• 대한기계학회논문집 C: 기술과 교육
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• 제1권1호
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• pp.39-47
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• 2013

탑 드라이브 장비는 드릴 비트에 회전력을 전달하여 굴착을 하게하는 장치이며, 1983년 Derrick Drilling Machine의 Kelly Rotary Table로 시작하여, 1984년에 DDM 650 DC가 등장함으로써 본격적으로 개발 되기 시작했다. 이러한 탑 드라이브 장비는 미국의 N사와 노르웨이 A사가 전 세계 시장의 90% 이상을 점유하고 있으며, 이로 인하여 탑 드라이브 장비의 세계시장 진입과 장비에 대한 정보가 제한적일 수 밖에 없다. 따라서 본 논문에서는 제한된 정보를 통하여 신뢰성을 가지는 제품을 개발하기 위한 절차 및 방법에 대하여 소개하고자 한다. 설계 오류 및 신뢰성이 검증된 제품 디자인을 위하여 3D Tool을 사용하였으며, 이를 활용하여 설계오류, 간섭체크, 기능체크, 구조강도 해석 등을 수행하여 제품의 신뢰성을 사전 검증 하였다.

• 한국정밀공학회지
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• 제23권8호
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• pp.72-79
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• 2006

We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 nm) and He-Cd laser (325 nm), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 nm and 0.03 nm for the specimen with the nominal pitch of 300 nm and 1000 nm. In the case of orthogonality measurement, the expanded uncertainties were less than $0.006^{\circ}$. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.

• 한국기계가공학회지
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• 제13권1호
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• pp.39-44
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• 2014

Techniques of tool posts are developing such that variable machining is possible using only one machine for the complication of a product's shape and to reduce the machining time. In order to develop a mill turret with a variable machining function with the mounting of mill turret units on a B-axis tilting table, we determine the static/dynamic stability of the structure of the mill turret. To this end, a static structural analysis and a modal analysis were conducted. From the results of the static structural analysis, the maximum stress was found to be less than the allowable stress. By the comparing the results of the modal analysis of the excitation frequencies of the mill turret, there were no resonance regions found. Therefore, the mill turret with the B-axis tilting facility is shown to have good structural integrity.

• Tribology and Lubricants
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• 제30권3호
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• pp.139-145
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• 2014

Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

• 한국CDE학회논문집
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• 제2권1호
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• pp.19-27
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• 1997

This paper presents rough cut tool path planning for the fewer-axis machine consisting of a three-axis CNC machine and a rotary indexing table. In the problem dealt with in this paper, the tool orientation is "intermediately" changed, distinguished from the conventional problem where the tool orientation is assumed to be fixed. The developed rough cut path planning algorithm tries to minimize the number of tool orientation (setup) changes together with tool changes and the machining time for the rough cut by the four procedures: a) decomposition of the machining area based on the possibility of tool interference (via convex hull operation), b) determination of the optimal tool size and orientation (via network graph theory and branch-and bound algorithm), c) generation of tool path for the tool and orientation (based on zig-zag pattern), and d) feedrate adjustment to maintain the cutting force at an operation level (based on average cutting force). The developed algorithms are validated via computer simulations, and can be also used in pure fiveaxis machining environment without modification.

• 한국기계가공학회지
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• 제6권3호
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• pp.112-118
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• 2007

Recently, the machine tools called multi-task machines, which mounted rotary axes on the table or spindle are used increasingly. Accordingly, multi-task machine tool takes a growing interest on the motion accuracy of feed drive system. In this study, measurement and diagnosis of motion errors ware attempted from circular pattern obtained by using DBB (Double ball bar) device. Those were obtained at both clockwise and counter clockwise motions in mutually perpendicularly intersecting three planes. The reliability of error measurement system for multi-task machine tool was verified by the direct test cutting.

• 한국기계가공학회지
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• 제6권3호
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• pp.31-37
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• 2007

Recently, the machine tools called multi-task machines, which mounted rotary axes on the table or spindle are used increasingly. Accordingly, multi-task machine tool takes a growing interest on the motion accuracy of feed drive system. In this study, measurement and diagnosis of motion errors ware attempted from circular pattern obtained by using DBB (Double ball bar) device. Those were obtained at both clockwise and counter clockwise motions in mutually perpendicularly intersecting three planes. The reliability of error measurement system for multi-task machine tool was verified by the direct test cutting.

• 한국정밀공학회지
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• 제28권8호
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• pp.869-877
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• 2011

In order to manufacture precision parts which are used for IT and BT Industry by machining, users need higher speed & precision machining center. So, for development of this kind of machine, we designed gantry type machining center which is piling of 3 axes on one moving body and the 2-axis rotary table is fixed on the base. It is applied linear motor that is instead of ball-screw and servo-motor combination and 50,000 rpm high-speed spindle. Composite material structure called mineral casting or resin concrete is applied also. This paper presents design technology and evaluated results of high speed and precision machining center.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 1996년도 특별강연 및 춘계학술발표 개요집
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• pp.96-98
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• 1996

Welding of corner area across the edge is a difficult problem in robotized arc welding system, especially when continuously-welded leakage-proof product is required. This paper presents the methodology of cooperation plan of an arc welding robot and 1 or 2 axis welding manipulators for corner area welding. Welding trajectory for the robot is generated using clothoid curves; symmetrical double clothoid curve or unsymmetrical clothoid curve depending on the nature of the workpiece. The clothoid curve is first formulated for the case of linear type positioning table and then applied to the case of rotary type manipulator. The methodology is then illustrated for practical downhand welding situations.

• 한국정밀공학회지
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• 제32권2호
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• pp.135-140
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• 2015

It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.