• Title/Summary/Keyword: Resistive Pressure Sensor

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Sensitivity Enhancement for Thermophysical Properties Measurements via the Vacuum Operation of Heater-integrated Fluidic Resonators (가열 전극 통합 채널 공진기의 진공 환경 구동에 의한 열물성 측정의 민감도 향상)

  • Juhee Ko;Jungchul Lee
    • Journal of Sensor Science and Technology
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    • v.32 no.1
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    • pp.39-43
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    • 2023
  • Microscale thermophysical property measurements of liquids have been developed considering the increasing interest in the thermal management of cooling systems and energy storage/transportation systems. To accurately predict the heat transfer performance, information on the thermal conductivity, heat capacity, and density is required. However, a simultaneous analysis of the thermophysical properties of small-volume liquids has rarely been considered. Recently, we proposed a new methodology to simultaneously analyze the aforementioned three intrinsic properties using heater-integrated fluidic resonators (HFRs) in an atmospheric pressure environment comprising a microchannel, resistive heater/thermometer, and mechanical resonator. Typically, the thermal conductivity and volumetric heat capacity are measured based on a temperature response resulting from heating using a resistive thermometer, and the specific heat capacity can be obtained from the volumetric heat capacity by using a resonance densitometer. In this study, we analyze methods to improve the thermophysical property measurement performance using HFRs, focusing on the effect of the ambience around the sensor. The analytical method is validated using a numerical analysis, whose results agree well with preliminary experimental results. In a vacuum environment, the thermal conductivity measurement performance is enhanced, except for the thermal conductivity range of most gases, and the sensitivity of the specific heat capacity measurement is enhanced owing to an increase in the time constant.

Structural and temperature coefficient of resistance characteristics of colossal magnetoresistance Mn oxides prepared by RF sputtering

  • Choi, Sun-Gyu;Ha, Tae-Jung;Reddy, A.Sivasankar;Yu, Byoung-Gon;Park, Hyung-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.361-361
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    • 2007
  • A lot of efforts have been paid to develop infrared imaging systems in last decades. Bolometer has a wide range of applications from military to commercial, such as military night vision, medical imaging system and so on. Bolometer is a resistive sensor that detects temperature changes through resistance change. To improve detecting ability, bolometer should have a good resistive film which has high temperature coefficient of resistance (TCR) value. Colossal magnetoresistance (CMR) $L_{1-x}A_xMnO_3$ (where L and A are trivalent rare-earth ions and divalent alkaline earth ions, respectively.) are received attention to apply bolometer resistive film because it has a high TCR property which was discovered in the metal to semiconductor phase transition temperature region. In this work, CMR films were deposited on various substrates in relative low substrate temperature by RF magnetron sputtering. The influence of deposition parameters such as substrate temperature, gas partial pressure, and so on have been studied. The structural and TCR properties of the films were also investigated for applying to microbolometer.

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Radial Pulse Wave Detection system for the Korean Medicine (한방용(韓方用) 맥파 검출시스템)

  • Lee, H.J.;Kim, J.W.;Kim, H.O.;Park, Y.B.;Huh, W.
    • Proceedings of the KOSOMBE Conference
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    • v.1991 no.11
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    • pp.66-69
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    • 1991
  • This paper describes a design of transducer for non-invasively detecting pressure radial pulse wave in aterial system and a recording system that for the studing the aterial pulse diagnosis of korean traditional medicine. The mechanism of transducer is composed of sensing mechanism, pressure sensor, conditioning amplifier. The variation of radial pulse pressure in the sensing mechanism is converted to the electric signal by piezo-resistive pressure sensor and it converted to the digital signal after preprocessing via A/D converter. The converted signals inputed to the computer as data files and then it display to the monitor for waveform watching and this datas can be used as the aterial pulse diagnosis data. This system effectively detect non-differential radial pulse wave and we conside that if analizing the recorded radial pulse wave, compared each other, it can be helpful in quantify radial pulse wave diagonosis of the Korean traditional medicine.

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The Developement of a Wind Direction/Speed Measurement Equipment Using RTD or Piezo Sensors (RTD 및 피에조 센서를 활용하는 풍향/풍속 측정장치 개발)

  • Joo, Jae-Hun;Kim, Dong-Hyun;Gong, Byung-Gunn;Lee, Jin-Ho;Choi, Jung-Keyng
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.05a
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    • pp.827-830
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    • 2011
  • In this paper, a wind speed & direction module and the DSP(Digital Signal Processor) sensor interface circuit board are proposed. This DSP system accepts and process the informations from a wind speed & direction module, the atmospheric pressure sensor, the ambient air temperature sensor and transfers it to the PC monitering system. Especially, a wind speed & direction module and a DSP hardware are directly designed and applied. A wind speed & direction module have a construction that it have four film type RTD(Resistive Temperature Detectors) or film type Piezo sensors adhered around the circular metal body for obtaining vector informations about wind. By this structure, the module is enabled precise measurement having a robustness about vibration, humidity, corrosion. A sensor signal processing circuit is using TMS320F2812 TI(Texas Instrument) Corporation high speed DSP.

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A Literature Review of Tongue Movement and Measurement Tools for Dysphagia (연하장애 환자의 혀 운동 및 측정 도구에 대한 고찰)

  • Kim, Jin-Yeong;Son, Yeong-Soo;Hong, Deok-Gi
    • Therapeutic Science for Rehabilitation
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    • v.11 no.4
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    • pp.55-68
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    • 2022
  • Objective : This review aimed to provide information for clinical application by confirming the principles and characteristics of the tool through a review of tongue movement and measurement tools for patients with swallowing disorders. Results : We identified 15 tools used as tongue exercises and measurement tools in the field of dysphagia. According to principle, the tools were classified as either a bulb sensor, resistive sensor sheet, mouthpiece with sensor, or other techniques. The bulb sensor was easy to use but had limitations in fixing the position when measuring tongue pressure. The resistive sensor sheet could be measured at a more stable position than the bulb sensor. A mouthpiece with a sensor could be used in an individual's oral cavity such that the position was fixed when measuring the tongue pressure. Other techniques had the advantage of being wireless and capable of sensing light. Conclusion : Based on this literature review, it is necessary to facilitate the selection of the best tool for quantitative tongue measurement in dysphagia. The review can also be used to develop a Korean tongue movement tool model that can be used in hospitals and community centers.

Micro flow sensor using polycrystalline silicon carbide (다결정 실리콘 카바이드를 이용한 마이크로 유량센서)

  • Lee, Ji-Gong;Lei, Man I;Lee, Sung-Pil;Rajgopal, Srihari;Mehregany, Mehran
    • Journal of Sensor Science and Technology
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    • v.18 no.2
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    • pp.147-153
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    • 2009
  • A thermal flow sensor has been fabricated and characterized, consisting of a center resistive heater surrounded by two upstream and one downstream temperature sensing resistors. The heater and temperature sensing resistors are fabricated from nitrogen-doped(n-type) polycrystalline silicon carbide(poly-SiC) deposited by LPCVD(low pressure chemical vapor deposition) on LPCVD silicon nitride films on a Si substrate. Cavities were etched into the Si substrate from the front side to create suspended silicon nitride membranes carrying the poly-SiC elements. One upstream sensor is located $50{\mu}m$ from the heater and has a sensitivity of $0.73{\Omega}$/sccm with ${\sim}15\;ms$ rise time in a dynamic range of 1000 sccm. N-type poly-SiC has a linear negative temperature coefficient and a TCR(temperature coefficient of resistance) of $-1.24{\times}10^{-3}/^{\circ}C$ from room temperature to $100^{\circ}C$.

A Development of an Insole Type Local Shear Measurement Transducer and Measurements of Local Plantar Shear Force During Gait (인솔형 국부 전단센서의 개발 및 보행 시 발바닥의 국부 전단력 측정)

  • Jeong Im Sook;Ahn Seung Chan;Yi Jin Bok;Kim Han Sung;Kim Young Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.6 s.171
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    • pp.213-221
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    • 2005
  • An insole type local shear force measurement system was developed and local shear stresses in the foot were measured during level walking. The shear force transducer based on the magneto-resistive principle, was a rigid 3-layer circular disc. Sensor calibrations with a specially designed calibration device showed that it provided relatively linear sensor outputs. Shear transducers were mounted on the locations of four metatarsal heads and heel in the insole. Sensor outputs were amplified, decorded in the bluetooth transmission part and then transferred to PC. In order to evaluate the developed system, both shear and plantar pressure measurements, synchronized with the three-dimensional motion analysis system, were performed on twelve young healthy male subjects, walking at their comfortable speeds. The maximum peak pressure during gait was 5.00kPa/B.W at the heel. The time when large local shear stresses were acted correlated well with the time of fast COP movements. The anteroposterior shear was dominant near the COP trajectory, but the mediolateral shear was noted away from the COP trajectory. The vector sum of shear stresses revealed a strong correlation with COP movement velocity. The present study will be helpful to select the material and to design of foot orthoses and orthopedic shoes for diabetic neuropathy or Hansen disease.

Humidity-Sensing Properties of RF Sputtered Vanadium Oxide Thin Films (RF 스퍼터된 바나듐 산화막의 습도 감지 특성)

  • Choi, Bok-Gil;Choi, Chang-Kyu;Kim, Sung-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.10
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    • pp.475-480
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    • 2006
  • Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

The Effects of Contact Hand-Orientation Response(CHOR) During Sit-to-stand(STS) in People with Stroke (접촉성 손-위치 반응(Contactual Hand-Orientating Response)이 만성 뇌졸중환자의 일어서기 동작에 미치는 영향)

  • Seo, Tae-Hwa;Yang, Si-Eun;Lee, Hong-Gyun
    • The Journal of Korean Society for Neurotherapy
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    • v.22 no.3
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    • pp.31-36
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    • 2018
  • Purpose The purpose of this study was to investigate the effects of contact handorientation response(CHOR) during sit-to-stand(STS) in people with stroke. Methods The subjects of the study were Thirty hemiplegia participated (Rt. hemiplegia/Lt. hemiplegia: 15/15, mean age: $65.82{\pm}8.53$) in this study. The analysis of muscles activation (rectus femoris, biceps femoris, tibialis anterior, gastrocnemius) distribution was conducted by the EMG, and the analysis of foot pressure distribution was conducted by the resistive pressure sensor. Hemiplegic stroke patients were instructed to perform STS three times with the non-affected side hand and affected side hand on the table. Results There was a significant positive correlation between rectus femoris, tibialis anterior muscle activation and affected side hand contact during STS(p<0.05). The STS correlated with the foot pressure in the affected side hand contact(p<0.05). Conclusion AS a result, CHOR during STS is related to muscle activation and the characteristics of foot pressure. This information was observed in the affected side hand contact on the table, suggestion that rehabilitation programs should be implemented.

Fabrication of High-resistive ZnO Films Using Zinc acetate as Precursor and Their Humidity-sensing Properties (Zinc acetate를 precursor로 한 고저항 ZnO막의 제조 및 습도감지 특성)

  • Ma, T.Y.;Kim, S.H.;Kim, Y.I.
    • Journal of Sensor Science and Technology
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    • v.5 no.1
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    • pp.37-42
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    • 1996
  • ZnO films have been deposited on oxide grown Si wafers by the conventional thermal evaporation method. Anhydrous zinc acetate was directly heated and sublimed in the laboratory-made brass boat. The substrates temperature varied from $200^{\circ}C$ to $600^{\circ}C$. Oxygen has been flowed into the deposition chamber to change the partial pressure of oxygen. The films deposited at high oxygen pressure exhibited higher resistivity than films at low pressure. X-Ray Diffraction(XRD), Energy Dispersive Spectroscopy(EDS) and Rutherford Backscattering Spectrometry (RBS) were conducted on the films to reveal the crystallinity and composition of the ZnO films. The ZnO films deposited at high oxygen pressure were extremly sensitive to the humidity of higher than 70 % RH.

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