6}{12}=0$) motivated us to write this article. In this article, we found the convolution sums $\sum_{k<N/m}{\sigma}_{1,i}(dk;2){\sigma}_{1,j}(N-mk;2)$ for odd and even divisor functions with $i,j=0,1$, $m=1,2,4$, and $d{\mid}m$. If N is an odd positive integer, $i,j=0,1$, $m=1,2,4$, $s=0,1,2$, and $d{\mid}m{\mid}2^s$, then there exist $u,a,b,c{\in}\mathbb{Z}$ satisfying $\sum_{k& lt;2^sN/m}{\sigma}_{1,i}(dk;2){\sigma}_{1,j}(2^sN-mk;2)=\frac{1}{u}[a{\sigma}_3(N)+bN{\sigma}_1(N)+c{\sigma}_1(N)]$ with $a+b+c=0$ and ($u,a,b,c$) = 1(Theorem 1.1). We also give an elementary problem (O) and solve special cases of them in (O) (Corollary 3.27).

ON THE CHARACTERISTIC S-AUTOMATA

  • PARK CHIN HONG
    • Journal of applied mathematics & informatics
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    • 제17권1_2_3호
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    • pp.779-786
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    • 2005
  • In this paper we shall discuss some properties derived from the characteristic S-automaton $_x(S)_M$, using the fact that ${\mu}_S$ is an equivalence relation on M. When $L_{m}:S{\rightarrow}M$ is a left translation and $L_{M}$ is a collection of $L_{m}'s$, we shall show $_x(S)_{M}{\cong}L_{M}$. If S is commutative, we have $_x(S)_{M{\times}N{\cong}L_{M{\times}N}$. Moreover when M and N are perfect, we have $L_{M{\times}N}{\cong}L_{M}{\times}L_{N}$ and $_x(S)_{M{\times}N}{\cong}_x(S)_{M}{\times}_x(S)_N$.

플라즈마 실리콘 OXYNITRIDE막의 구조적 특성에 관한 고찰 (A Study on the Structure Properties of Plasma Silicon Oxynitride Film)

  • 성영권;이철진;최복길
    • 대한전기학회논문지
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    • 제41권5호
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    • pp.483-491
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    • 1992
  • Plasma silicon oxynitride film has been applied as a final passivation layer for semiconductor devices, because it has high resistance to humidity and prevents from alkali ion's penetration, and has low film stress. Structure properties of plasma silicon oxynitride film have been studied experimentally by the use of FT-IR, AES, stress gauge and ellipsometry. In this experiment,Si-N bonds increase as NS12TO/(NS12TO+NHS13T) gas ratio increases. Peaks of Si-N bond, Si-H bond and N-H bond were shifted to high wavenumber according to NS12TO/(NS12TO+NHS13T) gas ratio increase. Absorption peaks of Si-H bond were decreased by furnace anneal at 90$0^{\circ}C$. The atomic composition of film represents that oxygen atoms increase as NS12TO/(NS12TO+NHS13T) gas ratio increases, to the contrary, nitrogen atoms decrease.

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