• 진공이야기
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• 제2권4호
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.

• 한국유체기계학회 논문집
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• 제3권2호
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• pp.50-56
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• 2000

The effects of lobe shapes on the leak flow conductance of Roots-type vacuum pump are studied numerically and experimentally. The modelled lobe shape of Roots-type vacuum pump is two-lobe spur gear. The numerical analyses are performed on leak flows in Roots-type vacuum pump. It is numerically calculated using a 4th-order Runge-Kutta method and is compared with experimental results. Results show that for the case of involute lobe shape the total amount of the leak flow conductance is greater than that of cycloid and Cassini oval lobe shapes.

• Applied Science and Convergence Technology
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• 제24권1호
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• pp.9-15
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• 2015

The practical pumping speed of a dry pump is considerably lower than the intrinsic speed because of back-streaming through finite gaps of the rotor assembly. The maximum compression ratio and the ultimate pressure of the pump are also directly influenced by the back-streaming rate. Therefore, information on the gap conductance, which determines the back-streaming characteristics of the rotor assembly, is the most important key for estimating the pumping performance of a dry pump. In this paper, the feasibility of calculating analytically the pumping performance of a multi-stage Roots pump, one of the most popular types of dry pumps, by quantifying the gap conductance in a rational way, is discussed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.813-818
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• 2000

The objective of this study is to elucidate the characteristic performance of Roots-type vacuum pump with Cassini oval lobe shape. The modelled lobe shape of Roots-type vacuum pump is two-lobe spur gear. The numerical analyses are performed fer leak flows, using 4th-order Runge-Kutta method and are compared with experimental results. Results show that for the case of involute lobe shape the total amount of the leak flow conductance is greater than that of cycloid and Cassini oval lobe shapes.

• 한국소음진동공학회논문집
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• 제21권12호
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• pp.1112-1119
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• 2011

The goal of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Roots type vacuum pump, which is a dry vacuum pump, is necessary for the manufacturing process of the semiconductor and the display. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2017년도 제48회 춘계학술대회논문집
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• pp.1160-1164
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• 2017

본 연구에서는 루츠 펌프와 스크류 펌프를 이용한 진공 펌프 시스템을 이용해, 1 kg/s의 공기가 공급되는 시험장치에서 챔버 내의 압력을 2500 Pa로 유지할 수 있는 고도모의 시험장치를 설계하였다. 설계를 위해, 저유량의 공기 공급 조건에서, 소정의 펌프 조합을 이용해 실험을 수행하였다. 이를 통해, 1 kg/s급의 유량이 공급되는 시험장치를 위해서는 11대의 루츠 펌프와 33대의 스크류 펌프가 필요하다는 것을 확인할 수 있었다. 실험 결과를 이론 예측 결과와 비교하였다. 하지만, 이론적으로 예측한 흡입 유량은 실험 결과보다 20 %에 가깝게 많게 나왔다. 이는 조합 실험시, 루츠 펌프 전후단에 걸리는 차압이 높아서 발생한 것으로 여겨진다. 따라서 앞에서 제시한 것보다 더 많은 스크류 펌프를 설치할 경우, 보다 높은 진공도를가지는 시스템의 구축이 가능해질 것으로 판단된다.

• 한국유체기계학회 논문집
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• 제14권5호
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• pp.18-23
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• 2011

A CFD analysis method is developed and applied for investigating the gas flow and the byproduct particle trajectory in Roots type vacuum pump. The internal fluid flow and thermal fields between the rotors and the housing of vacuum pump are analyzed by using the dynamic mesh, the numerical methods for unsteady 2-D Navier-Stokes equation and the standard k-$\varepsilon$ turbulence model of the Fluent code. Coupled with the flow simulation results, the particle trajectory of the byproduct flowing into the pump with gas stream is analyzed by using discrete phase modeling technique. The CFD analysis results show the pressure, the velocity and the temperature distributions in pump change abruptly due to the rotation of rotors, and back flows are produced due to the strong reverse pressure gradients at rotor/rotor and rotor/housing clearances. The predicted byproduct particle trajectory results also show the particles impinge on the clearance surfaces between the housing and the rotor of pump and then may form the deposit layer causing the failure of pump.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2011년도 추계학술대회 논문집
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• pp.264-270
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• 2011

The goal of this study is a stability evaluation through eigenvalue and rotor dynamics analysis of the vacuum pump. The vacuum pump used is a roots type pump, one of the dry middle vacuum pumps, is necessary at the procedure to produce semiconductor and display. The eigenvalue evaluation is solved by numerical analysis through using Modal test and 2D 3D models. Both the experiment and the analysis result are similar, the analysis result using 2D is more oculate the 3D model comparing with test result. So rotor dynamic evaluation is performed through using 2D model. Rotor dynamic evaluation used the campbell diagram and root locus map which were acquired by complex eigenvalue analysis. And we checked minimum clearance of vacuum pump composition between two rotors through unbalance response analysis. Thus, vacuum pump, the target object of this study, was evaluated to be operated stably.

• 한국유체기계학회 논문집
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• 제16권2호
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• pp.10-14
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• 2013

The present study conducts CFD analyses on the internal flow fields of roots type vacuum pumps of semiconductor fabrication facility, and the computed CFD results for internal pressure and temperature distributions are applied to structural analyses of the pumps. The coupled analysis results between flow and structure show that the deformation of pump structure is mainly resulted from the thermal expansion of gas in pump, and the deformed impeller and housing produce their severe contact and impact phenomena causing mechanical damage and fracture.

• 한국유체기계학회 논문집
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• 제14권3호
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• pp.23-27
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• 2011

Due to a roots type medium vacuum pump is operated in condition of $1{\sim}10^{-3}$ torr vacuum, it could be applied for production and process of industrial parts, such as precise processing, vaporization, enrichment, separation, casting, metaling, welding, transportation. Therefore, the demand of this pump is increasing nowadays in our industrial markets of semiconductor, electric, electronic, automobile, material, environmental and transporting industries. However, the pumps are almost imported, because the domestic pumps are inferior in fields of vacuum range as under $10^{-1}$torr, relevant techniques(design, fabrication, casting, test, etc.) to the imported ones. In this study, essential parts of the development pump are designed with using of CFD and 3D decodes, FEM for analysing strength and deformation, generated heat, vibration and noise control, and are casted with using of mechanochemistry techniques for decreasing of weights, increasing of heat resistances and abrasion durability of materials for pump caing and impellers especially. Besides, in order to achieve ultimate vacuum around $10^{-3}$torr, this pump is composed of 6 stages, among which 1st stage is operated separately from remained stages. Additionally, a test rig for prototype pumps(300$m^3/h$ and 2,500$m^3/h$) is designed and procured as to apply for multi-staged rootz type vacuum pump, with modification of the test method recommended by KS B 6314 "Positive-displacement oil-sealed rotary vacuum pumps".