• 제목/요약/키워드: Rough diamond

검색결과 37건 처리시간 0.018초

고정 입자 정반을 이용한 사파이어 기판의 연마 특성 연구 (Study on the Lapping Characteristics of Sapphire Wafer by using a Fixed Abrasive Plate)

  • 이태경;이상직;조원석;정해도;김형재
    • Tribology and Lubricants
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    • 제32권2호
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    • pp.44-49
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    • 2016
  • Diamond mechanical polishing (DMP) is a crucial process in a sapphire wafering process to improve flatness and achieve the target thickness by using free abrasives. In a DMP process, material removal rate (MRR) is a key factor to reduce process time and cost. Controlling mechanical parameters, such as velocity and pressure, can increase the MRR in a DMP process. However, there are limitations of using high velocities and pressures for achieving a high MRR owing to their side effects. In this paper, we present the lapping characteristics and improvement of MRR by using a fixed abrasive plate through an experimental study. The change in MRR as a function of velocity and pressure follows Preston's equation. The surface roughness of a wafer decreases as the plate velocity and pressure increases. We observe a sharp decrease in MRR over the lapping time at a high velocity and pressure in the velocity and pressure test. An analysis of surface roughness (Rq and Rpk) indicates that wear of abrasives decreases the MRR sharply. In order to investigate the effect of abrasive wear on the MRR, we utilize a cutting fluid and a rough wafer. The cutting fluid delays the wear of abrasives resulting in improvement of MRR drop. The rough wafer maintains the MRR at a stable rate by self-dressing.

Molecular dynamics study on initial growth behavior of amorphous carbon film under various incidence angles

  • Joe, Min-Woong;Moon, Myoung-Woon;Lee, Kwang-Ryeol
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.310-310
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    • 2011
  • Morphological evolution of amorphous carbon film is investigated by molecular dynamics simulation. Here, energetic carbon atoms (75 eV) are deposited on the diamond (001) substrate to find effect of incidence angles. At normal and near-normal incidences ($0^{\circ}{\sim}30^{\circ}$) atomically smooth surfaces are observed during their growth. However, rough surfaces emerge and develop into a ripple structure at grazing incidences ($60^{\circ}{\sim}70^{\circ}$). The different growth modes according to the incidence angles can be described by impact-induced displacements of atoms. Downhill transport along any sloped surfaces is predominant for the case of normal incidence. As the incidence angles become grazing, uphill transport is allowed along the surfaces, which have smaller slopes than incidence angle, so the surface features can be amplified. Impact-induced transport and self-shadowing effect can be responsible to the initial growth of seeding structures at a grazing incidence, which would be grown up as tilted columnar structures in further depositions.

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복합(複合)레진의 표면연마(表面硏磨)에 관(關)한 실험적(實驗的) 연구(硏究) (EXPERIMENTAL STUDY OF THE SURFACE FINISHINGS ON THE COMPOSITE RESIN SURFACES)

  • 김부랑;최호영;박상진
    • Restorative Dentistry and Endodontics
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    • 제8권1호
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    • pp.97-106
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    • 1982
  • The purpose of this study was to evaluate the effect of different polishing procedures on the surfaces of composite resins. Two-paste type comosite restorative resin (Hipol) was selected for this study. 70 cavities prepared on the plaster-stone dies, 6mm in diameter and 2mm in depth, was filled with composite resin according to the manufacturer's specifications and by polymerizing against mylar strips. The polymerized composite resin specimens were polished (surface finished) by using 6 polishing devices; white stones, diamond finishing points, 12-fluted carbide finishing burs, green stones, sand paper disks, and Quasite rubber disk after polished with sand paper disks and green stones. A profilometer (Bendix type) was used to record in microinches the surface roughness of each surface finished composite resin specimens. The results were as follows. 1. The best finished surface that can be obtained is a surface formed by the mylar matrix strip 2. The white stones produced the smoothest surface in the experimental group. 3. The green stones produced the roughest surface in the experimental group. 4. It was proved that the gradual use of finishing instruments from a rough one to fine ones reduced the surface roughness.

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알루미나-유리 복합체용 글래스의 조성에서 $CeO_2$의 함량변화가 강도에 미치는 영향 (EFFECT OF $CEO_2$ ADDITION IN GLASS COMPOSITION ON THE STRENGTH OF ALUMINA-GLASS COMPOSITES)

  • 이화진;송광엽;강정길
    • 대한치과보철학회지
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    • 제38권5호
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    • pp.595-605
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    • 2000
  • Dental ceramics have good aesthetics, biocompatibility, low thermal conductivity, abrasion resistance, and color stability. However poor resistance to fracture and shrinkage during firing process have been limiting factors in their use, particularly in multiunit ceramic restorations. A new method for making all-ceramic crowns that have high strength and low processing shrinkage has been developed and is referred to as the Vita In-Ceram method. This study was performed to investigate the effect of $CeO_2$ addition in borosilicate glasses on the strength of alumina-glass composites. Porous alumina compacts were prepared by slip casting and sintered at $1,100^{\circ}C$ for 2 hours. Dense composites were made by infiltration of molten glass into partially sintered alumina at $1,140^{\circ}C$ for 4 hours. Specimens were polished sequentially from #800 to #2000 diamond disk. and the final surface finishing on the tensile side was received an additional polishing sequence through $1{\mu}m$ diamond paste. Biaxial flexure test was conducted by using ball-on-three-ball method at a crosshead speed of 0.5mm/min. To examine the microstructural aspect of crack propagation in the alumina-glass composites, Vickers-produced indentation crack was made on the tensile surface at a load of 98.0 N and dwell time of 15 sec, and the radial crack patterns were examined by an optical microscope and a scanning electron microscope. The results obtained were summarized as follows; 1. The porosity rates of partially sintered alumina decreased with the rising of firing temperature. 2. The maximum biaxial flexure strength of 423.5MPa in alumina-glass composites was obtained with an addition of 3 mol% $CeO_2$ in glass composition and strength values showed the aspect of decrease with the increase of $CeO_2$ content. 3 The biaxial flexure strength values of alumina-glass composites were decreased with rising the firing temperature. 4. Observation of the fracture surfaces of alumina-glass composites indicated that the enhancement of strength in alumina-glass composites was due to the frictional or geometrical inter-locking of rough fracture surfaces and ligamentary bridging by intact islands of materials left behind the fracture front.

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랩그라인딩 후 사파이어 웨이퍼의 표면거칠기가 화학기계적 연마에 미치는 영향 (Effect of Surface Roughness of Sapphire Wafer on Chemical Mechanical Polishing after Lap-Grinding)

  • 서준영;이현섭
    • Tribology and Lubricants
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    • 제35권6호
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    • pp.323-329
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    • 2019
  • Sapphire is currently used as a substrate material for blue light-emitting diodes (LEDs). The market for sapphire substrates has expanded rapidly as the use of LEDs has extended into various industries. However, sapphire is classified as one of the most difficult materials to machine due to its hardness and brittleness. Recently, a lap-grinding process has been developed to combine the lapping and diamond mechanical polishing (DMP) steps in a single process. This paper studies, the effect of wafer surface roughness on the chemical mechanical polishing (CMP) process by pressure and abrasive concentration in the lap-grinding process of a sapphire wafer. In this experiment, the surface roughness of a sapphire wafer is measured after lap-grinding by varying the pressure and abrasive concentration of the slurry. CMP is carried out under pressure conditions of 4.27 psi, a plate rotation speed of 103 rpm, head rotation speed of 97 rpm, and slurry flow rate of 170 ml/min. The abrasive concentration of the CMP slurry was 20wt, implying that the higher the surface roughness after lapgrinding, the higher the material removal rate (MRR) in the CMP. This is likely due to the real contact area and actual contact pressure between the rough wafer and polishing pad during the CMP. In addition, wafers with low surface roughness after lap-grinding show lower surface roughness values in CMP processes than wafers with high surface roughness values; therefore, further research is needed to obtain sufficient surface roughness before performing CMP processes.

Polish of interface areas between zirconia, silicate-ceramic, and composite with diamond-containing systems

  • Pott, Philipp-Cornelius;Hoffmann, Johannes Philipp;Stiesch, Meike;Eisenburger, Michael
    • The Journal of Advanced Prosthodontics
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    • 제10권4호
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    • pp.315-320
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    • 2018
  • PURPOSE. Fractures, occlusal adjustments, or marginal corrections after removing excess composite cements result in rough surfaces of all-ceramic FPDs. These have to be polished to prevent damage of the surrounding tissues. The aim of this study was to evaluate the roughness of zirconia, silicate-ceramic, and composite after polish with different systems for intraoral use. MATERIALS AND METHODS. Each set of 50 plates was made of zirconia, silicate-ceramic, and composite. All plates were ground automatically and were divided into 15 groups according to the treatment. Groups Zgrit, Sgrit, and Cgrit received no further treatment. Groups Zlab and Slab received glaze-baking, and group Clab was polished with a polishing device. In the experimental groups Zv, Sv, Cv, Zk, Sk, Ck, Zb, Sb, and Cb, the specimens were polished with ceramic-polishing systems "v", "k", and "b" for intraoral use. Roughness was measured using profilometry. Statistical analysis was performed with ANOVA and $Scheff{\acute{e}}$-procedure with the level of significance set at P=.05. RESULTS. All systems reduced the roughness of zirconia, but the differences from the controls Zgrit and Zlab were not statistically significant (P>.907). Roughness of silicate ceramic was reduced only in group Sv, but it did not differ significantly from both controls (P>.580). Groups Cv, Ck, and Cb had a significantly rougher surface than that of group Clab (P<.003). CONCLUSION. Ceramic materials can be polished with the tested systems. Polishing of interface areas between ceramic and composite material should be performed with polishing systems for zirconia first, followed by systems for veneering materials and for composite materials.

치약 종류에 따른 유치의 표면 변화 (Change in surface of primary tooth using different type of toothpaste)

  • 최정옥;남설희
    • 한국치위생학회지
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    • 제14권2호
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    • pp.281-286
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    • 2014
  • Objectives : The aim of this study is to evaluate the surface changes of enamel specimen, tooth structure by toothpastes in child and adult. Methods : Experimental teeth were collected from extracted human primary teeth. 120 enamel specimens were prepared by cutting the teeth into $2{\times}3{\times}2mm$ blocks using diamond saw and the specimens were assigned to 3 groups. Group 1 was used as control with no treatment. Group 2 was treated with child toothpaste and Group 3 was treated with adult toothpaste on primary enamel surface for 3 minutes daily over 4 weeks. The specimens were immersed into individual container having artificial saliva and the artificial saliva was changed every day. The electron probe micro analyzer(EPMA) provided weight percent(wt%) of calcium(Ca) and phosphorous(P) on enamel surface. The morphology was analyzed by scanning electron microscopy(SEM). Data were analyzed by one-way analysis of variance(ANOVA) and Tukey's test post-hoc test using SPSS(Version 20, SPSS Inc., Chicago, USA). Level of significance was set at 0.05. Results : The surface changes of the primary teeth revealed a significant difference during 4 weeks. Calcium(Ca) and phosphorous(P) levels were found the weight percent difference and a rough enamel surface was seen on SEM after adult toothpaste application. Conclusions : The changes in Ca and P and the morphological surface were affected by the primary tooth treated with adult toothpaste. Enamel surface showed significant differences during 4 weeks.