• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.4
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• pp.7-11
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• 2006

In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.77-77
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• 2016

Thin films synthesized by plasma processes have been widely applied in a variety of industrial sectors. The structure control of thin film is one of prime factor in most of these applications. It is well known that the structure of this film is closely associated with plasma parameters and species of plasma which are electrons, ions, radical and neutrals in plasma processes. However the precise control of structure by plasma process is still limited due to inherent complexity, reproducibility and control problems in practical implementation of plasma processing. Therefore the study on the fundamental physical properties that govern the plasmas becomes more crucial for molecular scale control of film structure and corresponding properties for new generation nano scale film materials development and application. The thin films are formed through nucleation and growth stages during thin film depostion. Such stages involve adsorption, surface diffusion, chemical binding and other atomic processes at surfaces. This requires identification, determination and quantification of the surface activity of the species in the plasma. Specifically, the ions and neutrals have kinetic energies ranging from ~ thermal up to tens of eV, which are generated by electron impact of the polyatomic precursor, gas phase reaction, and interactions with the substrate and reactor walls. The present work highlights these aspects for the controlled and low-temperature plasma enhanced chemical vapour disposition (PECVD) of Si-based films like crystalline Si (c-Si), Si-quantum dot, and sputtered crystalline C by the design and control of radicals, plasmas and the deposition energy. Additionally, there is growing demand on the low-temperature deposition process with low hydrogen content by PECVD. The deposition temperature can be reduced significantly by utilizing alternative plasma concepts to lower the reaction activation energy. Evolution in this area continues and has recently produced solutions by increasing the plasma excitation frequency from radio frequency to ultra high frequency (UHF) and in the range of microwave. In this sense, the necessity of dedicated experimental studies, diagnostics and computer modelling of process plasmas to quantify the effect of the unique chemistry and structure of the growing film by radical and plasma control is realized. Different low-temperature PECVD processes using RF, UHF, and RF/UHF hybrid plasmas along with magnetron sputtering plasmas are investigated using numerous diagnostics and film analysis tools. The broad outlook of this work also outlines some of the 'Grand Scientific Challenges' to which significant contributions from plasma nanoscience-related research can be foreseen.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.6
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• pp.4125-4130
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• 2015

This paper presents the communication performance for the radiation pattern reconfigurable antenna in the wearable device measuring bio signal (temperature, blood pressure, pulse etc.) of human body. The operational frequency is 2.4 - 2.5 GHz, which covers Bluetooth communication bandwidth. The maximum gain of the antennas is 1.96 dBi. The proposed antenna is efficiently transmitting and receiving signal by generating two opposite beam directions using two RF switches (PIN diode). Also, we investigated how radiation pattern changes according to three angles ($30^{\circ}$, $90^{\circ}$, $150^{\circ}$) of Top Loading. In this paper, we measured and compared the SNR (Signal-to-Noise Ratio) and BER (Bit Error Rate) performances of the proposed antennas in the condition between an ideal environment of anechoic chamber and smart house existing practical electromagnetic interferences (Universal Software Radio Peripheral, USRP). Throughout the comparing the results of the measurement of two cases, we found that the SNR is degraded over 5dB in average and BER is increased over ten times in maximum, therefore, it is confirmed that the error rate of receiving signal is increased. The measured results of SNR and BER value in this paper able to expect the performance degrading by the interference from the electromagnetic devices.

• Journal of the Korea Institute of Information Security & Cryptology
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• v.26 no.4
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• pp.871-883
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• 2016

It has been steadily increasing to use a wireless keyboard via Radio Frequency which is the input device. Especially, wireless keyboards that use 2.4 GHz frequency band are the most common items and their vulnerabilities have been reported since 2010. In this paper, we propose a 2.4 GHz wireless keyboard keystroke analysis and injection system based on the existing vulnerability researches of the Microsoft 2.4 GHz wireless keyboards. This system is possible to control on the remote. We also show that, via experiments using our proposed system, sensitive information of user can be revealed in the real world when using a 2.4 GHz wireless keyboard.

• Journal of IKEEE
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• v.24 no.2
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• pp.604-609
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• 2020

We investigated the influence of rapid thermal annealing on aluminum nitride (AlN) thin film Schottky barrier diodes (SBDs) manufactured structures deposited on a 4H-silicon carbide (SiC) wafer using radio frequency sputtering. The Ni/AlN/4H-SiC devices annealed at 400℃ exhibited Schottky barrier diode (SBDs) properties with an on/off current ratio that was approximately 10 times higher than that of the as-deposited device structures and the devices annealed at 600℃ as measured at room temperature. Auger electron spectroscopy (AES) measurements revealed that atomic oxygen concentrations in the annealed AlN devices at 400℃, is ascribed to the improvement in on/off ratio and the reduction of on-resistance. Additionally, we investigated the electrical characteristics of the AlN/SiC SBD structures depending on the frequency variation of sound waves.

• Proceedings of the KSR Conference
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• 2008.06a
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• pp.339-342
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• 2008

In this paper, the lessons and learns are introduced from the result of the trial project which is the first CBTC(Communication Based Train Control System) at Korail Bundang Line. This project has started end of 2002 and finished recently by Samsung SDS. The main purpose of this project was that new technology was seek for next generation of railway signal control system adapted in Korea. In 2002, there was no any revenue service system using Radio Frequency CBTC in the world at that time. Just a few trial project was on going in USA and EU. In well developed cities, the metro system have been built and old enough therefore they have to be considering re-signalling their existing system with advanced system for increasing availabilities of line usage and safety. This Bundang Line Trial Project was the first Korean CBTC project for above reasons. Most sub systems have been developed using local technology such as Electronics Controlled Interlocking System and Track Circuit Systems etc. Specially, in this project the RF-Communication devices are developed by local technology using DSSS(Direct Sequency Spread Spectrum) instead of FHSS(Frequency Hopping Spread Spectrum). This project has lasted for more than five years originally planned for three years because it was only accessible only night time in the main line from Ori to Suseo about 20km long. Each night only 2 and half hours are available to use the main line. Now the trial project has been done successfully with meet the customer's requirement, therefore the upgrade the mainline of Bundang line and another extension area up to Wangsipli to make revenue service using this new technology. This paper shows this result of the trial project and the strategy of upgrade and extension project as well.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.36 no.3A
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• pp.189-197
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• 2011

OFDM systems are much studied for the recent high speed wireless optical communication system. OFDM system has basically high PAPR and ICI easily generated because of non-linearity and RF impairments. In the wireless optical communication system, optical output power driven by current of LED is not linear so that transmission signals are distorted. Therefore, research about reception performance of this nonlinear optical output emitted by non-linear LED transfer function and OFDM signal has been conducted. Nonlinear effect of LED is different from nonlinear effect of OFDM system in the conventional radio communication system, which degrades the BER performance. In this paper, we apply non-linear transfer function of recently studied LED into OFDM system. So, for reducing the PAPR and suppressing the ICI in frequency domain of receiver, we suggest a new PAPR reduction technique to reduce non-linear distortion of LED and an adaptive ICI suppression algorithm so that BER performance may be improved. Also, the proposed method is verified through simulation results.

• Journal of Satellite, Information and Communications
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• v.7 no.1
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• pp.75-81
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• 2012

This study is to design the transmitter and receiver of short range UWB(Ultra Wide Band) imaging radar that is able to display high resolution radar image for front area of a UGV(Unmanned Ground Vehicle). This radar can help a UGV to navigate autonomously as it detects and avoids obstacles through foliage. The transmitter needs two transmitters to improve the azimuth resolution. Multi-channel receivers are required to synthesize radar image. Transmitter consists of high power amplifier, channel selection switch, and waveform generator. Receiver is composed of sixteen channel receivers, receiver channel converter, and frequency down converter, Before manufacturing it, the proposed architecture of transceiver is proved by modeling and simulation using several parameters. Then, it was manufactured by using industrial RF(Radio Frequency) components and all other measured parameters in the specification were satisfied as well.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.15 no.11
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• pp.3950-3969
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• 2021

Radio Frequency (RF)-based indoor localization technologies play significant roles in various Internet of Things (IoT) services (e.g., location-based service). Most such technologies require that all the devices comply with a specified technology (e.g., WiFi, ZigBee, and Bluetooth). However, this requirement limits its application scenarios in today's IoT context where multiple devices complied with different standards coexist in a shared environment. To bridge the gap, in this paper, we propose a cross-technology localization approach, which is able to localize target nodes using a different type of devices. Specifically, the proposed framework reuses the existing WiFi infrastructure without introducing additional cost to localize Non-WiFi device (i.e., ZigBee). The key idea is to leverage the interference between devices that share the same operating frequency (e.g., 2.4GHz). Such interference exhibits unique patterns that depend on the target device's location, thus it can be leveraged for cross-technology localization. The proposed framework uses Principal Components Analysis (PCA) to extract salient features of the received WiFi signals, and leverages Dynamic Time Warping (DTW), Gradient Boosting Regression Tree (GBRT) to improve the robustness of our system. We conduct experiments in real scenario and investigate the impact of different factors. Experimental results show that the average localization accuracy of our prototype can reach 1.54m, which demonstrates a promising direction of building cross-technology technologies to fulfill the needs of modern IoT context.