Evaluation of the Residual Stress with Respect to Supporting Type of Multi-layer Thin Film for the Metallization of Pressure Sensor (압력센서의 배선을 위한 다층 박막의 지지조건 변화에 따른 잔류응력 평가)
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- Transactions of the Korean Society of Mechanical Engineers A
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- v.28 no.5
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- pp.532-538
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- 2004