• Applied Science and Convergence Technology
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• v.23 no.5
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• pp.284-288
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• 2014

We present tapered nanostructures fabricated on a selective area of gallium phosphide substrates for advanced optoelectronic device applications. A lithography-free fabrication process was accomplished by dry etching of metal nanoparticles. Thermal dewetting of micro-patterned metal thin films provides etch masks for tapered nanostructures. This simple process also allows the formation of plasmonic surfaces with corrugated shapes. Rigorous coupled-wave analysis calculations provide design guidelines for tapered nanostructures on gallium phosphide substrates.

• Korean Journal of Optics and Photonics
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• v.12 no.1
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• pp.17-24
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• 2001

Two-dimensional binary-phase diffraction gratings which can be employed to fabricate two- and three-dimensional periodic structures are designed and analyzed using rigorous coupled-wave analysis. These gratings serve as phase-masks which generate several diffracted waves from a normally incident beam and thus can produce a periodic interference pattern in space via nearfield holography. The properties of the diffracted beams can be controlled by varying the polarization and wavelength of the incident beam, surface-profile, groove depth and duty cycle of the mask. For the two-dimensional structure, optimum results can be obtained when the diffraction efficiency of the zero-order beam is minimized while that of the first-order maximized. On the other hand, when the diffraction efficiency of the zero-order is appreciable or even greater than other orders, we can obtain a variety of three-dimensional interference patterns which may be used to fabricate photonic crystals of tetragonal-body-centered and hexagonal structures in a submicron scale. scale.

• ETRI Journal
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• v.17 no.2
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• pp.1-10
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• 1995

We propose a novel planar optical interconnection scheme for 100 Gb/s optical packet address detection, which consists of waveguide grating couplers and a diffractive microlens integrated on a glass substrate 3-dimensionally. Length and duty cycle of the grating couplers have been determined on the bases of the ray-optic propagation-mode analysis in a slab waveguide and of the rigorous coupled-wave diffraction analysis for out-coupled radiation-modes. The 3-dimensionally integrated planar optics makes it possible to connect each address bit-signals of $TE_ 0-waveguide$ mode to the detector with a power uniformity of 6.4 % and a total coupling efficiency of 72.3 %.

• Journal of the Optical Society of Korea
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• v.6 no.3
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• pp.76-82
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• 2002

For dielectric gratings on a flat metal surface, photonic band gaps created by Brags scattering of surface plasmon polaritons are observed. The observation result that directly images this gap is compared with that predicted by a numerical model based on a plane wave expansion. Consistency between the experimental and numerical results is also confirmed by comparison with the well-known calculation method of diffraction, the rigorous coupled wave analysis method.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.176-177
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• 2013

Surface plasmon polaritons (SPPs) have attracted the attention of scientists and engineers involved in a wide area of research, microscopy, diagnostics and sensing. SPPs are waves that propagate along the surface of a conductor, usually metals. These are essentially light waves that are trapped on the surface because of their interaction with the free electrons of conductor. In this interaction, the free electrons respond collectively by oscillating in resonance with the light wave. The resonant interaction between the surface charge oscillation and the electromagnetic field of the light constitutes the SPPs and gives rise to its unique properties. In this papers, we studied theoretical and experimental extraordinary transmittance (T) and reflectance (R) of 2 dimensional metal hole array (2D-MHA) on GaAs in consideration of the diffraction orders. The 2d-MHAs was fabricated using ultra-violet photolithography, electron-beam evaporation and standard lift-off process with pitches ranging from 1.8 to $3.2{\mu}m$ and diameter of half of pitch, and was deposited 5-nm thick layer of titanium (Ti) as an adhesion layer and 50-nm thick layer of gold (Au) on the semiinsulating GaAs substrate. We employed both the commercial software (CST Microwave Studio: Computer Simulation Technology GmbH, Darmstadt, Germany) based on a finite integration technique (FIT) and a rigorous coupled wave analysis (RCWA) to calculate transmittance and reflectance. The transmittance was measured at a normal incident, and the reflectance was measured at variable incident angle of range between $30^{\circ}{\sim}80^{\circ}$ with a Nicolet Fourier transmission infrared (FTIR) spectrometer with a KBr beam splitter and a MCT detector. For MHAs of pitch (P), the peaks ${\lambda}$ max in the normal incidence transmittance spectra can be indentified approximately from SP dispersion relation, that is frequency-dependent SP wave vector (ksp). Shown in Fig. 1 is the transmission of P=2.2 um sample at normal incidence. We attribute the observation to be a result of FTIR system may be able to collect the transmitted light with higher diffraction order than 0th order. This is confirmed by calculations: for the MHAs, diffraction efficiency in (0, 0) diffracted orders is lower than in the (${\pm}x$, ${\pm}y$) diffracted orders. To further investigate the result, we calculated the angular dependent transmission of P=2.2 um sample (Fig. 2). The incident angle varies from 30o to 70o with a 10o increment. We also found the splitting character on reflectance measurement. The splitting effect is considered a results of SPPs assisted diffraction process by oblique incidence.

• Journal of the Optical Society of Korea
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• v.14 no.2
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• pp.142-145
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• 2010

In this work, a numerical analysis of a CIGS ($CuIn_{1-x}Ga_xSe_2$) solar cell with a rectangular grating on the electrode is presented. The effects of the grating on the energy conversion efficiency are calculated using the RCWA (rigorous coupled wave analysis) method. In conventional CIGS solar cells, the thickness of the light absorption layer (CIGS) is $2\;{\mu}m$, at which the incident light is almost absorbed. By adopting a grating on the electrode and using a less than $1\;{\mu}m$ CIGS layer, we obtained a higher efficiency compared to the conventional solar cells.

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.255-256
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• 2007

We propose a novel method for the beam focusing by a single subwavelength metal slit surrounded by chirped dielectric surface gratings. In the proposed method, the period of each grating is chirped to make a focused beam at the desired position. Design of the grating structures for optimal beam focusing and the analysis of the field distribution are conducted based on the rigorous coupled wave analysis (RCWA). It is shown that the focused beam is formed at 1.5${\mu}m$ from the metal substrate and its full width at half maximum (FWHM) is 411nm.

• Journal of the Optical Society of Korea
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• v.16 no.3
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• pp.196-202
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• 2012

We observe that the transmission and reflection efficiencies of a one-dimensional metallic grating under transverse-magnetic illumination calculated using the Fourier modal method (FMM) with the Fourier factorization rules have peculiar fluctuations, albeit small in magnitude, as the number of field harmonics increases. It is shown that when the number of Fourier terms for the electromagnetic field is increased from that in the conventional FMM, the fluctuations due to non-convergent highly evanescent eigenmodes can be eliminated. Our examination reveals that the fluctuations originate from the Gibbs phenomenon inherent in the Fourier-series representation of a permittivity function with discontinuities, and from non-convergence of highly evanescent internal Bloch eigenmodes.

• Journal of the Optical Society of Korea
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• v.11 no.3
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• pp.108-112
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• 2007

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nano-structure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various $0^{th}$ order SE spectrum data ($\psi$ and ${\Delta}$) which can be calculated through rigorous coupled-wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.

• Korean Journal of Optics and Photonics
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• v.34 no.6
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• pp.241-247
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• 2023

We examine the spectral characteristics of laser-induced periodic surface structures (LIPSSs) formed on an amorphous silicon film irradiated by a 355-nm nanosecond laser. A Gaussian beam with a diameter of 196 ㎛ is used to perform a two-dimensional raster scan. The laser's pulse number is varied from 190 to 280, and its intensity is adjusted within 100-130 mJ/cm². LIPSSs with a periodicity of approximately 330 nm form on the surface of the Si film, aligned perpendicular to the laser's polarization. Transmission spectra of the samples show dips around 700 nm for transverse electric polarization and around 500 nm for transverse magnetic polarization. The features are investigated with a one-dimensional-grating model using a rigorous coupled-wave analysis. Simulations confirm that the observed dips are due to the resonant modes, depending on the polarization.