• 제목/요약/키워드: Relative Displacement of Vibration

검색결과 77건 처리시간 0.034초

초정밀 측정/가공 장비의 외부진동에 대한 상대변위의 추출과 진동성능 평가에 관한 연구 (A Study on the Vibrational Reduction Evaluation and the Relative Displacement in the External Vibration of Precision Measuring System)

  • 전종균;엄호성;김강부;원영재
    • 한국소음진동공학회논문집
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    • 제12권1호
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    • pp.65-72
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    • 2002
  • Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

슬림형 광 디스크 드라이브의 축방향 진동에 대한 실험적 해석 (Experimental Analysis of Axial Vibration in Slim-type Optical Disc Drive)

  • 박대경;전규찬;이성진;장동섭
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2002년도 춘계학술대회논문집
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    • pp.694-699
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    • 2002
  • As the demand for slim laptops requires ion'-height optical disc drives, vibration problems of optical disc drives are of great concern. Additionally, with the decrease of a track width and a depth of focus in high density drives, studies on vibration resonance between mechanical parts become more important. From the vibration point of view, the performance of optical disc drives is closely related with the relative displacement between a disc and an objective lens which is controlled by servo mechanism. In other words, to read and write data properly, the relative displacement between an optical disc and an objective lens should be within a certain limit. The relative displacement is dependent on not only an anti-vibration mechanism design but also servo control capability. Good servo controls can make compensation for poor mechanisms, and vice versa. In a usual development process, robustness of the anti-vibration mechanism is always verified with the servo control of an objective lens. Engineers partially modify servo gain margin in case of a data reading error. This modification cannot correct the data reading error occasionally and the mechanism should be redesigned more robustly. Therefore it is necessary to verify a mechanism with respect to the possible servo gain plot. In this study we propose the experimental verification method far anti-vibration mechanism with respect to the existing servo gain plot. This method verifies axial vibration characteristics of optical disc drives on the basis of transmissibility. Using this method, we verified our mechanism and modified the mechanism for better anti-vibration characteristics.

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슬림형 광 디스크 드라이브의 축방향 진동에 대한 실험적 해석 (Experimental Analysis of Axial Vibration in Slim-type Optical Disc Drive)

  • 박대경;전규찬;이성진;장동섭
    • 한국소음진동공학회논문집
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    • 제12권11호
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    • pp.833-839
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    • 2002
  • As the demand for slim laptops requires low-height optical disc drives, vibration problems of optical disc drives are of great concern. Additionally, with the decrease of a track width and a depth of focus in high density drives, studies on vibration resonance between mechanical parts become more important. From the vibration point of view, the performance of optical disc drives is closely related with the relative displacement between a disc and an objective lens which is controlled by servo mechanism. In other words, to read and write data properly, the relative displacement between an optical disc and an objective lens should be within a certain limit. The relative displacement is dependent on not only an anti-vibration mechanism design but also servo control capability. Good servo controls can make compensation for poor mechanisms, and vice versa. In a usual development process, robustness of the anti-vibration mechanism is always verified with the servo control of an objective lens. Engineers partially modify servo gain margin in case of a data reading error. This modification cannot correct the data reading error occasionally and the mechanism should be redesigned more robustly. Therefore it is necessary to verify a mechanism with respect to the possible servo gain plot. In this study we propose the experimental verification method for anti-vibration mechanism with respect to the existing servo gain plot. Thismethod verifies axial vibration characteristics of optical disc drives on the basis of transmissibility. Using this method, we verified our mechanism and modified the mechanism for better anti-vibration characteristics.

충격시험을 이용한 고정밀장비의 진동허용규제치 결정기법에 관한 연구 (A Study on the Determination of Vibration Criteria for Vibration Sensitive Equipments Using Impact Test)

  • 이홍기;박해동;김두훈;김사수
    • 소음진동
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    • 제7권2호
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    • pp.247-254
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    • 1997
  • In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Driver by Impact Test.

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고속철도교 신축부의 진동 및 신축의 효율적인 저감 방안 (Effective Methods Reducing Joint Vibration and Elongation in High speed Rail Bridge)

  • 민경주;강태구;임남형
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2011년도 정기총회 및 추계학술대회 논문집
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    • pp.800-806
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    • 2011
  • Thermal expansion which occurs at the high speed rail joint is proportional to the free length from the point of fixity. This thermal expansion behaves similar to free expansion because the girder longitudinal stiffness is much larger than longitudinal resistance of rail pads. But the longitudinal displacement in the long rail is nominal because the longitudinal support condition of the girder is normally MFM(movable-fix-movable) system. Due to these girder expansion characteristics, there is longitudinal relative displacement at the rail pad and rail fastener spring which connects rail and girder. If the relative displacement between rail and girder is beyond the elastic limit for the rail pad, rail fastener system shall be applied using sliding fastener to prevent rail pad damage and fastener separation resulting from slip. On the other hand, train vertical vibration and tilting can occur due to the lack of fastener vertical force if the sliding fastener is applied at the girder joint. In the high speed rail bridge, vibration can occur due to the spring stiffness of the elastomeric bearing, also both vertical downward and upward displacement can occur. The elastomeric bearing vertical movement can cause rail displacement and finally the stability of the ballast is reduced because the gravel movement is induced.

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레이저와 고속 CCD 카메라를 이용한 대형구조물의 진동계측 (Vibration Measurements of Large-Scale Structure Using Laser and High-Speed CCD Camera)

  • 이창복;안세호;양성훈;염정원;강동욱;김기두
    • 한국통신학회논문지
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    • 제29권8C호
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    • pp.1104-1112
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    • 2004
  • 본 논문에서는 레이저와 고속 CCD 카메라를 이용하여 대형 구조물의 3차원 거동 계측을 위해 진동 주파수 계측 방식을 확립하였다. 구조물에 부착한 대상판에 변동(fluctuation)이 작은 다이오드 레이저를 투사하고, 고속 CCD 카메라로 촬영한 영상에 고정도 상대측정 알고리즘을 적용하여 구조물의 변위를 측정하였다. 초당 120 프레임의 고속 카메라를 이용하고 변위에 FFT를 취해 진동주파수를 구한 경우, 0에서 40Hz까지 $\pm$0.5% 이내의 진동주파수의 정확도를 얻을 수 있다. 이를 이용하면 대형 구조물에 대해 보다 저렴하고 간단하게 고유진동수의 측정이 가능하다. 또한 GPS를 이용한 상대측위 기법과의 비교를 통해 레이저를 이용한 변위측정의 정확도를 입증함으로써, 제안한 진동주파수 측정 방법의 신뢰도와 경제성을 검증하였다.

파력발전용 병진 질량-스프링식 파력 변환장치의 동적설계 (Dynamic Design of a Mass-Spring Type Translational Wave Energy Converter)

  • 최영휴;이창조;홍대선
    • 한국생산제조학회지
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    • 제21권1호
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    • pp.182-189
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    • 2012
  • This study suggests a dynamic design process for deciding properly design parameters of a mass-spring type Wave Energy Converter (WEC) to achieve sufficient energy conversion from wave to power generator. The WEC mechanism, in this research, consists of a rigid sprung body, a platform, suspension springs and dampers. The rigid sprung body is supported on the platform via springs and dampers and vibrates translationally in the heave direction under wave excitation. At last the resulting heave motion of the sprung body is transmitted to rotating motion of the electric generator by rack and pinion, and transmission gears. For the purpose of vibration analysis, the WEC mechanism has been simply modelled as a mass-spring-damper system under harmonic base excitation. Its maximum displacement transmissibility and steady state response can be determined by using elementary vibration theory if the harmonic ocean wave data were provided. With the vibration analysis results, the suggested dynamic design process of WEC can determine all the design parameters of the WEC mechanism, such as sprung body mass, suspension spring constant, and damping coefficient that can give sufficient relative displacement transmissibility and the associated inertia moment to drive the electric generator and transmission gears.

끝단이 탄성 지지된 강체판의 최적진동제어 (Optimal Vibration Control of Rigid Plate Elastically Supported at the Edges)

  • 이성기;윤신일;한상보
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.828-833
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    • 2003
  • Rigid plate elastically supported at the edges is modeled and the performance of the optimal vibration control under sinusoidal excitation is tested. The controller based on the linear quadratic regulator with output feedback is designed to control the multi-degree of freedom vibration. Relative weighting parameters are considered as design constraints to determine the limitation of maximum control force and state parameters. Control force calculated by proportional output feedback of the displacement and velocity is used to suppress the vibration induced by the sinusoidal external force. The active vibration control of vibrating plate by the LQR controller is examined through the numerical simulations that show the effectiveness of optimal control scheme on the three degrees of freedom structure.

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진동응답에 나타난 모드의 기여도 평가에 관한 연구 (A Study on the Contribution of Each Mode in Vibration Response)

  • 정순철;이재응
    • 한국소음진동공학회논문집
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    • 제16권4호
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    • pp.339-345
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    • 2006
  • In this paper, a physically meaningful methodology which can assess the contribution of each vibration mode to various vibration response signals (displacement, velocity, acceleration) is developed. Based on these results, the problem of quantitative assessment of the relative importance of a structural system's vibrational modes is discussed. In addition, a direct method which ran assess the relative importance of each mode from uniformly sampled experimental data is also proposed.

선체운동에 의한 주추진계의 변위가 동력축의 축 어긋남에 미치는 영향 분석 (Analysis for the Effect of the Misalignment of the Power Line from the Displacement Caused by the Ship Motion of the Main Propulsion System)

  • 한형석;이경현;조흥기
    • 한국소음진동공학회논문집
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    • 제22권1호
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    • pp.46-52
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    • 2012
  • Since the engine and reduction gear in a naval vessel are usually supported by the mounting system separately, the misalignment between the input shaft of the reduction gear and the output shaft of the engine should occur caused by ship motion. In this study, this misalignment is estimated from the linear static analysis assuming that the phase of movements of the engine and reduction gear at low frequency range is same and the dynamic effect is not affect to them. Through comparing the relative displacement of the engine and reduction gear calculated from linear static analysis to that from dynamic analysis as well as experiment, the assumption in this study could be verified.