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The Influence of $O_2$ Gas on the Etch Characteristics of FePt Thin Films in $CH_4/O_2/Ar$ gas

  • Lee, Il-Hoon;Lee, Tea-Young;Chung, Chee-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.408-408
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    • 2012
  • It is well known that magnetic random access memory (MRAM) is nonvolatile memory devices using ferromagnetic materials. MRAM has the merits such as fast access time, unlimited read/write endurance and nonvolatility. Although DRAM has many advantages containing high storage density, fast access time and low power consumption, it becomes volatile when the power is turned off. Owing to the attractive advantages of MRAM, MRAM is being spotlighted as an alternative device in the future. MRAM consists of magnetic tunnel junction (MTJ) stack and complementary metal- oxide semiconductor (CMOS). MTJ stacks are composed of various magnetic materials. FePt thin films are used as a pinned layer of MTJ stack. Up to date, an inductively coupled plasma reactive ion etching (ICPRIE) method of MTJ stacks showed better results in terms of etch rate and etch profile than any other methods such as ion milling, chemical assisted ion etching (CAIE), reactive ion etching (RIE). In order to improve etch profiles without redepositon, a better etching process of MTJ stack needs to be developed by using different etch gases and etch parameters. In this research, influences of $O_2$ gas on the etching characteristics of FePt thin films were investigated. FePt thin films were etched using ICPRIE in $CH_4/O_2/Ar$ gas mix. The etch rate and the etch selectivity were investigated in various $O_2$ concentrations. The etch profiles were studied in varying etch parameters such as coil rf power, dc-bias voltage, and gas pressure. TiN was employed as a hard mask. For observation etch profiles, field emission scanning electron microscopy (FESEM) was used.

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On the Importance of Consolidation and Fluidization in Numerical Modelling of Muds and Pollutants Transports (니토 및 오염물질 이동의 수치모의에 미치는 퇴적층의 압밀과 유동화의 중요성에 관하여)

  • Jae Youll Jin;Ki Dai Yum;Jin Soon Park
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.9 no.1
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    • pp.43-55
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    • 1997
  • Existing theories and experimental results on mud bed consolidation, fluidization and erosion are briefly reviewed. The importance of the history of bed shear strength profile which experiences periodic and random consolidation and fluidization is qualitatively discussed by reanalyzing a field data set in Youngkwang area of Korea. According to the results of existing laboratory experiments and the reanalyzing, the numerical modelling of mud or pollutant transport without considering consolidation and fluidization may cause the time lag between the hydrodynamic forcing and the increment of sediment and bed-originated pollutant concentrations in water column. The time lag can derive serious error in the transport direction, consequently in the budget of a heavy-concentrated bottom-originated substance, especially in macrotidal environments with relatively high wave energy.

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Microstructures and Electrical Properties of Thick PZT Films with Thickness Variation Fabricated by Multi-coating Method (Multi-coating법으로 제조된 두꺼운 PZT막의 두께 변화에 따른 미세구조 및 전기적 특성)

  • Park, Jun-Sik;Jang, Yeon-Tae;Park, Hyo-Deok;Choe, Seung-Cheol;Gang, Seong-Gun
    • Korean Journal of Materials Research
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    • v.12 no.3
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    • pp.211-214
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    • 2002
  • Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

Investiagtions on the Etching of Platinum Film using High Density Inductively Coupled Ar/Cl$_2$ HBr Plasmas

  • Kim, Nam-Hoon;Chang-Il kim;Chang, Eui-Goo;Kwon, Kwang-Ho
    • Transactions on Electrical and Electronic Materials
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    • v.1 no.3
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    • pp.14-17
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    • 2000
  • Giga bit dynamic random access memory(DRAM) requires the capacitor of high dielectric films. Some metal oxides films have been proposed as the dielectric material . And Pt is one of the most promising electrode materials. However very little has been done in developing the etching technologoy Pt film. Therefore, it is the first priority to develop the technology for plasma etching of Pt film. In this study, the dry etching of Pt film was investigated in Inductively Coupled Plasma(ICP) etching system with Cl$_2$/Ar and HBr/Cl$_2$/Ar gas mixing. X-ray photoelectron spectroscopy (XPS) was used in analysis of sidewall residues for the understanding of etching mechanism. We found the etch residues on the pattern sidewall is mainly Pt-Pt, Pt-Cl and Pt-Br compounds, Etch profile was observed by Scanning Electron Spectroscopy(SEM) . The etch rate of Pt film at 10%, Cl$_2$/90% Ar gas mixing ration was higher than at 100%. Ar. Addition of HBr to Cl$_2$/Ar as an etching gas led to generally higher selectivity to SiO$_2$. And the etch residues were reduced at 5% HBr/5% Cl$_2$/90% Ar gas mixing ration. These pages provide you with an examples of the layout and style which we wish you to adopt during the preparation of your paper, Make the width of abstract to be 14cm.

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Pathogenic free-living amoebae in Korea

  • Shin, Ho-Joon;Im, Kyung-Il
    • Parasites, Hosts and Diseases
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    • v.42 no.3
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    • pp.93-119
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    • 2004
  • Acanthamoeba and Naegleria are widely distributed in fresh water, soil and dust throughout the world, and cause meningoencephalitis or keratoconjunctivitis in humans and other mammals. Korean isolates, namely, Naegleria sp. YM-1 and Acanthamoeba sp. YM-2, YM-3, YM-4, YM-5, YM-6 and YM-7, were collected from sewage, water puddles, a storage reservoir, the gills of a fresh water fish, and by corneal washing. These isolates were categorized into three groups based on the mortalities of infected mice namely, highly virulent (YM-4), moderately virulent (YM-2, YM-5 and YM-7) and nonpathogenic (YM-3). In addition, a new species of Acanthamoeba was isolated from a freshwater fish in Korea and tentatively named Korean isolate YM-4. The morphologic characters of its cysts were similar to those of A. culbertsoni and A. royreba, which were previously designated as Acanthamoeba group III. Based on experimentally infected mouse mortality, Acanthamoeba YM-4 was highly virulent. The isoenzymes profile of Acanthamoeba YM-4 was similar to that of A. royreba. Moreover, an anti-Acanthamoeba YM-4 monoclonal anti-body reacted only with Acanthamoeba YM-4, and not with A. culbertsoni. Random amplified polymorphic DNA marker analysis and RFLP analysis of mitochondrial DNA and of a 188 small subunit ribosomal RNA, placed Acanthamoeba YM-4 in a separate cluster based on phylogenic distances. Thus Acanthamoeba YM-4 was identified as a new species, and assigned Acanthamoeba sohi. Up to the year 2002 in Korea, two clinical cases were found to be infected with Acanthamoeba spp. These patients died of meningoencephalitis. In addition, one case of Acanthamoeba pneumonia with an immunodeficient status was reported and Acanthamoeba was detected in several cases of chronic relapsing corneal ulcer, chronic conjunctivitis, and keratitis.

User Authentication Mechanism for using a Secure IPTV Service in Mobile Device (이동 장비에서 안전한 IPTV 서비스를 사용하기 위한 사용자 인증 메커니즘)

  • Jeong, Yoon-Su;Kim, Yong-Tae;Park, Gil-Cheol;Lee, Sang-Ho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.34 no.4B
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    • pp.377-386
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    • 2009
  • IPTV technology for providing multimedia content with high-speed is the network which combines existing network, multimedia and internet technology etc. But internet, broadcasting and web technologies which is now being used is not optimized to IPTV because the security problem between user who gets content service through mobile units and content server is not guaranteed. This paper proposes user certification mechanism between mobile device and content server to receive the service which the user for the content chooses by mobile device safely. The proposed mechanism uses the random number which user creates and certification token for preventing illegal user who uses other's service that already paid. Also the proposed protocol encrypts the delicate data like user's information or profile using shared-key between java card attached on user's mobile device and grant sewer and then prevents reply attack which happens often in wireless section and man-in-the-middle attack by MAC.

Effects of Improving Plasma Lipid Profiles and Antioxidant Metabolism of Superjami Extract Supplementation (슈퍼자미벼 미강 추출물 보충 섭취에 의한 항산화 대사 및 혈중 지질 개선 효과)

  • Nam, Su-Jin;Chung, Soo-Im;Kang, Mi-Youn
    • The Korean Journal of Food And Nutrition
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    • v.32 no.3
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    • pp.179-188
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    • 2019
  • This study was to confirm the effect of supplementation of superjami bran extract on lipid and antioxidant metabolism. Twenty-five subjects were recruited, and divided into Superjami group (n=12), and Placebo group (n=13) random assignment. Among the groups, the Superjami group took a Superjami bran extract (2 g/2 capsule/day), and the Placebo group took dextrin (2 g/2 capsule/day), for 12 weeks. As a result of the experiment, concentrations of TG, TC, and HDL-C in the blood, were significantly lower than those in the control group, and HDL-C was significantly higher. AI and HTR also showed positive values. Leptin did not differ significantly, but as a result of adipectin, the Superjami group displayed a higher value, compared to the Placebo group, and LAR also had significantly lower value. Antioxidant results showed that GPx, CAT, and RGLU, were significantly higher before as well as after intakes of the Superjami group, and significantly higher levels of the Superjami group, compared to the Placebo group. AOPP showed significantly lower values for the Superjami group, compared to the Placebo group. So, based on this study, ingestion of Superjami bran extract is effective in improving blood lipid concentrations as well as inflammatory substances, and has positive effects relative to increasing antioxidant activity.

Prediction for Periodontal Disease using Gene Expression Profile Data based on Machine Learning (기계학습 기반 유전자 발현 데이터를 이용한 치주질환 예측)

  • Rhee, Je-Keun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.23 no.8
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    • pp.903-909
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    • 2019
  • Periodontal disease is observed in many adult persons. However we has not clear know the molecular mechanism and how to treat the disease at the molecular levels. Here, we investigated the molecular differences between periodontal disease and normal controls using gene expression data. In particular, we checked whether the periodontal disease and normal tissues would be classified by machine learning algorithms using gene expression data. Moreover, we revealed the differentially expression genes and their function. As a result, we revealed that the periodontal disease and normal control samples were clearly clustered. In addition, by applying several classification algorithms, such as decision trees, random forests, support vector machines, the two samples were classified well with high accuracy, sensitivity and specificity, even though the dataset was imbalanced. Finally, we found that the genes which were related to inflammation and immune response, were usually have distinct patterns between the two classes.

Influence of yeast hydrolysate supplement on growth performance, nutrient digestibility, microflora, gas emission, blood profile, and meat quality in broilers

  • Sampath, Vetriselvi;Han, Kyudong;Kim, In Ho
    • Journal of Animal Science and Technology
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    • v.63 no.3
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    • pp.563-574
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    • 2021
  • A total of 1512 Ross 308 broilers (one - day - old) were assigned (random blocks) to 1of 3 dietary treatments with 28 replicates of 18 chicks/cage. The dietary treatments were Cornsoybean-meal based basal diet supplemented with 0%, 0.1%, and 0.2% of commercial yeast hydrolysate (YH [Saccharomyces cerevisiae]). The graded level of YH supplementation has linearly increased broilers body weight gain on d 21, 35, and overall (p = 0.044, 0.029, and 0.036, respectively) experimental period. In addition, the increased level of YH supplementation has linearly reduced feed conversation ratio of broilers on d 21, 35, and overall trial period (p = 0.041, 0.052, and 0.032, respectively). However, the feed intake and mortality of broilers were not affected by the graded level of YH supplementation. Though nutrient digestibility of dry matter (p = 0.012) and nitrogen (p = 0.021) was linearly increased in broilers fed YH supplementation, at the end of the trial it fails to affect the total track digestible energy. Dietary inclusion of YH supplementation showed a beneficial effect on the microbial population as linearly improved lactobacillus (p = 0.011) and reduced Escherichia coli counts (p = 0.042). An increasing level of YH supplementation has tended to decrease NH3 (p = 0.069) and linearly decrease H2S (p = 0.027) of noxious gas emission in broilers. Moreover, dietary YH supplements trend to increase the glucose (p = 0.066) and reduced cholesterol (p = 0.069) level. At the end of the test, YH supplementation elicited a linear reduction in drip loss on days 5 and 7, respectively (p = 0.045, and 0.021). Furthermore, dietary inclusion of YH supplementation had linearly increased villus height (p = 0.051) but fails to affect crypt depth. Therefore, in terms of positive effects on the broiler's overall performance, we suggest that dietary supplements containing graded YH levels in the broilers diet could serve as a potential alternative for growth promoters.

Moment-rotational analysis of soil during mining induced ground movements by hybrid machine learning assisted quantification models of ELM-SVM

  • Dai, Bibo;Xu, Zhijun;Zeng, Jie;Zandi, Yousef;Rahimi, Abouzar;Pourkhorshidi, Sara;Khadimallah, Mohamed Amine;Zhao, Xingdong;El-Arab, Islam Ezz
    • Steel and Composite Structures
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    • v.41 no.6
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    • pp.831-850
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    • 2021
  • Surface subsidence caused by mining subsidence has an impact on neighboring structures and utilities. In other words, subsurface voids created by mining or tunneling activities induce soil movement, exposing buildings to physical and/or functional destruction. Soil-structure is evaluated employing probability distribution laws to account for their uncertainty and complexity to estimate structural vulnerability. In this study, to investigate the displacement field and surface settlement profile caused by mining subsidence, on the basis of a Winklersoil model, analytical equations for the moment-rotation response ofsoil during mining induced ground movements are developed. To define the full static moment-rotation response, an equation for the uplift-yield state is constructed and integrated with equations for the uplift- and yield-only conditions. The constructed model's findings reveal that the inverse of the factor of safety (x) has a considerable influence on the moment-rotation curve. The maximal moment-rotation response of the footing is defined by X = 0:6. Despite the use of Winkler model, the computed moment-rotation response results derived from the literature were analyzed through the ELM-SVM hybrid of Extreme Learning Machine (ELM) and Support Vector Machine (SVM). Also, Monte Carlo simulations are used to apply continuous random parameters to assess the transmission of ground motions to structures. Following the findings of RMSE and R2, the results show that the choice of probabilistic laws of input parameters has a substantial impact on the outcome of analysis performed.