• Journal of the Microelectronics and Packaging Society
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• v.23 no.2
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• pp.49-55
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• 2016

The effects of post-annealing and temperature/humidity conditions on the interfacial adhesion energies of atomic layer deposited RuAlO diffusion barrier layer for Cu interconnects were systematically investigated. The initial interfacial adhesion energy measured by four-point bending test was $7.60J/m^2$. The interfacial adhesion energy decreased to $5.65J/m^2$ after 500 hrs at $85^{\circ}C$/85% T/H condition, while it increased to $24.05J/m^2$ after annealing at $200^{\circ}C$ for 500 hrs. The X-ray photoemission spectroscopy (XPS) analysis showed that delaminated interface was RuAlO/$SiO_2$ for as-bonded and T/H conditions, while it was Cu/RuAlO for post-annealing condition. XPS O1s peak separation results revealed that the effective generation of strong Al-O-Si bonds between $AlO_x$ and $SiO_2$ interface at optimum post-annealing conditions is responsible for enhanced interfacial adhesion energies between RuAlO/$SiO_2$ interface, which would lead to good electrical and mechanical reliabilities of atomic layer deposited RuAlO diffusion barrier for advanced Cu interconnects.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.228.1-228.1
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• 2010

선택적 CO 산화반응(PrOx)을 위한 Ru이 고분산 담지된 $Ru/{\alpha}-Al_2O_3$ 촉매를 증착-침전법(deposition-precipitation)으로 제조하였다. 용액의 pH와 aging 시간에 따른 Ru 입자의 크기 변화와 분산도의 영향을 살펴보았으며 함침법(impregnation)으로 비교 촉매를 제조하였다. 촉매의 특성분석은 BET, TPR, CO-Chemisorption분석을 수행하여 촉매의 비표면적, 환원특성, 분산도를 알 수 있었다. 특성분석결과, 증착-침전법으로 제조한 $Ru/{\alpha}-Al_2O_3$ 촉매가 함침법으로 제조한 촉매에 비해 분산도가 높았으며, pH별 촉매 제조에서는 pH6.5로 제조한 촉매가 22.06%로 가장 높은 분산도를 보였다. 또한, 담체의 비표면적 영향에 따른 Ru 입자의 분산도를 살펴보기 위해 ${\gamma}-Al_2O_3$와 ${\alpha}-Al_2O_3$ 담체를 적용한 결과, 비표면적이 작은 ${\alpha}-Al_2O_3$ 담체 표면에서 Ru 분산도가 ${\gamma}-Al_2O_3$ 담체에 비해 높았다. 이는 기공이 발달하여 비표면적이 넓은 ${\gamma}-Al_2O_3$ 담체는 소량의 Ru을 고분산 담지 시 담체 표면보다는 기공 내에 담지 되는 양이 많아 실제 반응 시 반응에 참여하는 표면 활성 금속양이 적음을 알 수 있다. 특히, 선택적 산화반응과 같이 표면에서 빠른 반응이 일어나는 경우, 기공 내부의 활성금속이 반응에 참여하기 어려워 반응 활성이 낮음을 PrOx 반응실험을 통해 확인할 수 있었다. PrOx test 조건은 GHSV 250000~60000, 온도는 80~200도, 람다값은 2~4로 성능 비교하여 실험 하였다. PrOx의 성능평가 결과 담체를 ${\alpha}-Al_2O_3$를 사용하여 deposition-precipitation방법으로 제조한 pH6.5 촉매에서 $100{\sim}160^{\circ}C$에서 90%의 가장 높은 CO conversion을 가지고 18%의 선택도를 가졌다.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.87-92
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• 2006

The steam reforming of methane over Ru-promoted $Ni/Al_2O_3$ was carried out. Compared with $Ni/Al_2O_3$, which needs pre-reduction by $H_2$, $Ru/Ni/Al_2O_3$ catalysts exhibited relatively higher activity than conventional $Ni/Al_2O_3$. According to $H_2-TPR$ of reduced or used catalysts and $CH_4-TPR$, it was revealed that the reduction of $RuO_x$ by $CH_4$ decomposition begins at a lower temperature ($220^{\circ}C$) and the reduced Ru facilitates the reduction of NiO, and leads to self-activation. To improve metal dispersion, the catalyst was soaked in 7 M aqueous $NH_4OH$ for 2 h at $45^{\circ}C$ while stirring. As a result, $Ru/Ni/Al_2O_3$ catalysts with aqueous $NH_4OH$ treatment have higher activity, larger metal surface area (by $H_2$-chemisorption), and small particle size (by XRD and XPS). It is noted that the amount of noble metal could be reduced by aqueous $NH_4OH$ treatment.

• Transactions of the Korean hydrogen and new energy society
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• v.21 no.5
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• pp.390-397
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• 2010

0.5wt% Ru/$\alpha-Al_2O_3$ catalysts are prepared by deposition-precipitation method for the preferential CO oxidation In order to investigate the effect of pH on the Ru dispersion and particle size, the pH of precursor solution is adjusted to between 5.5 and 9.5. 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared at the pH of 6.5 has high Ru dispersion of 17.9% and small particle size of 7.7nm. In addition, 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared at the pH 6.5 is easily reduced at low temperatures below $150^{\circ}C$ due to high dispersion of $RuO_2$ particle and shows high CO conversion over 90% in the wide temperature range between $100^{\circ}C$ and $160^{\circ}C$. Moreover, the deposition-precipitation is a feasible method to improve the Ru dispersion as compared to the impregnation method. The 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared by deposition-precipitation exhibits higher CO conversion than 0.5wt% Ru/$\alpha-Al_2O_3$ catalysts prepared by impregnation due to higher metal dispersion and better reducibility at low temperature.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.05a
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• pp.373-376
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• 2010

The characteristics of thermal-resistance catalyst for $N_2O$ propellant decomposition were studied in the present study. Si was added to the $Al_2O_3$ support to stabilize its surface area at high temperature (> $1000^{\circ}C$). Ru was used as a catalyst for $N_2O$ decomposition. The prepared catalysts were characterized using SEM, EDS and XRD analysis, and $N_2O$ conversion was measured as reaction temperatures. The Ru/$Al_2O_3$-Si catalyst showed better performance than Ru/$Al_2O_3$ catalyst.

• Applied Chemistry for Engineering
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• v.5 no.5
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• pp.808-818
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• 1994

Effects of ceria additive on the activity and thermal aging behavior of supported Ru catalysts were investigated using Ru/${\gamma}$-$Al_2O_3$and Ru/$CeO_2$-${\gamma}$-$Al_2O_3$. The catalysts were characterized by $^{129}Xe$-NMR and $H_2$ chemisorption. The cataltic activity for conversion of CO, HC and $NO_x$ was measured using simulated automobile engine exhausts under lean, rich and stoichiometric conditions. For both fresh and aged catalysts, Ru/$CeO_2$-${\gamma}$-$Al_2O_3$ was more active than Ru/${\gamma}$-$Al_2O_3$ for all three pollutants. Results of $^{129}Xe$-NMR and $H_2$ chemisorption indicated that sintering of Ru particles occurred to the same extent for both catalysts during the thermal aging process. After thermal aging at 673K, however, the catalytic activity of the aged Ru/$CeO_2$-${\gamma}$-$Al_2O_3$ was substantially higher than that of the fresh one, while the activity of Ru/${\gamma}$-$Al_2O_3$ decreased after the thermal aging. This finding may suggest new active sites were created during the thermal aging, probably in the vicinity of the interface between Ru and Ce. For more quantitative investigation of the effect of a cation such as Ce on the thermal aging of Ru metal particles, Ru catalysts supported on cation-exchanged Y-zeolites were used as the model catalysts. The results indicated that when Ba, Ca, La, Y or Ce was used for the cation exchange, the exchanged cation did not affect the thermal aging behavior of Ru in Y-zeolite, as evidenced by $^{129}Xe$-NMR and EXAFS.

• Applied Chemistry for Engineering
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• v.20 no.5
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• pp.522-526
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• 2009

The catalytic oxidation of 1,2-dichloribenzene (1,2-DCB) and simultaneous catalytic reduction of nitrogen oxides over the single catalyst has been investigated over various metals (Ru, Mn, Co and Fe) supported on $Al_2O_3$ and $CeO_{2}$. The activity of the different catalysts for catalytic oxidation of 1,2-dichloribenzene depended on the used metal, Ru/Co/$Al_2O_3$, Mn-Fe/CeO2 and Cr/$Al_2O_3$ (commercial catalysts) being the most actives ones. In the catalytic oxidation of chlorobenzene (CB), Ru/Co/$Al_2O_3$ is better than Pt-Pd/$Al_2O_3$, which is the well-known catalyst good for VOC oxidation. Furthermore, it has a good durability on the deactivation by $Cl_2$ and sulfur. For nitrogen oxides (NOx) removal, NOx conversion was 70% at $260^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.143-144
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• 2005

Recently, MIM(metal-insulator-metal) capacitor is one of the essential device for DRAM device. In this thesis, $Al_2O_3$ thin film which has a relatively high dielectric constant was deposited by ALD(atomic layer deposition) using MPTMA and $H_2O$ source. Deposition temperature of $Al_2O_3$ thin film was $200^{\circ}C$ and its thickness was 300 ${\AA}$. $RuO_2$ bottom electrode was deposited by RF-magnetron sputtering using $RuO_2$ target. The physical characteristics of $Al_2O_3$ films were investigated by AES, TEM and Ellipsometry. Electrical characteristics were analyzed by C-V and I-V measurement.

• 한국연소학회:학술대회논문집
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• 2014.11a
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• pp.355-356
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• 2014

Catalytic steam reforming of tar produced from biomass gasification was conducted using several Ni-based catalysts. K and Mn were used as a promoter over $Ni/Ru/Al_2O_3$ catalyst. The pellet and monolith type catalysts were prepared and applied to lab and bench-scale biomass gasification system. The $Ni/Ru-K/Al_2O_3$ catalyst shown higher performance than $Ni/Ru-Mn/Al_2O_3$ catalyst at low temperature range.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.11a
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• pp.58-61
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• 2009

The characteristics of nitrous oxide catalytic decomposition were studied to utilize the nitrous oxide as a propellant. The Ru and Pt were selected as nitrous oxide decomposition catalysts and loaded in the $Al_2O_3$ support using an impregnation method. The nitrous oxide conversions as a variation of GHSV and reaction temperature were measured in a tubular reactor. At the low GHSV and high temperature, the conversion was increased, and Ru/$Al_2O_3$ catalyst showed better performance than Pt/$Al_2O_3$ catalyst.