• Title/Summary/Keyword: RF-type

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Structural and Optical Preperties of RF Magnetron Sputtered Yttria-Stabilized Zirconia Thin Films (고주파 마그네트론 스퍼터링에 의해 제조된 이트리아 안정화 지르코니아 박막의 조직 및 광학적 특성)

  • 이유기;박종완
    • Journal of the Korean Vacuum Society
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    • v.5 no.2
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    • pp.119-126
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    • 1996
  • The effect of the $O_2$ concentration in the sputtering gas mixture, substate temperature and Ar pressure on the structural and optical properties of 3 mol% YSZ and 8 mol% YSZ thin films deposited by RF magnetron sputtering were investigated . The films were observed to have various crystal structures with different compositions in accordance with the type of the target materials. The size of fine grain-like particles decreased wiht increasing the $O_2$ concentration in the sputtering gas in the case of 3mol% YSZ, while it increased in the case of 8 mol% YSZ . However, the average opticla transmission of 8mol% YSZ, despite of thicker thickness. was higher than that of 3 mol% YSZ. Furthermore, the values of refractive index of 3mol% YSZ increased with increasing the $O_2$ concentration in the sputtering gas on the contrary to those of the 8 mol% YSZ. However, the transmission spectra of 8 mol% YSZ films were not strongly influenced by the substrate temperature and Ar pressure, whereas the refractive index of the YSZ films were strongly affected by the sputtering parameters.

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A STUDY OF RF IMPEDENCE MEASUREMENT AND ANISOTROPIC ETCHING (건식식각장치에서 임피던스 측정과 비등방성 식각에 대한 연구)

  • Kim, Jong-Sik;Kim, Hung-Rak;Kang, Bong-Gu;Kwon, O-Dae
    • Proceedings of the KIEE Conference
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    • 1989.11a
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    • pp.94-97
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    • 1989
  • It is shown that fundamental plasma characteristic, which are sheath voltage and ion concentration, can be derived from measuring RF impedence. Plasma characteristics from this simple method are verified by direct measuring, to be reasonable. Using these values a new relation between isotropy and the ratio of sheath voltage to ion concentration is derived. For etch in which $CF_4$ is used, anisotropic etch can be achieved in its order $10^{-12}Vcm^3$ and isotropic etch in $10^{-12}Vcm^3$. These results are useful in every asymetric diode type etch system.

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Synthesis of diamond thin films from $H_2-CH_4$ gas mixture by rf PACVD (고주파 플라즈마 CVD에 의한 $H_2-CH_4$ 계로부터 다이아몬드 박막의 합성)

  • Lee, Sang-Hee;Klm, Dae-Il;Park, Sang-Hyun;Kim, Bo-Youl;Lee, Jong-Tae;Woo, Ho-Whan;Han, Sang-Ok;Lee, Duck-Chool
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1514-1515
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    • 1998
  • Diamond thin films were deposited on n-type (100) Si wafers from $H_2-CH_4$ gas mixture by rf PACVD. Prior to deposition, mechanical scratching was done to improve density of nucleation sites with diamond paste of 3${\mu}m$. The microstructure of deposited diamond thin films was studied by using the following conditions : discharge power of 500W, $H_2$ flow rate of 50sccm, reaction pressure of 20torr, and $CH_4/H_2$ ratio of 0.3$\sim$1%. The deposited diamond thin films showed that the crystallite was increased at the lower methane concentration. The deposited thin films were characterized by Scanning Electron Microscopy. Raman Spectroscopy and Fourier-Transform Infrared Spectroscopy.

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A Design of linearize for High Power Amplifier using RF communication (RF통신용 대전력증폭기의 선형화에 관한 연구)

  • Won, Yong-Kyu;Lee, Sang-Cheol;Jung, Chan-Soo
    • Proceedings of the KIEE Conference
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    • 2003.07e
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    • pp.31-33
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    • 2003
  • Power amplifier linearity plays a major role in the design of RF communication systems. In this paper, predistortion type linearizer was designed an independently controllable AM/AM and AM/PM predistortion linearizers. This linearizer allows independent adjustment of the AM/AM and AM/PM curves by using two adjustable voltages to compensate the power amplifier non-linearities. The predistortion linearizer was improved the ACPR by 6dB with cdma2000 multi carrier signals. Applying this linearizer to two-tone 880MHz power amplifier, an improvement of adjacent channel leakage power up to 5dBm has been achieved.

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Color Quality Evaluation of High Color Rendering White LEDs According to Phosphor Types and Composition Ratio (형광체 종류와 조성비에 따른 고연색 백색 LED의 색품질 평가)

  • Jeong, Hee Suk;Ryeom, Jeongduk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.7
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    • pp.463-468
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    • 2017
  • Eight types of LED packages were manufactured according to the type and composition ratio of phosphors by using commercially available white LED phosphors. CRI (Ra), a conventional color quality evaluation method was evaluated by using manufactured white LED; the Rf, Rg, color vector graphic, and color distortion graphic were evaluated with a new method, IES TM-30-15. The results of the evaluation confirmed that the new method compensated for the disadvantages of CRI, which was found to be inadequate when the color was saturated. The added evaluation index identified the chroma variation and color change. Furthermore, the study showed that the changes of Rf and Rg are small when controlling phosphors based on CRI, questioningthe necessity of identifyingchroma variation and color change.

Effect of Annealing on the Dielectric Properties and Microstructures of Thin Tantalum Oxide Film Deposited with RF Reactive Sputtering

  • Lee, Gyeong-Su;Nam, Kee-Soo;Chun, Chang-Hwan;Kim, Geun-Hong
    • ETRI Journal
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    • v.13 no.2
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    • pp.21-27
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    • 1991
  • Effects of annealing on the dielectric properties and microstructures of thin tantalum oxide film(25nm) deposited on p-type Si substrate with rf reactive magnetron sputtering were investigated. The leakage current density was remarkably reduced from $10^-8$ to $10^-12$ A/$\mum^2$at the electric field of 2MV/cm after rapid thermal annealing(RTA) in $O_2$at $1000^{\circ}C$, while little leakage reduction was observed after furnace annealing in $O_2$ at $500^{\circ}C$. The structural changes of thin tantalum oxide film after annealing were examined using high resolution electron microscope(HREM). The results of HREM show that substantial reduction in the leakage current density after the RTA in $O_2$ can be attributed to crystallization and reoxidation of the thin amorphous tantalum oxide film.

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Electrical Characteristics of Buried Type Inductor for MCM-C

  • Lim, W.;Yoo, C.S.;Cho, H.M.;Lee, W.S.;Kang, N.K.;Park, J.C.
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2000.04a
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    • pp.69-72
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    • 2000
  • 기판과의 동시소성에 의한 고주파 MCM-C(Multi-Chip-Module-Cofired)용 저항을 제작하고 6 GHz 까지의 RF 특성을 측정하였다. 기판은 저온 소성용 기판으로서 총 8층으로 구성하였으며, 7층에 저항체 및 전극을 인쇄하고 Via를 통하여 기판의 최상부까지 연결되도록 하였다 저항체 Pastes, 저항체의 크기, Via의 길이 변화에 따라서 저항의 RF 특성은 고주파일수록 더욱 DC 저항값에서부터 변화되는 양상을 보였다. 내부저항의 등가회로를 구현한 결과, 저항은 전송선로, Capacitance 성분이 혼재되어 있는 것으로 나타났으며 전극의 형태에 따라 Capacitance 성분이 많은 차이를 나타내었다.

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A Varactor-Tuned RF Tunable Bandpass Filter with Constant Bandwidth

  • Kim, Byung-Wook;Yun, Du-Il
    • Journal of electromagnetic engineering and science
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    • v.1 no.2
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    • pp.166-172
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    • 2001
  • A novel RF tunable bandpass filter structure using dielectric resonators and varactor diodes is considered for the optimization to achieve constant bandwidth with minimum passband insertion loss. The coupling between resonators is realized by coupling windows and series lumped L, C elements are used to realize the input/output stage couplings. A 5 poles, 0.01 dB ripple Chebyshev type filter tuned from 800 MHz~900 MHz is designed and presented in this paper. The passband bandwidth for the design is 10 MHz (fractional bandwidth = 1.2 %). Experimental results show that the 3 dB passband bandwidth variation is 12.04 MHz~12.16 MHz (less than 1 %) and passband insertion loss is 15 dB~7 dB depending on the tuning voltages.

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Development of a Client/Server Socket Program using Remote Measurement of Digital Water Meters (상수도 원격 검침 데이터 송수신 위한 Client/Server 소켓 프로그램 개발)

  • Ayurzana, Odgerel;Park, Yong-Man; Kwon, Jong-Won;Kim, Hie-Sik
    • Proceedings of the KIEE Conference
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    • 2006.04a
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    • pp.153-155
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    • 2006
  • An automatic remote water measurement system was developed. This system sends automatic remote measured and collected water meters data automatically from the transmitter with CDMA modem through SK-Telecom network The water meter data are received through LAH TCP/IP and displayed as test file on IE(Internet Explorer) window. The existing water meters of mechanical type have so many problems to measure data. The person must visit the location of each water meters and write down the data records manually. In this system the RF module has attached each water meter Client/Server programs are developed by network socket programming.

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Design of power amplifier and antenna for wireless power transmission (무선전력 송수신을 위한 전력용 증폭기와 송수신 Antenna 설계)

  • Yim, Sang-Wook;Kim, Yong-Sang;Kim, Yang-Mo
    • Proceedings of the KIEE Conference
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    • 2004.04a
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    • pp.247-249
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    • 2004
  • Electric systems can be classified into two classes on the basis of the location of its energy source. One system is to be connected with its outside energy source. Obviously, these electric system is limited of its motion range and impossible to operate in the situation without a way to find an energy source nearby. another is to posses the energy source within it. These electric systems are free of motion range limit while their using is limited by the life of source. These limits can be tided over by using passive-type RF communication. RF-ID is a system that Is possible to interchange electricity and data by Radio Frequency to locate and identify various objects including a man.

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