• Journal of the Semiconductor & Display Technology
• /
• v.19 no.2
• /
• pp.45-50
• /
• 2020

We investigated the Si_1-xGe_x surface properties when dry cleaning the films using NF₃ / H₂O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H₂O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H₂O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

• Korean Journal of Remote Sensing
• /
• v.10 no.2
• /
• pp.121-132
• /
• 1994

A GIS based tactical terrain analysis system named ATTAS(Army Tactical Terrain Analysis Software) has been designed and implemented to support the field commanders for enhancing the capabiliy of their unit and efficiency of weapon system. This system is designed to provide computer graphics environment in which the analyst can interactively operate the entire analyzing process such as selecting the area of interest, performing analysis functions, simulating required battlefield operation and display the results. This system can be divided into three major sections; the terrain analysis modules, utilites, and graphic editor. The terrain analysis module inclused surface analysis, line of sight analysis, enemy disposition, 3D display, radar coverage, logistic route analysis, shortest path analysis, atmospheric phenomena prediction, automated IPB (Inteligence preparation of Battlefield), and other applied analysis. A combination of 2D and 3D computer graphics techniques using the X-window system with OSF/Motif in UNIX workstation was adopted as the user interface. The integration technique of remotely sensed images and GIS data such as precision registration, overlay, and on-line editing was developed and implemented. An efficient image and GIS data management technique was also developed and implemented using Oracle Database Management System.

• Journal of the Semiconductor & Display Technology
• /
• v.22 no.4
• /
• pp.26-31
• /
• 2023

We investigated the impact of NF₃ / H₂O remote plasma dry cleaning conditions on the SiO₂ etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF₃ flow rate, and H₂O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO₂ layer was situated between Si₃N₄ and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

• Journal of the Semiconductor & Display Technology
• /
• v.23 no.2
• /
• pp.129-134
• /
• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• Journal of Advanced Navigation Technology
• /
• v.20 no.1
• /
• pp.99-106
• /
• 2016

Wearable display market is a consistently growing field to handle a smart device with ease. Wearable display is an efficient device that can show the information to the user. In this paper, propose the scheme of a wearable display using LED and implement it including controlling remotely with BLE. Traditional outdoor LED display requires the dedicated controller and its software. Therefore, to control those LED display, it should implement a driver and its own way of communication. The proposed method is to ensure the independence and extensibility by separating driver module and communication module for controlling LED display. In addition, by adopting a short-range communication with Bluetooth 4.0 and a LED driver with low-power technology, it can be showed to control system configuration and display with a smart device.

• Proceedings of the KOSOMBE Conference
• /
• v.1996 no.11
• /
• pp.114-117
• /
• 1996

In this study, remote articulation training system which connects the hearing disabled trainee and the speech therapist via B-ISDN is introduced. The hearing disabled does not have the hearing feedback of his own pronunciation, and the chance of watching his speech organs' movement trajectory will offer him the self-training of articulation. So the system has two purposes of self articulation training and trainer's on-line checking in remote place. We estimate the vocal tract articulatory movements from the speech signal using inverse modelling and display the movement trajectory on the sideview of human face graphically. The trajectories of trainees' articulation is displayed along with the reference trajectories, so the trainee can control his articulating to make the two trajectories overlapped. For on-line communication and ckecking training record, the system has the function of video conferencing and transferring articulatory data.

• Journal of KIISE:Computer Systems and Theory
• /
• v.36 no.5
• /
• pp.327-334
• /
• 2009

The tiled-display system provides a high resolution display which can be used in different applications in co-working area. The systems used in the co-working field usually save the user logs, and these log information not only makes the maintenance of the tiled-display system easier, but also can be used to check the progress of the co-working. There are three main steps in the proposed tiled display log recorder. The first step is to capture the screen shots of the tiles and send them for merging. The second step is to merge the captured tile images to form a single screen shot of the tiled-display. The final step is to encode the merged tile images to make a compressed video stream. This video stream could be stored for the logs of co-working or be streamed to remote users. Since there could be differences in capturing time of tile images, the quality of merged tiled-display could be degraded. This paper proposes a time stamp-based metric to evaluate the quality of the video stream, and a merging algorithm that could upgrade the quality of the video stream with respect to the proposed quality metrics.

• Journal of the Ergonomics Society of Korea
• /
• v.36 no.4
• /
• pp.267-280
• /
• 2017

Objective: The aim of this study is to investigate key user experience factors of interactions for Head Mounted Display (HMD) devices in the Virtual Reality Environment (VRE). Background: Virtual reality interaction research has been conducted steadily, while interaction methods and virtual reality devices have improved. Recently, all of the virtual reality devices are head mounted display based ones. Also, HMD-based interaction types include Remote Controller, Head Tracking, and Hand Gesture. However, there is few study on usability evaluation of virtual reality. Especially, the usability of HMD-based virtual reality was not investigated. Therefore, it is necessary to study the usability of HMD-based virtual reality. Method: HMD-based VR devices released recently have only three interaction types, 'Remote Controller', 'Head Tracking', and 'Hand Gesture'. We search 113 types of research to check the user experience factors or evaluation scales by interaction type. Finally, the key user experience factors or relevant evaluation scales are summarized considering the frequency used in the studies. Results: There are various key user experience factors by each interaction type. First, Remote controller's key user experience factors are 'Ease of learning', 'Ease of use', 'Satisfaction', 'Effectiveness', and 'Efficiency'. Also, Head tracking's key user experience factors are 'Sickness', 'Immersion', 'Intuitiveness', 'Stress', 'Fatigue', and 'Ease of learning'. Finally, Hand gesture's key user experience factors are 'Ease of learning', 'Ease of use', 'Feedback', 'Consistent', 'Simple', 'Natural', 'Efficiency', 'Responsiveness', 'Usefulness', 'Intuitiveness', and 'Adaptability'. Conclusion: We identified key user experience factors for each interaction type through literature review. However, we did not consider objective measures because each study adopted different performance factors. Application: The results of this study can be used when evaluating HMD-based interactions in virtual reality in terms of usability.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2022.10a
• /
• pp.574-576
• /
• 2022

In this paper, we developed a technique to graphically display impact effects for remote monitoring or simulation systems. A remote monitoring or simulation system is being used to find a repair time or to prevent accidents while inspecting equipment or facilities in an industrial site in real time. These systems provide visual information to users so that they can analyze problem situations. The technique proposed in this paper is a method of modeling equipment and facilities using 3D graphics, and displaying the location of impact and damage occurring in the equipment inside using volume rendering. This technique has the advantage that the problem can be identified more accurately by displaying the impact animation by volume rendering at the location of the impact and damage inside the equipment. And it is expected that the problem situation can be identified more quickly through more intense visual effects.

• Progress in Medical Physics
• /
• v.6 no.2
• /
• pp.93-101
• /
• 1995

In this paper, we implemented a digital medical image management and a remote monitor display system for a personal computer. The designed system can display up to a 1280${\times}$1024 image which can accomodate eight images with a 256${\times}$256${\times}$8bits. When one of these images is clicked by the mouse, the selected image can be displayed with 256${\times}$256${\times}$8bits or 1024${\times}$1024${\times}$8bits. For the selected image, we can use one of the image processing functions in this system and send it to a remote monitor for the close examinations. To search and store digital images effectively, we constructed and image database management system with the B＋TREE structure. This system can be operated in an IBM-PC 386 or higher and all the function are performed easily with a mouse to provide a user firendly environment.