• 제어로봇시스템학회:학술대회논문집
• /
• 1989.10a
• /
• pp.421-426
• /
• 1989

Many of semiconductor manufacturing companies persuit automation of wafer fabrication to improve the yields and quality of their products. Development of real-time control system for wafer fabrication and wafer/cassette automatic transfer-system is the most important part to achieve the purpose. In this paper, SECS protocol proposed by SEMI is briefly reviewed and an implementation method of real-time monitoring and control system is suggested as one of the possible ways for wafer fabrication automation. The system consists of process equipments supporting SECS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.64-64
• /
• 2009

As the advanced packaging technology developing, Copper electro-plating processing has be wildly utilized in the semiconductor interconnect technique. Chemical solution monitoring methods, including PH and gravity measurement exist in industry, but economical and practical real-time monitoring has not been achieved yet. Red-green-blue (RGB) color sensor can successfully monitor the condition of $CuSO_4$ solution during electric copper plating process. Comparing the intensity variations of the RGB data and optical spectroscopy data, strong correlation between two in-situ sensors have shown.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.7 no.4
• /
• pp.779-787
• /
• 2003

Recently, a study on the development of remote monitoring and automation control system based on Web is spread widely. In this paper, we have expended the remote control method on the existing automation. And we proposed method to do real-time monitoring and remote control considering multimedia data processing, the expansion of TCP/IP using LabView graphical language. Also we applied the method in greenhouse environment control system. The application result was evaluated by very efficient thing to remotely monitor and control situation of greenhouse.

• Proceedings of the KIEE Conference
• /
• 2005.05a
• /
• pp.188-190
• /
• 2005

In this study, a smart motor control and monitoring system is developed with an embedded board where Intel PXA255B CPU is mounted. Linux is ported into the embedded board as RTOS(Real Time Operating System), and the environment which communicate with a motor driver through serial protocol and is capable of controlling and monitoring the motor in real time is built in the system. A user friendly GUI is developed for the convenient operation of the system. Also, the environment which is able to control and monitor the motor driver remotely is built in the system using TCP/IP protocol.

• 제어로봇시스템학회:학술대회논문집
• /
• 1991.10a
• /
• pp.826-831
• /
• 1991

Automated Storage and Retrieval System (AS/RS), which is an element of Computer Integrated Manufacturing (CIM), is a widely used material handling equipment with conveyors and Automatic Guided Vehicles (AGVs). Until now the evaluation of operational policies of AS/RS and control algorithms is done theoretically or by computer simulations. In this study, a real-time control and monitoring software of an AS/RS is also developed by making actually moving AS/RS miniature. A PC-based real-time monitoring program can control the AS/RS directly through the communication port. The monitoring program has additional functions such as storage/retrieval management, inventory management, and statistics management. The program can not only collect the necessary statistics but monitor the current action of the AS/RS concurrently.

• Journal of Welding and Joining
• /
• v.20 no.6
• /
• pp.45-45
• /
• 2002

This study is a middle report on the development of intelligent spot welding monitoring technology applicable to the production line. An intelligent algorithm has been developed to predict the quality of welding in real time. We examined whether it is effective or not through the In-Line and the Off-Line tests. The purpose of the present study is to provide a reliable solution which can prevent welding defects in production site. In this study, the process variables, which were monitored in the primary circuit of the welding, are used to estimate the weld quality by Hidden Markov Model(HMM). The primary dynamic resistance patterns are recognized and the quality is estimated in probability method during the welding. We expect that the algorithm proposed in the present study is feasible to the applied in the production sites for the purpose of in-process real time quality monitoring of spot welding.

• Journal of Welding and Joining
• /
• v.20 no.6
• /
• pp.769-775
• /
• 2002

This study is a middle report on the development of intelligent spot welding monitoring technology applicable to the production line. An intelligent algorithm has been developed to predict the quality of welding in real time. We examined whether it is effective or not through the In-Line and the Off-Line tests. The purpose of the present study is to provide a reliable solution which can prevent welding defects in production site. In this study, the process variables, which were monitored in the primary circuit of the welding, are used to estimate the weld quality by Hidden Markov Model(HMM). The primary dynamic resistance patterns are recognized and the quality is estimated in probability method during the welding. We expect that the algorithm proposed in the present study is feasible to the applied in the production sites for the purpose of in-process real time quality monitoring of spot welding.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.488-491
• /
• 2002

This growth if WWW(World Wide Web) with the spread of ADSL provides us with a variety of service that are the extensions of opportunities to get information. a various education methods by remote courses and electronic commerce. Remote Monitoring Server(RMS) that uses internet and WWW is constructed for chip mounter. Hardware base consists of RMS, chip mounter and C/S server. In this paper, we realize the remote management system with monitoring and diagnosis function to efficiently operate chip mounter the one of PCB assembly equipment. The remote management system for chip mounter consists of RMS(Remote Monitoring Server) and C/S server. RMS manages real-time information from chip mounter through TCP/IP. RMS that utilizes real-time information informs user of the actual output the operation status of chip mounter, user of the actual output, the operation status of chip mounter, the trouble code and the trouble description.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.123.2-123.2
• /
• 2013

Etching endpoint detection with plasma impedance monitoring (PIM) is demonstrated for small area dielectric layers inductive coupled plasma etching. The endpoint is determined by the impedance harmonic signals variation from the I-V monitoring system. Measuring plasma impedance has been examined as a relatively simple method of detecting variations in plasma and surface conditions without contamination at low cost. Cluster analysis algorithm is modified and applied to real-time endpoint detection for sensitivity enhancement in this work. For verification, the detected endpoint by PIM and real-time cluster analysis is compared with widely used optical emission spectroscopy (OES) signals. The proposed technique shows clear improvement of sensitivity with significant noise reduction when it is compared with OES signals. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as end point detection.

• Journal of the Korean Society of Industry Convergence
• /
• v.23 no.2_1
• /
• pp.149-161
• /
• 2020

We describe a new approach to implement of trajectory control and track record of articulated manipulator based on monitoring simulator for smart factory. The learning control algorithm was applied in implementation real-time control to provide enhanced motion control performance for robotic manipulators. The proposed control scheme is simple in structure, fast in computation, and suitable for real-time control. Moreover, this scheme does not require any accurate dynamic modeling, or values of manipulator parameters and payload. Performance of the proposed controller is illustrated by simulation and experimental results for robot manipulator consisting of six joints at the joint space and Cartesian space.by monitoring simulator.