• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Korean Journal of Food Science and Technology
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• v.28 no.2
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• pp.337-344
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• 1996

Gel-type yogurt was prepared from egg white powder (EWP), casein and glucose. The effects of EWP on acid production and growth of Lactobacillus were studied. The effect of EWP on sensory properties and volatile aroma compounds were also studied. Acid production by Lactobacillus in EWP (1-3%, W/V) was significantly lower than that by Lactobacillus in milk (control). However, the increase of EWP content from 1 to 3% increased acid production significantly, Number of viable cells of L. acidophilus at 24 hrs in milk and EWP containing samples (1-3%) was $3.1{\times}10^4/ml\;and\8.3{\times}10^7-3.6{\times}10^2/ml.$ respectively Sample containing lower amount of EWP generally showed lower number of viable cells. Sensory property of EWP samples (1-3%) was showed lower than that of milk yogurt (reference). However, sensory property of samples containing EWP 2% or 3% was significantly better than that of sample containing EWP 1%. Though the composition of volatile aroma compounds was slightly different from sample to sample, gas chromatographic analysis detected acetone, ethanol, diacetyl and acetoin in samples fermented by L. acidophilus.

• Korean Journal of Food Science and Technology
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• v.29 no.3
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• pp.546-554
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• 1997

Gel-type yogurt was prepared from egg white powder (3%, w/v), glucose (2%, w/v) and four kinds of milk products (4%, w/v). The effects of milk product on acid production and growth of Lactobacillus were studied. The effects of milk product on sensory property and volatile aroma compounds were also studied. Acid production by L. acidophilus at 24 hr in samples containing milk product was significantly lower than that by L. acidophilus in milk (p<0.05). The sample containing casein produced less acid than the other samples. Number of viable cells of L. acidophilus at 24 hr in milk and samples containing milk product was $2.0{\times}10^{9}/mL$ and $5.0{\times}10^{8}{\sim}8.0{\times}10^{8}/mL$, respectively. Sensory property of the samples containing milk product was lower than that of milk yogurt (reference). However, sensory property of the sample containing casein was not significantly different from that of milk yogurt (p<0.05). The sample containing whey powder showed lower sensory score than other samples. Though the composition of volatile aroma compounds was slightly different from sample to sample, gas chromatographic analysis detected acetone, ethanol, diacetyl and acetoin in samples fermented by L. acidophilus.

• Journal of Korea Water Resources Association
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• v.39 no.12 s.173
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• pp.1043-1056
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• 2006

Our ultimate purpose is to investigate the potential change in regional surface climate due to the global warming and to produce higher quality regional surface climate information over the Korean peninsula for comprehensive impact assessment. Toward this purpose, we carried out two 30-year long experiments, one for present day conditions (covering the period 1971-2000) and one for near future climate conditions (covering the period 2021-2050) with a regional climate model (RegCM3) using a one-way double-nested system. In order to obtain the confidence in a future climate projection, we first verify the model basic performance of how the reference simulation is realistic in comparison with a fairly dense observation network. We then examine the possible future changes in mean climate state as well as in the frequency and intensity of extreme climate events to be derived by difference between climate condition as a baseline and future simulated climate states with increased greenhouse gas. Emphasis in this study is placed on the high-resolution spatial/temporal aspects of the climate change scenarios under different climate settings over Korea generated by complex topography and coastlines that are relevant on a regional scale.

• Journal of the Society of Disaster Information
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• v.9 no.3
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• pp.249-258
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• 2013

Recieved Mar. 06, 2013 Revised Mar. 29, 2013 Accepted Sep. 11, 2013In this study, we evaluated the method performance and the optimum sample injection method of the portable GC/MS(HAPSITE) which were designed to operate on scene of chemical accidents. Chemicals used for performance test were vinyl chloride(VC), methyl chloride(MC), benzene(Bz), toluene(Tol). CRM(Certified Reference Material) Manufactured by KRISS(Korea Research Institute of Standards and Science) was used as the standard gas. The results showed that 1) Among three sample injection methods(Cylinder, Silico canister, and Bag), bag was identified as the most appropriate sample injection method. Bag material and capacity did not significantly affect the results. The most ideal reproducibility occurred at the 2-minute point of the purge time in the loop and tenax methods. 2) Performance evaluation of HAPSITE was conducted. Evaluation items were reproducibility, linearity, method detection limit, etc. Tenax concentration method was appropriate for larger molecules and Carbopack concentration method was suitable for smaller molecules.

• Analytical Science and Technology
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• v.24 no.1
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• pp.1-9
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• 2011

We described an estimation of measurement uncertainty in quantitative analysis of 11-nor-9-carboxy-${\Delta}^9$-tetrahydrocannabinol (THC-COOH), the metabolite of ${\Delta}^9$-tetrahydrocannabinol, in hair samples by using the bead-assisted liquid-liquid extraction and gas chromatography-tandem mass spectrometric (GC-NCI-MS/MS) detection. Traceability of measurement was established through the use of reference materials, calibrated volumetric tubes, volume measuring devices, and measuring instruments. The analytical results were compared and the different contributions to the uncertainty were evaluated. Inter-day variation was performed by using statistical analysis of several indicative factors. Measurement uncertainty associated with the analyte in real forensic hair samples were estimated using QC data. The major factor of contribution to combined standard uncertainty was inter-day repeatability, while those associated with preparation of analytical standard and also sample of weight were insignificant considering the degree of contribution. Relative uncertainty of relative extended standard uncertainty divided into the measured concentration of the analyte was 17% in a hair sample. The uncertainty of result evaluation will be invaluable to improve quality of the analysis.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.22 no.3
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• pp.480-490
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• 2018

Recently, The MRV (monitoring, reporting and verification) regulation, which measures, reports and verifies the emission gas of vessel to head for member countries of Europe Union (EU), is being implemented. As part this reason, we develop a system that estimates simple fuel consumption and recommends optimized stop-over ports of vessel, to calculate amount of carbon emission. To do this, we analyze fuel, distance and time consumption between port and the other port based on stored voyage data for over 10 years of real-ship, and implement a simple fuel consumption estimation module using analyzed result. Also, we design and implement the optimized route recommendation algorithm, existing navigation route display function including comparison with the optimized routes and user custom route plan function. Therefore, we expect the developed system is helpful when makes a navigation route and so on by reference indexes and we anticipate the system to have a sense for future research which learns and predicts for accuracy result.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.22 no.3
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• pp.200-208
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• 2012

Objectives: This study investigated the performance of three separate units of a portable photoionization detector (PID, ppb-RAE 3000) for measuring volatile organic compounds (VOCs) in a laboratory. Methods: A laboratory evaluation of the accuracy, precision, and inter-instrumental variance of three separate units of a portable PID (ppb-RAE 3000) was performed. The evaluation was based on the preparation of a test air sample of known toluene or ethylacetate concentration in a Tedlar$^{(R)}$ bag. The test air sample was monitored and data were logged consecutively by the three PIDs. A certified gas of 50 ppm toluene was also monitored during the test to ensure the reliability of the generated test air sample. Four different concentrations ranging from 0.1 to 2 TLV were used and a series of five measurements for each concentration level was performed. The accuracy was evaluated using National Institute for Occupational Safety and Health (NIOSH) criteria. Results: The results from the oldest ppb-RAE3000 unit among the three test units generally fell outside the NIOSH recommended accuracy criteria of ${\pm}25%$, whereas the other two units produced results which were acceptable at, or greater than, 25 ppm of toluene, or 0.5 TLV. These units also met the NIOSH criteria for some ethylacetate measurements but the results were not consistent. Conclusions: Considering the inconsistent performance of these ppb-RAE 3000 units, this device may not be appropriate for use as an alternative to the standard measurement methods. However, it can serve good survey instruments to identify exposure sources or concentration profiles. For all applications, the ppb-RAE 3000 should be used with frequent calibration checks, additional validation using a reference material, and careful maintenance.

• Korean journal of food and cookery science
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• v.12 no.2
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• pp.153-161
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• 1996

A curd yogurt was prepared from egg white powder (EWP) and casein added with sugars (glucose, fructose, lactose). The effects of sugar addition on acid production and growth of Lactobacillus were studied. The effects of sugar addition on sensory property and volatile aroma compounds were also studied. Acid production by L. acidophilus in EWP 2％ (W/V), casein 3％ (w/v) and sugar 0.5,1 or 2％ W/V) was lower than that of L. acidophilus in milk (control). Acid production in sample added with glucose or fructose of 1％ or 2% (W/V) was higher than that of 0.5% (W/V), while acid production in lactose added sample was not affected with the concentration of lactose. Number of viable cells of L. acidophilus at 24 hr in milk, glucose added sample, fructose added sample and lactose added sample was 3.6${\times}$10/Sup 9/, 5.6${\times}$10$\^$8/, 6.0${\times}$10$\^$8/,and 3.2${\times}$10$\^$7/, respectively. Through 30hr fermentation, acid production and number of viable cells of L. acidophilus in milk were higher than those of sugar added samples. Sensory property of fructose added sample was slightly better than that of milk yogurt (reference), while that of lactose added sample was significantly inferior. Though the composition of volatile aroma compounds was slightly different according to sample, gas chromatographic analysis detected acetone, ethanol, diacetyl and acetoin in samples fermented by L. acidophilus.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.6
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• pp.459-463
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• 2017

Hot dip galvanizing in the steel plant is one of the most widely used methods for preventing the corrosion of steel materials including structures, steel sheets, and materials for industrial facilities. While hot dip galvanizing has the advantage of stability and economic feasibility, it has difficulty in repairing equipment and maintaining the facilities due to high-temperature oxidation caused by Zn Fume where molten zinc used in the open spaces. Currently, SM45C (carbon steel plate for mechanical structure, KS standard) is used for the equipment. If a part of the equipment is resistant to high temperature and Zn fume, it is expected to improve equipment life and performance. In this study, the manufactured Ni alloy was tested for its corrosion resistance against Zn fume when it was used in the hot dip galvanizing equipment in the steel plant. Two kinds of materials currently used in the equipment, new Ni alloy and Inconel(typical corrosion-resistant Ni alloy), were selected as the reference groups. Two kinds of molten metal were used to confirm the corrosion of each alloy according to the molten metal. Zn fume was generated by bubbling Ar gas from molten Zn in a furnace($500{\sim}700^{\circ}C$) and the samples were analyzed after 30 days. After 30 days, the specimens were taken out, the oxide layer on the surface was confirmed with an optical microscope and SEM, and the corrosion was confirmed using a potentiodynamic polarization test. Corrosion depends on the type of molten metal.