• Title/Summary/Keyword: Residual Step Height

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A Global Planarization of Interlayer Dielectric Using Chemical Mechanical Polishing for ULSI Chip Fabrication (화학기계적폴리싱(CMP)에 의한 층간절연막의 광역평탄화에 관한 연구)

  • Jeong, Hea-do
    • Journal of the Korean Society for Precision Engineering
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    • v.13 no.11
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    • pp.46-56
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    • 1996
  • Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

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RESONANCE FREQUENCY ANALYSIS IN NON-SUBMERGED, INTERNAL TYPE IMPLANT WITH SINUS AUGMENTATION USING DEPROTEINIZED BOVINE BONE MINERAL (이종골을 이용한 상악동 측벽거상술과 동시 식립한 임프란트에서 안정성에 대한 공진 주파수 분석)

  • Lee, Ju-Hyon;Min, Hyun-Gi;Lee, Jin-Sook;Kim, Myung-Rae;Kang, Na-Ra
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.30 no.6
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    • pp.554-560
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    • 2008
  • In posterior maxilla, it is difficult to achieve primary stability of implants due to sinus pneumatization, alveolar bone loss, and low bone quality. The accurate and objective primary stability assessment is important for good prognosis of implants. Purpose: The aim of this study was to assess the primary stability of the non-submerged, internal type implants with maxillary sinus augmentation using deproteinized bovine bone mineral by a resonance frequency analyzer, when residual alveolar bone height is under 8mm Materials and methods: A total of 20 implants was placed into 5 grafted maxillary sinuses in 5 patients. Deproteinized bovine bone mineral (Bio-$Oss^{(R)}$) was used as graft material. SS II implants (diameter 4.1mm, and length 11.5mm, SLA suface)) were placed. All of the patients received maxillary sinus graft procedure by 1-step technique. Residual bone height was $1.3{\sim}7.8mm$ (mean 4.4mm) measured by panorama radiography. After implant placement, RFA was measured at 4,8,12,20 weeks. The results were divided into 2 groups; RFA value under 4mm and over 5mm of bone height. It was statistically analyzed. Results: 1. The primary stability of implants was increased with time 2. The RFA value was above 65 ISQ at 12 weeks 3. There was no correlation between RFA and residual alveolar bone height in maxillary sinus augmentation by 1-step technique. Conclusion: 1-step surgical procedure is a feasible option for patients with as little as 4mm residual alveolar bone height, when utilizing non-submerged, internal type implants with xenografts.

Finite Element Analysis of Residual Stress after Quenching and Element Removal of A1 Ring Rolls (알루미늄 링롤재의 급냉 및 요소제거 후 잔류응력의 유한요소해석)

  • 박성한;구송회;이방업;조원만;은일상
    • Journal of the Korean Society of Propulsion Engineers
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    • v.2 no.1
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    • pp.31-40
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    • 1998
  • To predict residual stresses of aluminum ring rolls after quenching and element removal, 2-D and 3-D thermal elasto-plastic analyses were performed. Strains measured by three step sectioning method were directly compared to those analysed using ABAQUS's element removal. Numerical residual stresses after quenching had similar tendency to measured ones after 2 step aging, but the difference between numerical and measured ones was large. The difference is the reason why there are nonuniform residual stress distributions to ring height direction due to small height of ring, It is judged that the increase of ring height will improve the accuracy of measured ones and decrease the difference. By direct comparison between 3-D numerical strains to simulate three step sectioning method and measured ones, the accuracy of measurement and analysis can be improved. It is concluded that there can be predicted the deformation behavior on machining complex shaped large structures with residual stresses.

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Distribution and evolution of residual voids in longwall old goaf

  • Wang, Changxiang;Jiang, Ning;Shen, Baotang;Sun, Xizhen;Zhang, Buchu;Lu, Yao;Li, Yangyang
    • Geomechanics and Engineering
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    • v.19 no.2
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    • pp.105-114
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    • 2019
  • In this paper, simulation tests were conducted with similar materials to study the distribution of residual voids in longwall goaf. Short-time step loading was used to simulate the obvious deformation period in the later stage of arch breeding. Long-time constant loading was used to simulate the rheological stage of the arch forming. The results show that the irregular caving zone is the key area of old goaf for the subsidence control. The evolution process of the stress arch and fracture arch in stope can be divided into two stages: arch breeding stage and arch forming stage. In the arch breeding stage, broken rocks are initially caved and accumulated in the goaf, followed by the step deformation. Arch forming stage is the rheological deformation period of broken rocks. In addition, under the certain loads, the broken rock mass undergoes single sliding deformation and composite crushing deformation. The void of broken rock mass decreases gradually in short-time step loading stage. Under the water lubrication, a secondary sliding deformation occurs, leading to the acceleration of the broken rock mass deformation. Based on above research, the concept of equivalent height of residual voids was proposed, and whose calculation equations were developed. Finally, the conceptual model was verified by the field measurement data.

An experimental and numerical analysis of concrete walls exposed to fire

  • Baghdadi, Mohamed;Dimia, Mohamed S.;Guenfoud, Mohamed;Bouchair, Abdelhamid
    • Structural Engineering and Mechanics
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    • v.77 no.6
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    • pp.819-830
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    • 2021
  • To evaluate the performance of concrete load bearing walls in a structure under horizontal loads after being exposed to real fire, two steps were followed. In the first step, an experimental study was performed on the thermo-mechanical properties of concrete after heating to temperatures of 200-1000℃ with the purpose of determining the residual mechanical properties after cooling. The temperature was increased in line with natural fire curve in an electric furnace. The peak temperature was maintained for a period of 1.5 hour and then allowed to cool gradually in air at room temperature. All specimens were made from calcareous aggregate to be used for determining the residual properties: compressive strength, static and dynamic elasticity modulus by means of UPV test, including the mass loss. The concrete residual compressive strength and elastic modulus values were compared with those calculated from Eurocode and other analytical models from other studies, and were found to be satisfactory. In the second step, experimental analysis results were then implemented into structural numerical analysis to predict the post-fire load-bearing capacity response of the walls under vertical and horizontal loads. The parameters considered in this analysis were the effective height, the thickness of the wall, various support conditions and the residual strength of concrete. The results indicate that fire damage does not significantly affect the lateral capacity and stiffness of reinforced walls for temperature fires up to 400℃.

A Study on Machining of Uncut Volume at the Boundary Region of Curved Surfaces (곡면 경계부 미절삭 체적의 잔삭 가공에 관한 연구)

  • Maeng, Hee-Young;Yim, Choong-Hyuk
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.2
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    • pp.251-259
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    • 2010
  • It is presented in this study a new efficient intelligent machining strategy, which can be used to remove the uncut volume at the boundary region of curved surfaces caused by cutter interference. The geometric form definitions and recognition of topological features of the surface triangulation mesh are used to generate cutter paths along successive and interconnected steepest pathways, that minimize the cusp height left after flat end milling. In order to machine the uncut volume gradually, the z-map cutter centers are adjusted to avoid cutter interference for the 6 kinds of avoidance types. And then, the generative subsequent paths are sequenced to determine the second step cutter paths for the next uncut volume. For the 2 kinds of test models with convex and concave surface region, the implemented software algorithm is evaluated by investigating the residual swelling of uncut volume for each machining step.

Mechanical Characteristics of Cementing Plane in Concrete Repair under Various Cementing Conditions (접합조건에 따른 콘크리트 접합부의 역학적 특성)

  • 김재동;정요훈
    • Tunnel and Underground Space
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    • v.13 no.5
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    • pp.362-372
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    • 2003
  • Since the occurrence of Portland cement, a great number of concrete structures were constructed. But the concrete structures have their own life times, which inevitably demand repairing treatments, especially on their surface parts. Currently many various methods have been developed and are being applied fer this purpose. In this study, a newly developed method using pneumatic chipping machine and anchor pin was adopted far repair of old concrete structure and the mechanical characteristics of cementing plane between existing and new concrete were tested. Comparing the removal methods for the decrepit part of existing concrete using pneumatic chipping machine and hydraulic breaker, the peak cohesion was higher when using chipping machine at the cementing plane. On the other hand, the residual cohesion was higher for the case of breaker. Step shaped chipping on the cementing plane was effective in increasing peak cohesion, which results 14% increase in the case of 30 mm step height and 22% in 50 mm height when compared with planar chipping plane. The use of anchor pin increased the residual cohesion, which restricted shear slip on the cementing plane after peak shear stress and the tensile strength of 32% compared with that of non-anchored case. According to the combined effect of step shaped chipping of 30 mm and anchor pin with an interval of 15 cm, the peak cohesion reached up to 77% and the residual cohesion showed 180% of the ones of the fresh concrete, respectively.

Finite Element Analysis for the Body-making Process of Steel D&I Can (Steel D&I Can 몸체성형을 위한 FEM 해석)

  • Jung, S.W.;Jung, C.K.;Nam, J.B.;Jin, Y.S.;Han, K.S.
    • Proceedings of the KSME Conference
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    • 2001.11a
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    • pp.459-464
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    • 2001
  • The main object of this study is to develop a reliable FEM simulation technique for the analysis of Steel D&I Can bodymaking process using ABAQUS software. The body making process includes drawing, redrawing, 3 step ironing, doming. The newly developed FEM code in this research is based on the previous research achievement of POSCO for the drawing, redrawing and ironing process. The analysis is performed using two dimensional axisymmetric elements to analyze the punch force, the height of can, the distribution of residual stress and strain. The effect of blank thickness, gap of ironing die is also analyzed.

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Detection of Site Environment and Estimation of Stand Yield in Mixed Forests Using National Forest Inventory (국가산림자원조사를 이용한 혼효림의 입지환경 탐색 및 임분수확량 추정)

  • Seongyeop Jeong;Jongsu Yim;Sunjung Lee;Jungeun Song;Hyokeun Park;JungBin Lee;Kyujin Yeom;Yeongmo Son
    • Journal of Korean Society of Forest Science
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    • v.112 no.1
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    • pp.83-92
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    • 2023
  • This study was established to investigate the site environment of mixed forests in Korea and to estimate the growth and yield of stands using national forest resources inventory data. The growth of mixed forests was derived by applying the Chapman-Richards model with diameter at breast height (DBH), height, and cross-sectional area at breast height (BA), and the yield of mixed forests was derived by applying stepwise regression analysis with factors such as cross-sectional area at breast height, site index (SI), age, and standing tree density per ha. Mixed forests were found to be growing in various locations. By climate zone, more than half of them were distributed in the temperate central region. By altitude, about 62% were distributed at 101-400 m. The fitness indexes (FI) for the growth model of mixed forests, which is the independent variable of stand age, were 0.32 for the DBH estimation, 0.22 for the height estimation, and 0.18 for the basal area at breast height estimation, which were somewhat low. However, considering the graph and residual between the estimated and measured values of the estimation equation, the use of this estimation model is not expected to cause any particular problems. The yield prediction model of mixed forests was derived as follows: Stand volume =-162.6859+6.3434 ∙ BA+9.9214 ∙ SI+0.7271 ∙ Age, which is a step- by-step input of basal area at breast height (BA), site index (SI), and age among several growth factors, and the determination coefficient (R2) of the equation was about 96%. Using our optimal growth and yield prediction model, a makeshift stand yield table was created. This table of mixed forests was also used to derive the rotation of the highest production in volume.