• 한국정밀공학회지
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• 제22권11호
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• pp.64-71
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• 2005

In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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• pp.125-129
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• 2006

The analysis of the depth measurement system with multi-sensors (laser, camera, mirror) has been done and the parameter calibration technique has been proposed. In the proposed depth measurement system, the laser beam is reflected to the object by the rotating mirror and again the position of the laser beam is observed through the same mirror by the camera. The depth of the object pointed by the laser beam is computed depending on the pixel position on the CCD. There involved several number of internal and external parameters such as inter-pixel distance, focal length, position and orientation of the system components in the depth measurement error. In this paper, it is shown through the error sensitivity analysis of the parameters that the most important parameters in the sense of error sources are the angle of the laser beam and the inter pixel distance.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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• pp.41-45
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1423-1426
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• 2005

Map building is the most important thing for the mobile robots navigation. It requires specific vision system such as CCD camera, range finding system, and many other things. Laser range finder has highly collimated beams can be obtained easily, thus achieving lateral resolution. Laser Diode is used for a continuous laser source. The Automatic Current Control Circuit and the Bias-T is used for mix AC signal with DC bias. This signal is used for driving Laser Diode. The main idea of the calculating distance is detecting phase shift between reference signal and detected signal by photo detector. For the signal processing, the Lock-in amplifier system is addressed in this paper. We used a diffused reflected beam to detect phase shift in this system. But this beam is minuteness signal so it can be easily buried in nose. Lock-in amplifier is used to measure the amplitude and phase of signals which are buried in noise.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.573-576
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• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.

• Current Optics and Photonics
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• 제5권3호
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• pp.229-237
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• 2021

The capabilities of the near-field scanning optical microscope (NSOM) for obtaining high resolution lateral topographical images as well as for mapping the spectroscopic and optical properties of a sample below the diffraction limit of light have made it an attractive research field for most researchers dealing with optical characteristics of materials in nano scales. The apertured NSOM technique involves confining light into an aperture of sub-wavelength size and using it to illuminate a sample maintained at a distance equal to a fraction of the sub-wavelength aperture (near-field region). In this article, we present a setup for developing NSOM using a cantilever with a sub-wavelength aperture at the tip. A single laser is used for both cantilever deflection measurement and near-field sample excitation. The laser beam is focused at the apex of the cantilever where a portion of the beam is reflected and the other portion goes through the aperture and causes local near-field optical excitation of the sample, which is then raster scanned in the near-field region. The reflected beam is used for an optical beam deflection technique that yields topographical images by controlling the probe-sample in nano-distance. The fluorescence emissions signal is detected in far-field by the help of a silicon avalanche photodiode. The images obtained using this method show a good correlation between the topographical image and the mapping of the fluorescence emissions.

• 한국정밀공학회지
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• 제14권5호
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• pp.34-41
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• 1997

The dimension measurement problem of products has been a major concern in the quality control in the industrial fields. A non-contacting measurement system using the vision sensor is proposed in this paper. The system consists of a CCD camera for the image capture, a frame grabber for the acquired image processing, a laser unit for the illumination, scanning unit for the measurement, and a personal computer for the geometry computation. The slit beam which is generated by passing the laser beam through a cylin- drical lens is fired to the axial-symmetric object on the rotating plate. The image of objects reflected by the laser slit beam, acquired by the CCD camera, becomes much brighter than the other parts of objects. After the histogram of brightness for the captured image is calculated, low intensity pixels are filtered out by threshold method. The performance of proposed measurement system is obtained for several different axial symmetric objects. The proposed system is verified as a good tool for measuring axial-symmetric parts in a limited condition with a minor investment cost.

• 한국정밀공학회지
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• 제21권6호
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• pp.94-101
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• 2004

From the Beckmann's reflection model of wave incident, reflected light from a surface is known to have not only specular but also diffuse components. The specular component dominant a surface for a mirror-like surface is distributed on the almost the same area as the spot on the surface, but the diffuse component region dominant f3r a rough surface spreads scattered on the larger areas than the spot. Therefore, statistic parameters from the scattered light distribution are more meaningful in the diffuse region, while the magnitude of rather meaning in the specular region. In usual, there need two sensors to acquire two kinds of information: Photo-detector for light intensity magnitude and image sensor for light intensity distribution. But dual sensor scheme requires a beam splitter usually to feed light to each sensor, and moreover there is not a combination rule to relieve the different sensor characteristics. In this study a new method is proposed for acquisition of the dual information using only an image sensor. Specular region is established on an image area being distinguished from a diffuse component, and laser power is adjusted so that no pixel of the image sensor in the specular region is saturated. Simulation based on the light reflection theory and the experimental results are quite well matched, and thus the proposed method was proved to be very useful for mirror-like surface measurement.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1528-1530
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• 1998

In this work, a possible new PD detection technique, based on the Michelson Interferometer, has been proposed. Laser beam transmitted by optical fiber is spliced into two-laser beam by 50/50 coupler, one is reflected on diaphragm, which is vibrated by ultrasonic sound, and then modulated. The other one is reference beam. They are collected into 50/50 coupler making interferenced beam which could be detected by photo detector.

• Journal of the Optical Society of Korea
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• 제20권1호
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• pp.78-87
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• 2016

Red blood cells (RBCs) are customarily adhered to a bio-functionalised substrate to make them stationary in interferometric phase-imaging modalities. This can make them susceptible to receive alterations in innate morphology due to their own weight. Optical tweezers (OTs) often driven by Gaussian profile of a laser beam is an alternative modality to overcome contact-induced perturbation but at the same time a steeply focused laser beam might cause photo-damage. In order to address both the photo-damage and substrate adherence induced perturbations, we were motivated to stabilize the RBC in OTs by utilizing a laser beam of ‘arbitrary intensity profile’ generated by a source having cavity imperfections per se. Thus the immobilized RBC was investigated for phase-imaging with sinusoidal interferograms generated by a compact and robust Michelson interferometer which was designed from a cubic beam splitter having one surface coated with reflective material and another adjacent coplanar surface aligned against a mirror. Reflected interferograms from bilayers membrane of a trapped RBC were recorded and analyzed. Our phase-imaging set-up is limited to work in reflection configuration only because of the availability of an upright microscope. Due to RBC’s membrane being poorly reflective for visible wavelengths, quantitative information in the signal is weak and therefore, the quality of experimental results is limited in comparison to results obtained in transmission mode by various holographic techniques reported elsewhere.