• Journal of the Korean Institute of Telematics and Electronics
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• v.27 no.1
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• pp.91-95
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• 1990

We study the process for the reduction of bird's beak at LOCOS processing with changing the representative coefficients, oxide thickness, silicon nitride thickness, oxidetion temperature and field oxide thickness that induced the condition of bird'beak. In order to eliminate the gate oxide defects induced by selective oxidation, we used additional sacrific oxidatio. Finally we obtained the length of bird's beak to be 5000\ulcornerby SEM.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• Journal of Powder Materials
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• v.16 no.4
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• pp.262-267
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• 2009

Disk type porous nickel membrane was fabricated by in-situ reduction/sintering process using compacted NiO/PMMA (PMMA; Polymethyl methacrylate) mixture at $800^{\circ}C$ in hydrogen atmosphere. The porosity (49$\sim$58%) of these membrane was investigated as an amount of PMMA additive. The thermal decomposition and reduction behavior of NiO/PMMA were analyzed by TG/DTA in hydrogen atmosphere and the activation energy for the hydrogen reduction of NiO and thermal degradation of PMMA was calculated as 61.1 kJ/mol, evaluated by Kissinger method. Finally, the filtering performance and pressure drop were measured by particle counting system.

• Membrane and Water Treatment
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• v.9 no.3
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• pp.189-194
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• 2018

Electrochemical reduction of nitrate was studied using Zn, Cu and (Ir+Ru)-Ti cathodes and Pt/Ti anode in a cell divided by an ion exchange membrane. During electrolysis, effects of the different cathode types on operating parameters (i.e., voltage, temperature and pH), nitrate removal efficiency and by-products (i.e., nitrite and ammonia) formation were investigated. Ammonia oxidation rate in the presence of NaCl was also determined using the different ratios of hypochlorous acid to ammonia. The operating parameter values were similar for all types of cathode materials and were maintained relatively constant. Nitrate was well reduced and converted mostly to ammonia using Zn and Cu cathodes. Ammonia, produced as a by-product of nitrate reduction, was oxidized in the presence of NaCl in the electrochemical process and the oxidation performance was enhanced upon increasing the hypochlorous acid-to-ammonia ratio to 1.09:1. Zn and Cu cathodes promoted the nitrate reduction to ammonia and the produced ammonia was finally removed from solution by reacting with hypochlorite ions. Using Zn or Cu cathodes, instead of noble metal cathodes, in the electrochemical process can be an alternative technology for nitrate-containing wastewater treatment.

• Journal of Environmental Science International
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• v.21 no.3
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• pp.339-349
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• 2012

In order to clarify the impact of emissions reductions on the air quality over Metropolitan area of Korean Peninsula, several numerical experiment and analysis of integrated process rate(IPR) of ozone were carried out. Numerical models used in this study are WRF for the estimate the meteorological elements and CMAQ for assessment of ozone concentration. As result in the sensitive test of VOC/NOx reduction experiments, although VOC reduction tends to induce the different impact on the advection and photochemical reaction rate of ozone in urban area and rural area, the mechanism of ozone appeared to be more sensitive to the reduction of VOC than that of NOx over the metropolitan and its surround area. So the control of VOC emission inventories is an effective means to decrease the ozone concentrations around this area.

• Journal of Wetlands Research
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• v.9 no.1
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• pp.61-67
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• 2007

Our life totally depends on activated sludgeprocess for treatment of wastewater: sewage and industrial wastewater. Activated sludge process was the epoch-making technology in Environmental field. One century has been almost passed since the process was developed in England, and the process is still on the development of improvement. Here, history of activated sludge process, its mechanismsof treating the wastewater, expectations that we had on the process in the past, and future image and possibility on the process were presented. By reviewing the events related to the process, we can foresee potentials for new possibility of activated sludge process.

• Current Photovoltaic Research
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• v.6 no.2
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• pp.49-55
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• 2018

Recently solar cell industry needs the optimal design of Czochralski process for low cost high quality silicon mono crystalline ingot. Because market needs both high efficient solar cell and similar cost with multi-crystalline Si ingot. For cost reduction in Czochralski process, first of all energy reduction should be completed because Czochralski process is high energy consumption process. For this purpose we studied optimal water-cooling tube design and simultaneously we also check the quality of ingot with Von mises stress and V(pull speed of ingot)/G(temperature gradient to the crystallization) values. At this research we used $CG-Sim^{(R)}$ S/W package and finally we got improved water-cooling tube design than normally used process in present industry. The optimal water-cooling tube length should be 200mm. The result will be adopted at real industry.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.126-134
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• 2003

This paper investigates the multi-pass wet wire drawing process considering the slip between the wire and the capstan. The production of fine wire through multi-pass wet wire drawing process would be impossible without backtension. The backtension is affected by many process parameters, such as slip, dies reduction, coiling number of wire at the capstan, machine reduction, characteristic of lubricant etc. Up to date, die design and dies pass schedule of multi-pass wet wire drawing process have been performed by trial and error of expert in the industrial field. In this study, an analysis program which can perform the analysis and considering the effect of slip at each capstan was developed. The effects of many important parameters (drawing force, backtension force, needed power, slip rate, slip velocity rate etc.) on multi-pass wet wire drawing process can be predicted by this developed program. It is possible to obtain the important basic data which can be used in the pass schedule of multi-pass wet wire drawing process by using this developed program.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.7
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• pp.753-761
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• 2005

In this study, pretreatment of organic matters with $MIEX^{(R)}$ was evaluated using bench-scale experimental procedures on four organic matters to determine its effect on subsequent UF membrane filtration. For comparison, coagulation process was also used as a pretreatment of UF membrane filtration. Moreover, the membrane fouling potential was identified using different fractions and molecular weights of organic matters. From the removal property of MW organic matters by coagulation process for the sample water NOM and AOM, the removal efficiency of high MW organic matters were much higher than those of low MW organic matters. It was shown that the removal efficiency of high MW organic matter more than 10 kDa was lower than that of low MW organic matter for $MIEX^{(R)}$ process. For the change of permeate flux by the pretreatment process, $MIEX^{(R)}$+UF process showed high removal efficiency of organic matter as compared with coagulation-UF processes, but high reduction rate of permeate flux was presented through the reduction of removal efficiency of high MW organic matter. From sequential filtration test results in order to examine the effect of MW of organic matter on membrane fouling, it was found that the membrane foulant was occurred by high MW organic matter, and the DOC of organic matter less than 0.5 mg/L was working as the membrane foulant. In the case of sample water composed of low MW organic matter less than 10 kDa, since the low MW organic matter less than 10 kDa has high removal efficiency by $MIEX^{(R)}$, low reduction rate of permeate flux is obtained as compared with coagulation-UF processes. In summary, it is required to conduct the research on physical/chemical characteristic of original water before pretreatment process of membrane process is selected, and a pertinent pre-treatment process should be employed based on the physical/chemical characteristic of original water.

• Resources Recycling
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• v.29 no.4
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• pp.3-14
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• 2020

Titanium sponge is industrially produced by the Kroll process. In order to understand the importance of the emerging smelting and recycling process, it is necessary to review the conventional production process of titanium. Therefore this paper provides a general overview of the conventional titanium manufacturing system mainly by the Kroll process. The Kroll process can be divided into four sub-processes as follows: (1) Chlorination of raw TiO₂ with coke, by the fluidized bed chlorination or molten salt chlorination (2) Magnesium reduction of TiCl₄ and vacuum distillation of MgCl₂ and Mg by reverse U-type or I-type with reduction-distillation integrated retorts (3) Electrolysis process of MgCl₂ by monopolar cells or multipolar cells to electrolyze into chlorine gas and Mg. (4) Crushing and melting process in which sponge titanium is crushed and then melted in a vacuum arc furnace or an electron beam furnace Although the apparatus and procedures have improved over the past 80 years, the Kroll process is the costly and time-consuming batch operation for the reduction of TiCl₄ and the separation of MgCl₂.