Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.143-144
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- 2005
Characteristics of ALD-$Al_2O_3$ MIM Capacitor on $RuO_2$ Metal Electrode
$RuO_2$ 전극 위에 증착된 ALD-$Al_2O_3$ MIM 커패시터 특성
- Do, Seung-Woo (Kyungpook National Univ.) ;
- Mun, Kyung-Ho (Kyungpook National Univ.) ;
- Jang, Cheol-Yeong (Kyungpook National Univ.) ;
- Jung, Young-Chul (Kyongju Univ.) ;
- Lee, Jae-Sung (Uiduk Univ.) ;
- Lee, Yong-Hyun (Kyungpook National Univ.)
- Published : 2005.07.07
Abstract
Recently, MIM(metal-insulator-metal) capacitor is one of the essential device for DRAM device. In this thesis,