• 제목/요약/키워드: Rotational temperature

검색결과 348건 처리시간 0.027초

고온 회전 척을 구비한 포토레지스트 Spray Coating 방법 및 장치 (The Method and Apparatus for Photoresist Spray Coating with High Temperature Rotational Chuck)

  • 박태규;김준태;김국진;석창길
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.42-44
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    • 2003
  • The paper presents the method and apparatus for conformal photoresist spray coating on the 3D structured substrate. The system consists of a high-temperature-rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. The coating uniformity is acquired by controlling the moving speed of the ultrasonic spray nozzle across the substrate which is rotated constantly. To coat the photoresist conformally the spray angle of the nozzle and the temperature of the substrate are controlled during spray coating. The rotational chuck can be heated up by hot air or $N_2$. The photoresist (AZ1512) has been coated on the 3D structured wafer by spray coating system and the characteristics have been evaluated.

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볼 베어링의 운전조건에 따른 발열 특성 (Heat Generation Characteristics of Ball Bearing for Operating Conditions)

  • 장윤석;나희형;임윤철
    • Tribology and Lubricants
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    • 제13권4호
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    • pp.26-32
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    • 1997
  • The heat generation of the angular contact and the deep groove ball bearing is studied experimentally and numerically. The temperature variation of the inner and outer races and the temperature increase distribution are measured for the shaft rotational speeds, preloads, viscosities of the lubricant and lubrication methods. The measured temperature distributions are used as the input data of the numerical simulation to estimate the heat generation rate at the bearing. The temperatures of the inner and outer race increase more rapidly and approach faster to their steady values as the rotational speed increases. The optimal viscosity of the oil to minimize the heat generation is 8~10 cSt at 4$0^{\circ}C$ when the oil-air lubrication method is adopted. The heat generation of the bearing increases with the rotational speed and depends more on the lubrication method than on the preload variation.

Surface Cleaning of Polyethylene Terephthalate Film with Non-equilibrium Atmospheric Discharge Plasma

  • Sung, Youl-Moon
    • Transactions on Electrical and Electronic Materials
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    • 제9권2호
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    • pp.79-83
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    • 2008
  • The dampness by treating the surface with polyethylene terephthalate (PET) film was measured to grasp the plasma parameters and was observed the surface condition with an atomic force microscope (AFM) to find the causes of the dampness. Also, the vibrational and rotational temperatures in the plasma were calculated after identifying the radicals within the plasma by analyzing the emission spectral with an emission spectrum. The hydrophilic properties were enhanced, by treating the surface of the PET film with non-equilibrium atmospheric discharge plasma. When the rotational temperature was 0.22 to 0.31 eV within the plasma, surface modification control could be easily carried out to surface treatment of PET film on non-equilibrium atmospheric pressure plasma.

회전자를 갖는 분리형 히트파이프의 열전달특성에 관한 연구 (A Study on Heat Transfer Characteristics of Separate Type Heat Pipe with a Rotor)

  • 전철호;김오근
    • 태양에너지
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    • 제20권3호
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    • pp.75-84
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    • 2000
  • The purpose of this research is to study on the heat transfer characteristics of separate type heat pipe with a rotor. The heat transfer characteristics of the rotor condenser are various on input heat of evaporator, rotational speeds of rotor, and working fluid amount. The results obtained from the study are as follows. 1. Magnetic fluid using seal of the rotor operated in stability by a variation of temperature and rotation speeds. The configuration of magnetic fluid seal assembly was adequate. 2. Steam ejector is effective in recovering working fluid condensate in the rotor. When steam ejector is operating, the heat flux of working fluid does not change, with the wall temperature in the rotor. 3. The optimum design conditions on working fluid amount and rotational speeds are effective in evaporator volume 50%, rotational speeds 200rpm, 300rpm, and operating temperature $80^{\circ}C$. With working fluid amount increasing, overall heat transfer coefficient decreases linearly.

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풍력발전기용 피치/요 베어링의 하중 시험 결과 (Loading Test Results of Wind Turbine Pitch/Yaw Bearing)

  • 남주석;김흥섭;이영수;한정우
    • 풍력에너지저널
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    • 제3권1호
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    • pp.61-67
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    • 2012
  • The loading test of wind turbine pitch and yaw bearings have been conducted using special test rig designed for the test of large slewing bearings. Test type was fatigue test that applied fatigue load to each bearing and followed the defined test process. Measurement data during test were rotational torque and raceway temperature, and inspected key components by disassembling the bearing after all test finished. As a results, the raceway temperature during test did not exceed the operational temperature range of lubricant and rotational torque was reduced as the bearing's rotational cycle increased. In the inspection of key components, some plastic deformation and flaking were detected at some raceway sections while other components such as ball, spacer and seal remain indefective conditions.

회전 인크리멘탈 성형을 이용한 마그네슘 합금 판재의 성형한계 연구 (A Study of forming limit on rotational incremental forming of magnesium alloy sheet)

  • 박진기;배문기;유봉선;김영석
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2008년도 추계학술대회 논문집
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    • pp.456-461
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    • 2008
  • Being a lightweight material, magnesium is increasingly employed in automotive parts. However, because of its hexagonal closed-packed (HCP) crystal structure, in which only the basal plane can move, the magnesium alloy sheets show low ductility and formability at room temperature. Thus the press forming of magnesium alloy sheets has been performed at elevated temperature within range of $200^{\circ}C{\sim}250^{\circ}C$. However, we confirmed that using rotational incremental forming magnesium alloy sheets were formed without any heating at previous study. In this study, at the forming of square cup using rotational incremental sheet forming, the strain distributions were obtained and it was compared with forming limit curve at neck (FLCN). Also, forming limit curves at fracture (FLCF) of magnesium alloy sheets were obtained at elevated temperature and it was compared with the strain distribution of square cup of magnesium alloy sheet. In this study, we confirmed that conventional forming limit curves can not predict rotational incremental forming.

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Influence of the Welding Speeds and Changing the Tool Pin Profiles on the Friction Stir Welded AA5083-O Joints

  • El-Sayed, M.M.;Shash, A.Y.;Abd Rabou, M.
    • Journal of Welding and Joining
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    • 제35권3호
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    • pp.44-51
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    • 2017
  • In the present study, AA 5083-O plates are joined by friction stir welding technique. A universal milling machine was used to perform the welding process of the work-pieces which were fixed on the proper position by a vice. The joints were friction stir welded by two tools with different pin profiles; cylindrical threaded pin and tapered smooth one at different rotational speed values; 400 rpm and 630 rpm, and different welding speed values; 100 mm/min and 160 mm/min. During FSW of each joint, the temperature was measured by infra-red thermal image camera. The welded joints were inspected by visually as well as by the macro- and microstructure evolutions. Furthermore, the joints were tested for measuring the hardness and the tensile strength to study the effect of changing the FSW parameters on the mechanical properties. The results show that increasing the rotational speed results in increasing the peak temperature, while increasing the welding speed results in decreasing the peak temperature for the same tool pin profile. Defect free welds were obtained at lower rotational speed by the threaded tool profile. Moreover, the threaded tool pin profile gives superior mechanical properties at lower rotational speed.

Rovibrational Nonequilibrium of Nitrogen Behind a Strong Normal Shock Wave

  • Kim, Jae Gang
    • International Journal of Aeronautical and Space Sciences
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    • 제18권1호
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    • pp.28-37
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    • 2017
  • Recent modeling of thermal nonequilibrium processes in simple molecules like hydrogen and nitrogen has indicated that rotational nonequilibrium becomes as important as vibrational nonequilibrium at high temperatures. In the present work, in order to analyze rovibrational nonequilibrium, the rotational mode is separated from the translational-rotational mode that is usually considered as an equilibrium mode in two- and multi-temperature models. Then, the translational, rotational, and electron-electronic-vibrational modes are considered separately in describing the thermochemical nonequilibrium of nitrogen behind a strong normal shock wave. The energy transfer for each energy mode is described by recently evaluated relaxation time parameters including the rotational-to-vibrational energy transfer. One-dimensional post-normal shock flow equations are constructed with these thermochemical models, and post-normal shock flow calculations are performed for the conditions of existing shock-tube experiments. In comparisons with the experimental measurements, it is shown that the present thermochemical model is able to describe the rotational and electron-electronic-vibrational relaxation processes of nitrogen behind a strong shock wave.

타입 4 복합재 압력용기 라이너의 회전 성형 온도에 따른 저온 특성 (Low-Temperature Characteristics of Type 4 Composite Pressure Vessel Liner according to Rotational Molding Temperature)

  • 정홍로;박예림;양동훈;박수정;김윤해
    • Composites Research
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    • 제35권3호
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    • pp.147-152
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    • 2022
  • 이 논문은 Type 4 압력용기 라이너의 회전 성형 시 내부온도 조건에 따른 저온 특성 평가에 관한 연구이다. 회전 성형의 경우 온도 조건에 따라 라이너의 성형성에 민감한 영향을 주기 때문에 사용 소재인 폴리아미드에 대한 온도 조건을 정확히 설정해야 한다. 라이너 소재인 폴리아미드(Polyamide)의 구조적 변화는 AFM(Atomic Force Microscope)으로 표면을 분석하였으며, DSC(Differential Scanning Calorimeter)로 결정화도를 측정하여 저온에서의 기계적 강도 값에 변화를 줄 것인지를 평가하였다. 또한, 라이너 내부의 황색도를 관찰하여 라이너의 성형성을 확인하였다. 그 결과, 내부온도의 용융 범위가 넓을수록 낮은 황색도를 나타냈으며, 저온에서의 연신율 및 충격 특성은 향상됐다. 또한, AFM과 DSC에 의해 폴리아미드의 구조가 균일하고 높은 결정화도를 가진 것을 확인하였다. 따라서, 이와 같은 실험 결과는 회전 성형 시 온도 조건의 변화가 저온에서의 물성 향상에 기여함을 입증했으며, 향후 기밀성 평가를 통해 실 제품으로의 적용성 검증이 가능할 것으로 판단된다.

산화막 CMP에서 발생하는 온도가 연마특성에 미치는 영향 (Effect of Temperature on Polishing Properties in Oxide CMP)

  • 김영진;박범영;김형재;정해도
    • 한국전기전자재료학회논문지
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    • 제21권2호
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    • pp.93-98
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    • 2008
  • We investigated the effect of process temperature on removal rate and non-uniformity based on single head kinematics in oxide CMP. Generally, it has been known that the temperature profile directly transfers to the non~uniformity of removal rate on the wafer, which has similar tendency with the sliding distance of wafer. Experimental results show that platen velocity is a dominant factor in removal rate as well as average temperature. However, the non-uniformity does not coincide between process temperature and removal rate, due to slurry accumulation and low deviation of temperature. Resultantly, the removal rate is strongly dependent on the rotational speed of platen, and its non -uniformity is controlled by the rotational speed of polishing head. It means lower WIWNU (With-in-wafer-non-uniformity) can be achieved in the region of higher head speed.