The analysis of stresses in Ru thin films and suppression of grain growth of Ru with oxygen flow rate control (Ru 박막의 응력 거동 분석 및 산소 유량 조절을 통한 결정립 성장 억제)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2002.05a
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- pp.62-62
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- 2002