• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.108.2-108.2
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• 2014

잔류가스측정 질량분석기(RGA)는 진공챔버 내부의 진공상태 이상유무, 공정상태 확인 및 주입가스 농도제어 등 여러 종류의 작업에 응용되고 있다. 반도체용 박막 제조공정(PVD, CVD)에서 챔버 내의 수분 혹은 불순물 가스의 정확한 모니터링은 반도체 품질향상에 매우 중요하다. 1 Pascal 진공도의 증착용 챔버에 RGA를 직접 장착하여 작동시키기 위해서는 저진공용 RGA가 사용되어야 한다. 10-3 Pascal에서 6m 자유운동거리를 갖는 질소분자는 1 Pascal에서는 6 mm로 짧은 자유운동거리를 갖는다. 따라서 1 Pascal 저진공영역에서 이온을 생성시키고 mass filter를 사용하여 질량분석을 하기 위해서는 이온원과 mass filter 길이가 자유운동거리 수준으로 작아져야한다. 저 진공영역에서는 검출기와 전자방출용 필라멘트가 저진공에서 작동되도록 일반고진공용 RGA와는 완전히 다르게 소형으로 설계 제작되어야 한다. 10-7 Pascal 이상의 초고진공에서 사용되는 RGA는 이온원이 작동할 때 발생하는 outgassing을 낮추도록 설계가 되어야 초고진공의 유지가 가능하다. 한국표준과학연구원에서 현재 개발 중인 일반고진공용 RGA를 소개하고 저진공용과 초고진공용 RGA의 설계특성을 발표한다.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1249-1253
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• 2003

License plate recognition is very important in an automobile society. This is because, since plate detection accuracy has large influence on subsequent number recognition, it is very important. However, it is very difficult to do it, because a background and a body color of cars are similar to that of the license plate. In this paper, we propose a new thresholds determination method in the various background by using the real-coded genetic algorithm (RGA). By using RGA, the most likely plate colors are decided under various lighting conditions. First, the average brightness Y values of images are calculated. Next, relationship between the Y value and the most likely plate color thresholds (upper and lower bounds)are obtained by RGA. The relationship between thresholds decided from RGA and brightness average is aproximate by using the recursive least squares (RLS) algorithm. In the case of plate detection, thresholds are decided from these functions.

• 한국균학회소식:학술대회논문집
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• 2015.05a
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• pp.61-61
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• 2015

Rice blast, caused by the fungal pathogen Magnaporthe oryzae, is one of the most destructive diseases of rice worldwide. The rice - M. oryzae pathosystem has become a model in the study of plant - fungal interactions due to its economic importance and accumulating knowledge. During the evolutionary arms race with M. oryzae, rice plants evolved a repertoire of Resistance (R) genes to protect themselves from diseases in a gene-for-gene fashion. M. oryzae secretes a battery of small effector proteins to manipulate host functions for its successful infection, and some of them are recognized by host R proteins as avirulence effectors (AVR), which turns on strong immunity. Therefore, the analysis of interactions between AVRs and their cognate R proteins provide crucial insights into the molecular basis of plant - fungal interactions. Rice blast resistance genes Pik, Pia, Pii comprise pairs of protein-coding ORFs, Pik-1 and Pik-2, RGA4 and RGA5, Pii-1 and Pii-2, respectively. In all three cases, the paired genes are tightly linked and oriented to the opposite directions. In the AVR-Pik/Pik interaction, it has been unraveled that AVR-Pik binds to the N-terminal coiled-coil domain of Pik-1. RGA4 and RGA5 are necessary and sufficient to mediate Pia resistance and recognize the M. oryzae effectors AVR-Pia and AVR1-CO39. A domain at the C-terminus of RGA5 characterized by a heavy metal associated domain was identified as the AVR-binding domain of RGA5. Similarly, physical interactions among Pii-1, Pii-2 and AVR-Pii are being analyzed.

• Transactions on Electrical and Electronic Materials
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• v.6 no.6
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• pp.262-271
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• 2005

In order to achieve timely and accurate fault detection of plasma etching process, neural network based time series modeling has been applied to reactive ion etching (RIE) using two different in-situ plasma-monitoring sensors called optical emission spectroscopy (OES) and residual gas analyzer (RGA). Four different subsystems of RIE (such as RF power, chamber pressure, and two gas flows) were considered as potential sources of fault, and multiple degrees of faults were tested. OES and RGA data were simultaneously collected while the etching of benzocyclobutene (BCB) in a $SF_6/O_2$ plasma was taking place. To simulate established TSNNs as incipient fault detectors, each TSNN was trained to learn the parameters at t, t+T, ... , and t+4T. This prediction scheme could effectively compensate run-time-delay (RTD) caused by data preprocessing and computation. Satisfying results are presented in this paper, and it turned out that OES is more sensitive to RF power and RGA is to chamber pressure and gas flows. Therefore, the combination of these two sensors is recommended for better fault detection, and they show a potential to the applications of not only incipient fault detection but also incipient real-time diagnosis.

• BMB Reports
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• v.36 no.2
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• pp.196-200
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• 2003

Previously, we reported the biochemical properties of RGA1 that is expressed in Escherichia coli (Seo et al., 1997). The activities of RGA1 that hydrolyzes and binds guanine nucleotide were dependent on the $MgCl_2$ concentration. The steady state rate constant ($k_{cat}$) for GTP hydrolysis of RGA1 at 2 mM $MgCl_2$ was $0.0075{\pm}0.0001\;min^{-1}$. Here, we examined the effects of pH and cations on the GTPase activity. The optimum pH at 2 mM $MgCl_2$ was approximately 6.0; whereas, the pH at 2 mM $NH_4Cl$ was approximately 4.0. The result from the cation dependence on the GTPase (guanosine 5'-triphosphatase) activity of RGA1 under the same condition showed that the GTP hydrolysis rate ($k_{cat}=0.0353\;min^{-1}$) under the condition of 2mM $NH_4Cl$ at pH 4.0 was the highest. It corresponded to about 3.24-fold of the $k_{cat}$ value of $0.0109\;min^{-1}$ in the presence of 2 mM $MgCl_2$ at pH 6.0.

• Journal of the Korean Vacuum Society
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• v.17 no.4
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• pp.262-269
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• 2008

The residual gas analyzer (RGA) is employed for the process control of a vacuum system by measuring residual gases in it. This review paper introduces operating principles of the RGA and problems that can be encountered during use, together with their possible solutions.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.104.2-104.2
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• 2013

A residual gas analyzer (RGA) system has been developed in this laboratory. Characteristics of the RGA system parts such as ion source, quadrupole mass filter and sensitivity are introduced. Some efforts have been made to improve performance of the two types of ion sources, open ion source (OIS) and closed ion source (CIS). A metal mesh was placed onto the electron beam entrance of the CIS anode tube to block the filament field penetration. Sensitivity of the CIS ion sources with and without the mesh was compared by mass spectra of SF6 gas (97% He base) introduced into the CIS anode through a needle valve. About ten-times improvement in the RGA sensitivity was observed for the CIS with the mesh in the electron entrance. Computer simulation showed an axi-symmetric anode potential distribution and improved focusing of the electron beam inside the anode tube with the mesh.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.51-51
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• 2010

Residual Gas Analyzer(RGA)는 진공공정에서 전구체를 측정하고 분석하는 기기로써 다양한 방법으로 반도체나 디스플레이 소자제조를 위한 진공공정에 많이 사용되고 있다. 특히, 최근의 반도체 공정은 고집적화와 design의 나노 사이즈화로 인해, 안정적인 MOCVD 공정의 진행에 있어서 중요한 Factor중에 전구체의 안정적인 공급에서 어려움이 있다. 공정에 투입된 전구체의 질적, 양적인 실시간 모니터링이 불가능한 상태로 공정이 진행되어 원활한 박막의 생산에 큰 어려움을 격고 있다. 또한, 전구체의 정상상태를 확인 할 수 없음으로 인한 질적인 저하 등을 그 예로 들수 있겠다. 기존 양산 후 남은 전구체를 외관상의 변색, 점도 변화를 통해서 변질을 확인하고 전구체를 교체함으로써, 엄청난 경제적 손실을 가져왔다. 본 연구에서는 reference 전구체와 공정에서 사용된 전구체를 이용하여 Vapor Pressure측정과, FT-IR 측정, RGA분석을 통하여 전구체의 사용 전, 후를 비교 분석하고자 한다.

• Aerospace Engineering and Technology
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• v.2 no.2
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• pp.45-49
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• 2003

A Bake-Out test for STSAT-1 FM(Flight Model) was performed in a Bake-Out Chamber at SITC(Satellite Integration & Test Center) in KARI(Korea Aerospace Research Institute). The purpose of this test is to measure and analyze the outgassing rate to affect the optical equipment(FIMS) and to eliminate contaminants through the high temperature bake-out. This Bake-Out test is composed of three parts which are honeycomb panels & harnesses(Batch 1), an assembled satellite(Batch 2), and a disassembled satellite(Batch 3). For each test, quantitative and qualitative measurements and analysis were performed using TQCM(Thermoelectric Quartz Crystal Microbalance) and RGA(Residual Gas Analyzer.)

• Journal of the Korean Vacuum Society
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• v.11 no.2
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• pp.87-96
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• 2002

Outgassing from such sources as paints, coatings, adhesives and other non-metallic surfaces can contaminate satellites, especially second surface mirror and optical lens, it cause satellite to fail in own missions. The vacuum bake-out test using high temperature(more than $85 ^{\circ}C$)and high vacuum(less than $5.0{\times}1-^{-3}$ Pa) certify that the components of satellite work properly and can survive and operate in space environment like high vacuum. In the bake-out chamber installed at SITC of KARI, Rotary vacuum pump and Booster pump produce low vacuum of 5.0 Pa, and then two cryopumps produce high vacuum of below $5.0{\times}10^{-3}$ Pa. Also 48 ceramic heaters were provided to simulate high temperature. During the vacuum bake-out test, we detected contaminants using RGA(Residual Gas Analyzer) and measure the outgassing rate of the contaminant using the TQCM(Thermoelectric Quartz Crystal Microbalance). Also, IR/UV Spectrometer and witness plate be used to certify that the components were suitable for the spacecraft. This paper includes the preparation and procedures of the bake-out test for SAR(Solar Array Regulator) and MLI(Multi Layer Insulator), which were the components of the spacecraft. Especially, we discussed the methods and results of the contamination measurement. In the bake-out for SAR, the contamination was measured continuously although it was on the decrease from TQCM results. And RCA established that it is a highly polymerized compound. In the MLI bake-out using RGA and witness plate, we didn't detect any contamination materials.