• 제목/요약/키워드: Reduction of process lead time

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NOVA System을 이용한 CMP Automation에 관한 연구 (The Study for the CMP Automation wish Nova Measurement system)

  • 김상용;정헌상;박민우;김창일;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.176-180
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    • 2001
  • There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

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주문생산 방식하에서 ERP를 응용한 일정계획 수립 사례 연구 (Production Scheduling employing ERP in the make-to-order manufacturing system)

  • 이순구;이영훈
    • 산업공학
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    • 제12권3호
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    • pp.424-436
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    • 1999
  • Due to environmental change in market, delivery satisfaction to customers and reduction of lead time are critical in the make-to-order manufacturing system. A case of production scheduling process restructuring is studied for one company which employed ERP system. Based on the standard module ERP package provided, they modified and added several functions for their specific processes, and implemented it in production scheduling. The ratio of delivery satisfaction has been improved from 51.1% to 60.8%, and manufacturing lead time has been reduced from 43 days to 30 days in average during 10 months. Moreover, they achieved several side effects such as real time production scheduling and workload analysis, information sharing over all departments, and improving flexibility in receiving orders.

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텡스텐 플러그 CVD 공정에서 SiH4 Soak의 영향 (SiH4 Soak Effects in the W plug CVD Process)

  • 이우선;서용진;김상용;박진성
    • 한국전기전자재료학회논문지
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    • 제16권1호
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    • pp.1-4
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    • 2003
  • The SiH$_4$soak step is widely used to prevent the WF$_{6}$ attack to the underlayer metal using the chemical vapor deposition (CVD) method. Reduction or skipping of the SiH$_4$soak process time if lead to optimizing W-plug deposition process on via. The electrical characteristics including via resistance and the structure of W-film are affected by the time of SiH$_4$soak process. The possibility of elimination of SiH$_4$soak process is confirmed In the case of W- film grown on the stable Ti/TiN underlayer.

Numerical simulation on the coupled chemo-mechanical damage of underground concrete pipe

  • Xiang-nan Li;Xiao-bao Zuo;Yu-xiao Zou;Yu-juan Tang
    • Structural Engineering and Mechanics
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    • 제86권6호
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    • pp.779-791
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    • 2023
  • Long-termly used in water supply, an underground concrete pipe is easily subjected to the coupled action of pressure loading and flowing water, which can cause the chemo-mechanical damage of the pipe, resulting in its premature failure and lifetime reduction. Based on the leaching characteristics and damage mechanism of concrete pipe, this paper proposes a coupled chemo-mechanical damage and failure model of underground concrete pipe for water supply, including a calcium leaching model, mechanical damage equation and a failure criterion. By using the model, a numerical simulation is performed to analyze the failure process of underground concrete pipe, such as the time-varying calcium concentration in concrete, the thickness variation of pipe wall, the evolution of chemo-mechanical damage, the distribution of concrete stress on the pipe and the lifetime of the pipe. Results show that, the failure of the pipe is a coupled chemo-mechanical damage process companied with calcium leaching. During its damage and failure, the concentrations of calcium phase in concrete decrease obviously with the time, and it can cause an increase in the chemo-mechanical damage of the pipe, while the leaching and abrasion induced by flowing water can lead to the boundary movement and wall thickness reduction of the pipe, and it results in the stress redistribution on the pipe section, a premature failure and lifetime reduction of the pipe.

RTM공법을 이용한 승용차용 복합재료 휠의 표면정도 향상 및 개발 (Improvement of Surface Quality and Development of Composite Wheel for Passenger Cars Manufactured by RTM)

  • 김포진;이대길
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.54-57
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    • 2003
  • Since passenger cars require five wheels including a spare, the weight reduction of wheels without sacrificing performance is important. Recently, the structured components of cars made of steel are replaced by composites. plastics and other nonmetallic materials such as aluminum and magnesium for weight reduction. From these new tried materials are most promising due to their high specific stiffness and specific strength. The composites manufactured by resin transfer molding (RTM) process has not only low cost for the manufacturing but also reduces the lead time and development because the molds for RTM is easy to manufacture. In this work, composite wheels for passenger cars were designed and manufactured by RTM process. Since surface quality of wheels is important for passenger cars, the optimal stacking sequence for composite wheels was selected considering surface quality and mechanical properties. Also, the manufacturing method for the composite mold was depicted.

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RULE-BASE SIZE-REDUCTION TECHNIQUES IN A LEARNING FUZZY CONTROLLER

  • Lembessis, E.;Tnascheit, R.
    • 한국지능시스템학회:학술대회논문집
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    • 한국퍼지및지능시스템학회 1993년도 Fifth International Fuzzy Systems Association World Congress 93
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    • pp.761-764
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    • 1993
  • In this paper we consider techniques for reducing the generated number of rules in learning fuzzy controllers of the state-space action-reinforcement type that can be simply implemented and that behave well in the presence of process noise. Fewer rules lead to better performance, less contradiction in controller action estimation, smaller required execution-time and make it easier for a human to comprehend the generated rules and possibly intervene.

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로보트용 금형 연마 공구 시스템의 개발 (Development of polishing tool system for robot)

  • 박종오;이대엽
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 26-27 Oct. 1990
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    • pp.190-193
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    • 1990
  • Die finishing (polishing and lapping) after NC machining is characterized as one bottleneck process for reducing lead time. For automation of this typical manual work, a flexible polishing tool system using industrial robot has been developed. This tool system has three principal functions in order to achieve reduction of waviness, 3 D.O.F. compliance and constant pressure structure. This polishing tool shows that adaptability to free form surface is increased and programmability to various areas of die surface is also acquired.

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프로세스 재설계에 대한 가치평가모형: 제조업체 사례연구 (Evaluation Model of the Value of Process Redesign: A Case Study of Manufacturing Company)

  • 이상재
    • 한국경영과학회지
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    • 제24권4호
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    • pp.81-94
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    • 1999
  • Organization change projects such as Business Process Redesign(BPR) have been implemented by many firms for enhancing their organizational performance. However, management is reluctant to initiate these projects due to enterprise-wide impact and steeper project cost than the traditional system development projects. Thus, there emerges a need to accurately assess the value of the redesigned organizational process for the successful implementation of BPR projects. The purpose of this study is to assess the value of process redesign in the point of resource utilization and allocation, and cycle time and cost reduction. The candidate process and the design alternatives are identified from organizational requirements analysis. The variables and their relations are defined to perform task activity analysis, bottleneck analysis, cycle cost analysis, and resource utilization analysis. A Case study of a manufacturing company indicates that the assessments method proposed in this study is a promising approach to identify the business alternative process that lead to the highest organizational performance.

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생산계획 및 우선순위규칙에 따른 Order Release 정책의 유효성에 관한 연구 (The Effectiveness of Order Release Strategies considering Production Plan and Dispatching Rules)

  • 최병대;이기창;박찬권;박진우
    • 한국시뮬레이션학회논문지
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    • 제8권4호
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    • pp.73-87
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    • 1999
  • Order Review/Release (ORR) System is the linkage between planning system and actual production. Reduction of the waiting time on the machines, work in process and lead time variation may be achieved by adopting ORR strategies. But researchers on the ORR do not agree on the effectiveness of ORR. Some say that the overall system flow time may be increased if ORR is adopted, but others say that ORR can reduce work in process, flow time and variation of flow time. The objective of this research is to clarify under what environments order release strategy is effective. Simulation study was conducted in a hypothetical job shop. The experimental results show that dispatching rule is much more important than ORR is in controlling the shop floor. But the results indicate that ORR can reduce mean shop flow time, average work in process and variation of shop flow time under such environments where utilization level is high and planned order is weekly released to the order pool. And the results also show that the effect of plan smoothing on the ORR is insignificant, which is inconsistent with the results of the previous researches.

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배압 성형기술을 이용한 Lock-up Hub의 정형제조 기술에 관한 연구 (A study on Net-shape technology of Automotive Lock-up Hub using Cold back pressure forming)

  • 권용철;이정환;이영선
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 추계학술대회 논문집
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    • pp.173-176
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    • 2007
  • The characteristics of the tool system give many effects into the costs and qualities for the finished components. This study proposes a new method for manufacturing of high manufacturing productivity, production process reduction and low cost through back pressure forming. The Lock-up hub is manufactured through many processes, such as upsetting($1^{st}$ Forming), piercing, direct extrusion($2^{nd}$ Forming), final sizing process($3^{rd}$ Forming). In this study, process design for closed-die forging of a Lock-up hub used for a component of automobile transmission was made using three-dimensional finite element simulations, and the strain distributions and velocity distributions are investigated through the post processor. The rigid-plastic finite-element method for back pressure forging has been used in order to reduce development time and die cost. Using the FEM simulation, we found the optimum value of back pressure. The prototypes of Lock-up hub parts were forged into the net-shape. In the experiment, lead precision of tooth are measured by the CCMM(Contact Coordinate Measuring Machine). The dimensional accuracy of forged part was improved up to the 40% when back press was applied.

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