• Journal of the Optical Society of Korea
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• 제18권2호
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• pp.180-183
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• 2014

The surface of semiconductor solar cells, such as a-Si or CIGS (CuInGaSe) solar cells is not flat but textured in the microscopic domain. With textured surfaces, the optical reflectivity of a solar cell is different from that of flat surfaces in the wavelength region. In this paper, the effects of a textured surface on a CIGS solar cell are presented by RCWA (Rigorous Coupled Wave Analysis) method. The effect of incoherent light is also considered by RCWA with a Fourier analysis while conventional optical simulation uses the input light on the solar cell as coherent light. Using experimental results, the author showed that the RCWA method with a Fourier analysis is a proper method to simulate the optical properties of CIGS solar cells.

• Journal of the Optical Society of Korea
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• 제1권1호
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• pp.26-35
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• 1997

Rigorous coupled-wave analysis (RCWA) with a simplified eigenvalue problem is used to investigate the an-tireflective property of one-dimensional surface-relief gratings such as binary gratings, triangular gratings and gratings with triangle-like surface profiles. The convergence of RCWA is investigated by varying the number of layers and the number of space-harmonics used in the computation. For unpolarized light normally incident on a medium of refractive index 1.64 from vaccum, a triangle-like grating shows the reflectivity of $1.6 {\times} 10^{-4}$ in contrast to a minimum reflectivity of $3.8 {\times} 10^{-3}$ for a binary grating. We also study the dependence of reflectivity on the wavelength, and on the angle of incidence for a groove shape and depth which result in minimum reflectivity.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2002년도 종합학술발표회 논문집 Vol.12 No.1
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• pp.380-383
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• 2002

본 논문에서는 20㎓~50㎓ 대역에서 2 차원 PBG(Photonic-Bandgap) 구조의 투과 특성을 RCWA(Rigorous coupled-wave analysis)방법에 의한 Transfer matrix로 해석하였다. Square lattice의 PBG 구조에 대하여 TE 편파에서 유전율의 변화와 결함(defect)의 유무에 대한 투과 특성을 고찰하였다.

• Journal of the Optical Society of Korea
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• 제11권2호
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• pp.55-58
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• 2007

We propose a systematic method for design of fiber-optic surface plasmon resonance (SPR) sensors. We used rigorous coupled wave analysis (RCWA) for analysis of the transmission spectrum, and the (1+1) evolution strategy (ES) was employed as an optimization tool. The simulation results show that the optimization method presented here is very useful in designing fiber-optic SPR sensor for strain and temperature measurement. This algorithm can be extended to another objective function with other weighting factors and optical parameters.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1412-1414
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• 2009

It is suggested that the light extraction efficiency of the display device can be improved by adoption of periodic array of sub-wavelength scale structures. The relief of the total reflection has been investigated using the rigorous coupled wave analysis (RCWA). Various shape of the sub-wavelength scale structure allowed to have non vanishing transmittance for the light rays with the incident angle bigger than the critical angle.

• Journal of the Optical Society of Korea
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• 제14권2호
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• pp.142-145
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• 2010

In this work, a numerical analysis of a CIGS ($CuIn_{1-x}Ga_xSe_2$) solar cell with a rectangular grating on the electrode is presented. The effects of the grating on the energy conversion efficiency are calculated using the RCWA (rigorous coupled wave analysis) method. In conventional CIGS solar cells, the thickness of the light absorption layer (CIGS) is $2\;{\mu}m$, at which the incident light is almost absorbed. By adopting a grating on the electrode and using a less than $1\;{\mu}m$ CIGS layer, we obtained a higher efficiency compared to the conventional solar cells.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.176-177
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• 2013

Surface plasmon polaritons (SPPs) have attracted the attention of scientists and engineers involved in a wide area of research, microscopy, diagnostics and sensing. SPPs are waves that propagate along the surface of a conductor, usually metals. These are essentially light waves that are trapped on the surface because of their interaction with the free electrons of conductor. In this interaction, the free electrons respond collectively by oscillating in resonance with the light wave. The resonant interaction between the surface charge oscillation and the electromagnetic field of the light constitutes the SPPs and gives rise to its unique properties. In this papers, we studied theoretical and experimental extraordinary transmittance (T) and reflectance (R) of 2 dimensional metal hole array (2D-MHA) on GaAs in consideration of the diffraction orders. The 2d-MHAs was fabricated using ultra-violet photolithography, electron-beam evaporation and standard lift-off process with pitches ranging from 1.8 to $3.2{\mu}m$ and diameter of half of pitch, and was deposited 5-nm thick layer of titanium (Ti) as an adhesion layer and 50-nm thick layer of gold (Au) on the semiinsulating GaAs substrate. We employed both the commercial software (CST Microwave Studio: Computer Simulation Technology GmbH, Darmstadt, Germany) based on a finite integration technique (FIT) and a rigorous coupled wave analysis (RCWA) to calculate transmittance and reflectance. The transmittance was measured at a normal incident, and the reflectance was measured at variable incident angle of range between $30^{\circ}{\sim}80^{\circ}$ with a Nicolet Fourier transmission infrared (FTIR) spectrometer with a KBr beam splitter and a MCT detector. For MHAs of pitch (P), the peaks ${\lambda}$ max in the normal incidence transmittance spectra can be indentified approximately from SP dispersion relation, that is frequency-dependent SP wave vector (ksp). Shown in Fig. 1 is the transmission of P=2.2 um sample at normal incidence. We attribute the observation to be a result of FTIR system may be able to collect the transmitted light with higher diffraction order than 0th order. This is confirmed by calculations: for the MHAs, diffraction efficiency in (0, 0) diffracted orders is lower than in the (${\pm}x$, ${\pm}y$) diffracted orders. To further investigate the result, we calculated the angular dependent transmission of P=2.2 um sample (Fig. 2). The incident angle varies from 30o to 70o with a 10o increment. We also found the splitting character on reflectance measurement. The splitting effect is considered a results of SPPs assisted diffraction process by oblique incidence.

• 한국광학회:학술대회논문집
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• 한국광학회 2007년도 하계학술발표회 논문집
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• pp.255-256
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• 2007

We propose a novel method for the beam focusing by a single subwavelength metal slit surrounded by chirped dielectric surface gratings. In the proposed method, the period of each grating is chirped to make a focused beam at the desired position. Design of the grating structures for optimal beam focusing and the analysis of the field distribution are conducted based on the rigorous coupled wave analysis (RCWA). It is shown that the focused beam is formed at 1.5${\mu}m$ from the metal substrate and its full width at half maximum (FWHM) is 411nm.

• Journal of the Optical Society of Korea
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• 제11권3호
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• pp.108-112
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• 2007

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nano-structure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various $0^{th}$ order SE spectrum data ($\psi$ and ${\Delta}$) which can be calculated through rigorous coupled-wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.63-63
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• 2012

편광분석법(ellipsometry)은 대상 물질의 유전율 함수의 실수부와 허수부를 Kramers-Kronig 관계식의 도움 없이 그 물질상수를 정확히 측정할 수 있는 매우 우수한 기술이다. 이 기술의 큰 장점 중 하나는 빛의 편광상태의 변화를 이용한 비파괴적인 방법으로써 실시간 측정이 가능하며, 박막의 두께측정의 오차범위는 0.1 nm 이하로써 매우 정확하다는 것이다. 본 연구자는 이러한 우수한 측정 기술인 편광분석법을 고진공의 분자살박막증착장치(MBE) 와 결합하여 AlSb, AlP의 유전율 함수를 측정하였다. Al 계열을 포함하는 반도체 화합물은 Al의 산소친화력이 강해 대기 중에서 순수한 유전율 함수를 얻기가 불가능하다. 하지만 본 연구실에서 초고진공 상태의 MBE 챔버에서 시료를 성장시키는 동시에 실시간으로 편광분석기를 이용하여 측정하였고, 지금까지 발표된 결과들 중 가장 순수한 상태의 AlSb 유전율 함수를 얻어낼 수 있었다. 또한 순수한 AlP의 유전함수를 측정할 수 있었고, 이는 편광분석기를 이용한 최초의 실험결과로써 이차미분을 이용한 전이점 분석결과 이론적인 전자밴드구조에서 E1, E1+${\Delta}1$, E2에 해당하는 밴드갭들을 확인할 수 있었다. 또한 표면의 원자배열 구조와 실시간으로 일어나는 그들의 역학적인 현상들에 관한 정보를 얻을 수 있는 surface photoabsorption (SPA)를 metalorganic chemical vapor deposition (MOCVD)에 장착하여 실시간 모니터링이 가능하도록 하였다. SPA를 이용하여 GaAs/AlGaAs 양자우물구조의 성장을 원자층 수준으로 실시간 모니터링을 할 수 있었다. 그리고 SPA를 이용하여 MOCVD 안에서 InP에 As가 흡착 및 탈착되는 현상을 분석하여, As의 흡착이 두 단계에 의해 이루어짐을 분석하였다. 그리고 편광분석법의 빠르고 정확한 측정 기술을 규칙적인 구조체에서 전자기파의 회절을 구할 수 있는 Rigorous Coupled-Wave Analysis (RCWA) 계산방법과 결합하여 나노구조의 기하학적인 모양을 정확하고 빠르게 구할 수 있었다. 본 연구를 위해 규칙적인 3차원 Si 구조체 제작하여 편광분석기로 측정하고 $SiO_2$와 표면 거칠기를 고려하여 RCWA로 분석한 결과, 규칙적인 Si 구조와 산화막 층까지 정확하게 분석할 수 있음을 확인하였다. 또한 규칙적인 나노구조분석 연구를 넘어 불규칙적인 나노구조에 대한 분석 가능성을 보이기 위해 InAs 양자점을 증착하여 분석하였고, 이를 통해 편광분석법과 RCWA를 이용하여 불규칙적인 나노구조의 모양과 크기, 분포의 분석이 가능함을 보였다.