3D Nano Object Recognition based on Phase Measurement Technique

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nano-structure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various $0^{th}$ order SE spectrum data ($\psi$ and ${\Delta}$) which can be calculated through rigorous coupled-wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.