• 제목/요약/키워드: Rotational Exposure

검색결과 27건 처리시간 0.031초

Wafer Hybrid Bonding 정밀 정렬을 위한 θz 스테이지 설계 및 제어평가 (θz Stage Design and Control Evaluation for Wafer Hybrid Bonding Precision Alignment)

  • 문제욱;김태호;정용진;이학준
    • 반도체디스플레이기술학회지
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    • 제20권4호
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    • pp.119-124
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    • 2021
  • In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θz alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

삼차원적 외음부 재건을 위한 나비형피판술 (A New Flap for 3-Dimensional Vulvar and Vaginal Reconstruction: The "Butterfly Flap")

  • 김상화;서병철;오득영;서제원;안상태;이종원
    • Archives of Plastic Surgery
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    • 제37권6호
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    • pp.847-849
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    • 2010
  • Purpose: Traditional radical surgery for vulvar cancer produces severe skin and soft tissue defects in the vulvar and vaginal area. Vulvoperineal V-Y advancement fasciocutaneous flaps have limitations in advancement and tension at the wound margin and vaginal orifice area, causing wound disruption or vaginal wall exposure. Therefore, we designed the "Butterfly flap" using a vulvoperineal V-Y advancement fasciocutaneous flap and an inguinal rotational skin flap for 3-dimensional reconstruction of vagina and vulvar area. Methods: A 27 year-old female was diagnosed with vulvar intraepithelial neoplasia. Radical vulvectomy and full-thickness-skin-graft was performed. We designed a vulvoperineal V-Y advancement fasciocutaneous flap as the greater wing and inguinal rotational skin as the lesser wing. After flap elevation, the inguinal flap was rotated $180^{\circ}$ to reconstruct the labia major and vaginal orifice. The perineum was reconstructed using V-Y advancement flaps. Results: The flap survived completely, without any complications. After 6 months, the patient was able to perform normal sexual activities and after 18 months, the patient was able to give birth to normal child by caesarean section. Conclusion: The traditional vulvoperineal V-Y advancement fasciocutaneous flap is thin, reliable, easily elevated and matches local skin quality. However, the vaginal wall becomes exposed due to limited advancement and tension of the flap. The "Butterfly flap" using a vulvoperineal V-Y advancement fasciocutaneous flap and an inguinal rotational skin flap is useful for the release of vaginal orifice contracture, reconstruction of the labia major, and 3-dimensional reconstruction of vagina and vulvar area.

Vertical alignment of liquid crystal on $a-SiO_x$film by using $Ar^+$ beam

  • Son, Phil-Kook;Park, Jeung-Hun;Cha, Sung-Su;Kim, Jae-Chang;Yoon, Tae-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.818-821
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    • 2006
  • We demonstrate the vertical alignment of liquid crystal on $a-SiO_x$ film surface using the ion beam exposure. Liquid crystal can be aligned vertically by the rotational oblique evaporation of $a-SiO_x$ film. However, the electro-optic switching behavior of liquid crystal along random directions results in disclination lines. We found that we can achieve highly uniform alignment of liquid crystal without disclination lines by using the ion beam exposure. We found from XRD and XPS data that the vertical alignment can be achieved when x approaches 1.5 at the $a-SiO_x$ film surface. We have shown that the pretilt angle can be controlled by changing ion beam parameters, such as the ion beam energy, the angle of incidence, and the exposure time. We found that whether liquid crystals can be aligned vertically or homogeneously on $a-SiO_x$ film can be predicted simply by measuring the change in optical transmittance by deposition of $a-SiO_x$ thin film layers. We also have shown that a liquid crystal cell aligned vertically by the ion beam exposure exhibits the voltage-transmittance curve similar to that of a rubbed polyimide cell.

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Development of Moving Alternating Magnetic Filter Using Permanent Magnet for Removal of Radioactive Corrosion Product from Nuclear Power Plant

  • M. C. Song;Kim, S. I.;Lee, K. J.
    • Nuclear Engineering and Technology
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    • 제34권5호
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    • pp.494-501
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    • 2002
  • Radioactive Corrosion Products (CRUD) which are generated by the neutron activation of general corrosion products at the nuclear power plant are the major source of occupational radiation exposure. Most of the CRUD has a characteristic of showing strong ferrimagnetisms. Along with the new development and production of permanent magnet (rare earth magnet) which generates much stronger magnetic field than the conventional magnet, new type of magnetic filter that can separate CRUD efficiently and eventually reduce radiation exposure of personnel at nuclear power plant is suggested. This separator consists of inner and outer magnet assemblies, coolant channel and container surrounding the outer magnet assembly. The rotational motion of the inner and outer permanent magnet assemblies surrounding the coolant channel by driving motor system produces moving alternating magnetic fields in the coolant channel. The CRUD can be separated from the coolant by the moving alternating magnetic field. This study describes the results of preliminary experiment performed with the different flow rates of coolant and rotation velocities of magnet assemblies. This new magnetic filter shows better performance results of filtering the magnetite at coolant (water). How rates, rotating velocities of magnet assemblies and particle sizes turn out to be very important design parameters.

미세 매연입자의 응집을 위한 초음파장의 적용 (Application of Ultrasonic for agglomeration of fine soot particles)

  • 정상현;홍원석;심성훈;김용진;이성범
    • 한국연소학회지
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    • 제8권2호
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    • pp.41-49
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    • 2003
  • Ultrasonic field of 28kHz with sound pressure level 162dB has been employed to agglomerate the fine soot particle produces in a diffusion flame in a chamber. The agglomeration process has been investigated with digital camcorder and analysed in terms of the decrease of number density with exposure time. From the observation of agglomeration process, the initial agglomeration has been carried out during the short time, and it has been dominated by the orthokinetic collision. Thereafter, a slower agglomeration mechanism, driven by acoustic streaming in the chamber takes over and agglomeraters grew to diameters of several millimeters were levitated at the pressure node of the acoustic wave. And, the circular disk shape of large agglomeraters with the rotational and translational motion is observed.

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자동차용 시로코팬의 성능 및 유동특성에 관한 실험적 연구 (An Experimental Study on Performance and Flow Characteristics of Automotive Sirocco Fan)

  • 유성연;이대웅
    • 설비공학논문집
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    • 제14권11호
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    • pp.954-963
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    • 2002
  • For the optimal design of an automotive blower system, effects of the scroll cut-off starting angle, the clearance between blade tip and bellmouth, and the scroll expansion angle on the performance of sirocco fan are investigated experimentally. Best performance is achieved at fan exposure ratio $\Deltae/r_c$,/TEX> =1.0, and clearance ratio $\DeltaeC/C=0.62. Flow characteristics inside sirocco fan are also studied by using LDV. Flow patterns in the inside of fan can be classified into three regions. Velocity vector has the same direction as rotational direction of fan at 0~$120^{\circ}$, toward the fan blades at 150~$180^{\circ}$, and opposite direction at 210~$330^{\circ}$. Turbulent intensity is relatively high near the cut-off edge in the scroll housing.

SYNTHESIS AND APPLICATION OF NEW SPIN PROBES

  • Kim, S.D.;Freeman, H.S.;Mcgregor, R.
    • 한국섬유공학회:학술대회논문집
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    • 한국섬유공학회 1990년도 제2차 학술발표초록집
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    • pp.67-67
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    • 1990
  • Three non-ionic and two anioinic spin probes, differing in size and substituent, were synthesized. Their mobility in dried nylon 6 film was investicated by the spin probe technique using electron spin resonance spectrometer. When the size of a spin probe was large and the interaction between the probe molecules and polymer chains existed, the mobility of spin probes decreased. From Arrhenius plots of rotational correlation time, one discontinuity point ($T_d$) was determined. The activation energies for rotation below and above $T_d$ were discussed in terms of the mode of probe rotation. Three spin probes could be viewed as azo dyes having a built-in nitroxide radical. Photolysis of them in dimethylformamide and in nylon 6 film was performed by exposure to 254 nm UV light in the presence of air. It was found that dyes having a built-in nitroxide radical showed better photostability than dyes derived from ${\bata}-naphthol$..

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Reduction of Radiation Dose to Eye Lens in Cerebral 3D Rotational Angiography Using Head Off-Centering by Table Height Adjustment: A Prospective Study

  • Jae-Chan Ryu;Jong-Tae Yoon;Byung Jun Kim;Mi Hyeon Kim;Eun Ji Moon;Pae Sun Suh;Yun Hwa Roh;Hye Hyeon Moon;Boseong Kwon;Deok Hee Lee;Yunsun Song
    • Korean Journal of Radiology
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    • 제24권7호
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    • pp.681-689
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    • 2023
  • Objective: Three-dimensional rotational angiography (3D-RA) is increasingly used for the evaluation of intracranial aneurysms (IAs); however, radiation exposure to the lens is a concern. We investigated the effect of head off-centering by adjusting table height on the lens dose during 3D-RA and its feasibility in patient examination. Materials and Methods: The effect of head off-centering during 3D-RA on the lens radiation dose at various table heights was investigated using a RANDO head phantom (Alderson Research Labs). We prospectively enrolled 20 patients (58.0 ± 9.4 years) with IAs who were scheduled to undergo bilateral 3D-RA. In all patients' 3D-RA, the lens dose-reduction protocol involving elevation of the examination table was applied to one internal carotid artery, and the conventional protocol was applied to the other. The lens dose was measured using photoluminescent glass dosimeters (GD-352M, AGC Techno Glass Co., LTD), and radiation dose metrics were compared between the two protocols. Image quality was quantitatively analyzed using source images for image noise, signal-to-noise ratio, and contrast-to-noise ratio. Additionally, three reviewers qualitatively assessed the image quality using a five-point Likert scale. Results: The phantom study showed that the lens dose was reduced by an average of 38% per 1 cm increase in table height. In the patient study, the dose-reduction protocol (elevating the table height by an average of 2.3 cm) led to an 83% reduction in the median dose from 4.65 mGy to 0.79 mGy (P < 0.001). There were no significant differences between dose-reduction and conventional protocols in the kerma area product (7.34 vs. 7.40 Gy·cm2, P = 0.892), air kerma (75.7 vs. 75.1 mGy, P = 0.872), and image quality. Conclusion: The lens radiation dose was significantly affected by table height adjustment during 3D-RA. Intentional head off-centering by elevation of the table is a simple and effective way to reduce the lens dose in clinical practice.

A Destruction Pattern Analysis of a Turbo-Molecular Pump According to the Foreline Clamp Damage in an ICP Dry Etcher for 300 mm Wafers

  • Jeong, Jinyong;Lee, Intaek;Joo, Junghoon
    • Applied Science and Convergence Technology
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    • 제24권2호
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    • pp.27-32
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    • 2015
  • We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

다양한 광원하에서의 TiO2에 의한 수은제거 효율비교 (Comparison of the Mercury Removal Efficiency using TiO2 Powder under Various Light Sources)

  • 이용규;이태규;김우식
    • Korean Chemical Engineering Research
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    • 제43권1호
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    • pp.170-175
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    • 2005
  • 자외선을 대체하여 형광등이나 자연광(햇빛)을 이용하여 $TiO_2$로 수은제거 실험을 수행하였다. 반응기는 내부의 $TiO_2$가 광원에 최대한 노출되도록 디자인하였으며 회전할 수 있게 하였다. 반응기 내부에 $TiO_2$와 유리비드를 섞어 넣어 기상수은과 흡착제와의 접촉면적을 최대화하였다. 광촉매가 가장 활성을 잘 보이는 UV black light뿐 아니라 실험에 사용된 모든 광원에서 99% 이상의 수은제거효율을 보였다. 인체에 무해하고 경제성이 좋은 형광등이나 태양광하에서도 99% 이상의 수은제거효율을 얻었다.