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Optimal Water-cooling Tube Design for both Defect Free Process Operation and Energy Minimization in Czochralski Process

무결정결함영역을 유지하면서 에너지를 절감하는 초크랄스키 실리콘 단결정 성장로 수냉관 최적 설계

  • Chae, Kang Ho (Department of chemical Engineering, Yeoungnam University) ;
  • Cho, Na Yeong (Department of chemical Engineering, Yeoungnam University) ;
  • Cho, Min Je (Department of chemical Engineering, Yeoungnam University) ;
  • Jung, Hyeon Jun (Department of chemical Engineering, Yeoungnam University) ;
  • Jung, Jae Hak (Department of chemical Engineering, Yeoungnam University) ;
  • Sung, Su Whan (Department of chemical Engineering, Kyungpook National University) ;
  • Yook, Young Jin (Research center, S-Tech Co. Ltd)
  • 채강호 (화학공학과, 영남대학교) ;
  • 조나영 (화학공학과, 영남대학교) ;
  • 조민제 (화학공학과, 영남대학교) ;
  • 정현준 (화학공학과, 영남대학교) ;
  • 정재학 (화학공학과, 영남대학교) ;
  • 성수환 (화학공학과, 경북대학교) ;
  • 육영진 (연구소, (주)에스테크)
  • Received : 2018.05.17
  • Accepted : 2018.06.20
  • Published : 2018.06.30

Abstract

Recently solar cell industry needs the optimal design of Czochralski process for low cost high quality silicon mono crystalline ingot. Because market needs both high efficient solar cell and similar cost with multi-crystalline Si ingot. For cost reduction in Czochralski process, first of all energy reduction should be completed because Czochralski process is high energy consumption process. For this purpose we studied optimal water-cooling tube design and simultaneously we also check the quality of ingot with Von mises stress and V(pull speed of ingot)/G(temperature gradient to the crystallization) values. At this research we used $CG-Sim^{(R)}$ S/W package and finally we got improved water-cooling tube design than normally used process in present industry. The optimal water-cooling tube length should be 200mm. The result will be adopted at real industry.

Keywords

References

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