• 제목/요약/키워드: Residual patterns

검색결과 246건 처리시간 0.031초

Stress Analysis in Cooling Process for Thermal Nanoimprint Lithography with Imprinting Temperature and Residual Layer Thickness of Polymer Resist

  • Kim, Nam Woong;Kim, Kug Weon
    • 반도체디스플레이기술학회지
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    • 제16권4호
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    • pp.68-74
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    • 2017
  • Nanoimprint lithography (NIL) is a next generation technology for fabrication of micrometer and nanometer scale patterns. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Up to now there have been a lot of researches on thermal NIL, but most of them have been focused on polymer deformation in the molding process and there are very few studies on the cooling and demolding process. In this paper a cooling process of the polymer resist in thermal NIL is analyzed with finite element method. The modeling of cooling process for mold, polymer resist and substrate is developed. And the cooling process is numerically investigated with the effects of imprinting temperature and residual layer thickness of polymer resist on stress distribution of the polymer resist. The results show that the lower imprinting temperature, the higher the maximum von Mises stress and that the thicker the residual layer, the greater maximum von Mises stress.

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Hybrid Imprint Lithography 공정을 이용한 3D 구조물 제작 (Fabrication of 3-D structures using hybrid imprint lithography)

  • 신상현;김한형;양승국;이종근;오범환;이승걸;이일항;박세근
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2008년도 하계종합학술대회
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    • pp.509-510
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    • 2008
  • Hybrid Imprint Lithography (HIL) is proposed where photolithography and imprinting processes are employed. Fabrication step of multilevel or three dimensional patterns is suggested. The method of controlling residual layer thickness after imprinting is developed. The thickness of residual layer changes lineally with imprinting time and can be controlled. Polymer patterns fabricated by this HIL is demonstrated.

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광탄성 프린지해석을 위한 영상처리기법 개발 (Development of Image Processing Technique for Photoelastic Fringe Analysis)

  • 백태현;이재춘
    • 대한기계학회논문집
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    • 제18권10호
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    • pp.2577-2584
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    • 1994
  • A method of digital image processing thechnique, which can multiply and sharpen isochromatic fringes in photoelasticity on both occasions, is developed. To test the method, photoelastic fringe patterns of a disk compressed by two diametrically opposite cocentrated loads are simulated and these patterns are processed to yield sharpened lines. The method is then aplied to measurement of residual stresses in glass bar. The procedure is proved to be capable of extraction sharpened lines accurately from photoelastic multiplied fringes, and yields good experimental results consistently and precisely.

실내 기류패턴에 따른 급기효율과 배기효율의 분포 (Distributions of Local Supply and Exhaust Effectiveness according to the Room Airflow Patterns)

  • 한화택;최선호;장경진
    • 설비공학논문집
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    • 제13권9호
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    • pp.853-859
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    • 2001
  • A pulsed tracer gas technique is applied to measure distributions of local mean age and residual life time of air in a half-scale experimental chamber. The room airflow patterns are flow-visualized by a Helium bubble generator for three different exhaust locations. A supply slot is located at the top of a right wall, and an exhaust slot is either at bottom-left(Case 1), bottom-right(Case 2), or top-left(Case 3) location. Results show that the distribution of LMA and LMR are different from each other, but both of them are closely related to the airflow pattern in the space. Results on overall room ventilation effectiveness are provided depending upon ventilation airflow rates for three different supply-exhaust configurations.

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Characterization of Residual Lignins from Chemical Pulps of Spruce (Picea abies) and Beech (Fagus sylvatica) by KMnO4 Oxidation

  • Choi, J.-W.;Faix, O.
    • Journal of the Korean Wood Science and Technology
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    • 제31권6호
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    • pp.31-39
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    • 2003
  • The enzymatic isolation of residual lignins obtained from spruce and beech pulps (obtained by sulfite, kraft, ASAM and soda/AQ/MeOH pulping processes) and their characterization was described in previous publications. Here, the residual lignins have been submitted to potassium permanganate oxidation (KMnO4 degradation), and 9 aromatic carboxylic acids (3 of them are dimeric) were identified after methylation with diazomethane by GC/MS. The analytical challenge during qantification by the internal standard methods was the partly high protein content of the samples, which resulted in elevated anisic acid yields in the degradation mixture of sulfite residual lignins. The results are compared with the KMnO4 degradation of the corresponding MWLs and discussed in terms of S/G ratios and degrees of condensation. The latter was calculated as a quotient between the aromatic carboxylic acids derived from condensed and non-condensed lignin structures. Typical degradation patterns for the various processes have been observed. Among other parameter, the relative compositions between iso-hemipinic acid (which is for condensation in pos. 5 of the aromatic ring) and meta-hemipinic acid and 3,4,5-trimethoxyphthalic acid (both are for condensation in pos. 6 of the aromatic ring) was found to be process specific. Kraft and soda/AQ/MeOH residual lignins yielded higher amounts of iso-hemipinic acid. In contrast, the relative yields of meta-hemipinic acid and 3,4,5-trimethoxyphthalic acid (the latter in beech lignins) are higher in sulfite and particularly in ASAM residual lignin. In case of beech residual lignins the amount of acids originated from non-condensed syringyl type lignin units was surprisingly high. The condensation degree of residual lignins was shown to be generally higher than that of MWLs. This was especially true for the G units. ASAM residual lignin exhibited very high S/G ratios and degrees of polymerization. Causality between condensation degree and total yield of degradation products was demonstrated.

A Study on Adapting Patterns to Stable Knit Fabrics in Relation to Drapability

  • Song, Mi-Ryong;Yang, Soo-Yung
    • The International Journal of Costume Culture
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    • 제2권2호
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    • pp.80-96
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    • 1999
  • This research focused on pattern adjustments of the stable knit garment for women. Fourteen different types of the knitted fabrics by 12 gauge, computerized flat bed machines were cut in as one half of the torso front, one half of the torso back, and one side of the sleeves for each of them. Guidelines such as the center front, the center back, the armhole, the bust-line, the waistline, the hip-line the hemline were basted on the torso patterns in the knitted fabrics. Also the grain-line, the elbow-line, and the hemline were basted on the one side of the sleeves in the same as above knitted fabrics. The torso patterns in the knitted fabrics were exhibited on the dress-forms on top of the torso patterns in Muslin, which also have the same guidelines drawn on. The distances between the guidelines on Muslin and those on the knitted fabrics for each set of the sample fabrics were measured every three days for two weeks. The fabric properties of the fourteen knitted fabrics such as fiber contents, stitch density both in the wale and course directions, weight, thickness, stretch & recovery, residual shrinkage, relaxation and drapability were laboratory tested for how these were related to finished appearance of 12 gauge, computerized flat knit garments and also in order to prove the fourteen knitted fabrics fall to a category of such as the stable knit. The results from the investigation revealed that six fabric properties such as stitch density, thickness, stretch recovery, residual shrinkage and relaxation were not so much significant factors as weight and drapability. In conclusion, fabric weight, and drapability of the fabric resulting from fiber contents were the cause of final appearance distortion of garment. When adapting patterns for stabilized, 12 gauge, computerized flat knitted fabrics, the fiber contents of the fabrics should be taken into consideration to reduce the production cost and produce better-fit garments.

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하악 견치 잔존시 의치 설계에 따른 치아 지지조직 및 잔존치조제의 광탄성 응력분석 (A PHOTOELASTIC STRESS ANALYSIS ON TOOTH SUPPORTING STRUCTURE AND RESIDUAL RIDGE ACCORDING TO DENTURE DESIGN FOR REMAINING MANDIBULAR CANINES)

  • 김일평;고준원;진태호
    • 대한치과보철학회지
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    • 제35권3호
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    • pp.486-503
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    • 1997
  • The purpose of this study was to evaluate the stress patterns developed in abutment and residual ridge according to removable denture design in case of remaining mandibular canines. The removable denture designs in this study were as foolows : 1. Removable partial denture with non-splinted abutment 2. Removable partial denture with splinted abutment 3. Overdenture with telescopic crown 4. Overdenture with O-Ring attachment 5. Overdenture with combination bar attachment Photoelastic stress analysis was used to record the isochromatic fringe patterns and to calculate principal stress components at measuring points. The results were as follows : 1. In case of removable partial denture with non-splinted abutment, stress of root area at the loaded side was the largest. No significant differences in stress of root area were observed between loaded side and unloaded side. 2. No significant differences in stress of residual ridge at the loaded side were observed between removable partial denture with splinted abutment and removable partial denture with non-splinted abutment. 3. In case of combination bar attachment retained overdenture, stress of root area was the largest and in case of telescopic crown retained overdenture, stress of root area was the lowest. 4. In case of attachment retained overdenture, stress of residual ridge was lower but stress of root area was larger than in case of removable partial denture.

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Fringe-Field Switching (FFS) 모드에서 잔상 정량화에 관한 연구 (Study on the Quantitativity of Image Sticking in the Fringe-field Switching(FFS) Mode)

  • 신승민;김미숙;정연학;김향율;김서윤
    • 한국전기전자재료학회논문지
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    • 제18권8호
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    • pp.720-723
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    • 2005
  • We studied the quantitativity of the image sticking which is occured by the resicual DC in the fringe-electric field switching (FFS) mode. Actually, in the FFS mode driven by the strong fringe electric field, the asymmetric residual DC was formed in the bottom substrate. It made the impurity ion stick to the alignment layer such as polyimde layer. Thus, the differnece of the luminance existes after the stress check pattern is applied to the panel so that we can see the image sticking. This image sticking decreases as the residual DC value between specific patterns decreases. Therefore, it is necessary to control the residual DC for the FFS mode with the high image quality. It is possible to eliminate the image stiking when the extra pixel voltage is applied through the circuit tunning for reducing the difference of residual DC accroding to the panel position.

질문지법과 초음파 방광용적진단기를 이용한 여성노인의 배뇨장애연구 -빈뇨, 잔뇨를 중심으로 (Study on Bladder Dysfunction in Elderly Women by the BFLUT Questionnaire and Bladder Scanner: Frequency and Residual Urine)

  • 김증임
    • 여성건강간호학회지
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    • 제17권3호
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    • pp.294-303
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    • 2011
  • Purpose: This study aimed to describe bladder dysfunction in elderly women such as frequency, nocturia, and residual urine. Methods: One hundred elderly women aged 60 and over. The Bristol Female Lower Urinary Symptoms (BFLUT) was used to evaluate the bladder function and to measure the residual urine amount by using a bladder scanner. Data was analyzed with the differences between voiding dysfunction by age group and life habits by t-test, ANOVA and correlation by Pearson correlation coefficient. Results: the mean daytime frequency was 6.8 times and night-time frequency 2.7 times. Sixty three percent of subjects had urgency and 41% had urgent incontinence. Over half of subjects had problem in voiding function. There were significant differences in frequency by age groups and constipation, but not in daytime frequency and residual urine. Lastly, there were significant positive relations between daytime frequency and night-time frequency. Also results indicate that more frequency in daytime equaled to a less residual urine amount. Conclusion: We know many elderly women have lower urinary tract symptoms. Specially women over 75 years have more daytime frequency and night-time frequency. This suggests further research needed in order to understand the relation of voiding patterns and life habits and its influence on quality of life.

소결법에 의한 $ZrO_2/Metal$계 경사기능재료에 관한 연구(III) (A Study on Zirconia/Metal Functionally Gradient Materials by Sintering Method (III))

  • 정연길;최성철;박철원
    • 한국세라믹학회지
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    • 제32권12호
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    • pp.1337-1348
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    • 1995
  • TZP/SUS- and ZT/SUS-functionally gradient materials (FGM) were fabricated by pressureless sintering in Ar-atmosphere. The sintering defects such as warping, frustrum formation, splitting and cracking which originated from shrinkage and sintering behaviors of metal and ceramics different from each other could be controlled by the adjustment with respect to the particle size and phase type of zirconia. The residual stresses generated on the metal and ceramic regions in FGM were characterized with X-ray diffraction method, and relaxed as the thickness and number of compositional gradient layer were increased. The residual stress states in TZP/SUS-FGM have irregular patterns by means of the different sintering behavior and cracking at ceramic-monolith. While in ZT/SUS-FGM, compressive stress is induced on ceramic-monolith by the volume expansion of monoclinic ZrO2 at phase transformation. Also, compressive stress is induced on metal-monolith by the constraint of warping which may be created to the metal direction by the difference of coefficient of thermal expansions. As a consequence, it has been verified that the residual stress generated on FGM is dominantly influenced by the thickness and number of compositional gradient layer, and the sintering defects and residual stress can be controlled by the constraint of the difference of shrinkage and sintering behaviors of each component.

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