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http://dx.doi.org/10.5757/JKVS.2008.17.4.262

Operating Principle of Residual Gas Analyzer  

Park, C.J. (Advanced Instrumentation Center, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.17, no.4, 2008 , pp. 262-269 More about this Journal
Abstract
The residual gas analyzer (RGA) is employed for the process control of a vacuum system by measuring residual gases in it. This review paper introduces operating principles of the RGA and problems that can be encountered during use, together with their possible solutions.
Keywords
residual gas analyzer; ion source; quadrupoloe mass filter; ion detection;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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