• 제목/요약/키워드: RF test

검색결과 697건 처리시간 0.026초

N2 분위기에서 RF magnetron sputtering 방법으로 증착된 TiN박막의 열처리 온도에 따른 내마모 특성 및 표면구조특성 분석

  • 장부성;이창현;박창환;김화민
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.166.1-166.1
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    • 2016
  • 각종 부품의 내마모성 및 내식성을 개선하기 위해서 금속물질에 나노두께의 보호막층을 입혀 경도를 높이는 표면처리 기술이 개발되고 있다. TiN막은 기계적 경도, 내마모성 및 내식성이 우수하여 수없이 연구되어 왔으며 박막의 두께에 따라 다양한 색상표현이 가능하다는 연구도 진행되고 있다. 이러한 TiN 박막의 연구결과로 높은 경도와 강도를 요하는 절삭공구에 하드 코팅을 이용하여 높은 절삭력으로 고효율적인 작업환경을 조성할 수 있다. 기존에 연구되어 온 TiN박막은 Ar과 N2의 혼합가스 분위기에서 증착된 반면 본 실험에서는 영구자석을 이용한 고밀도 플라즈마로 높은 점착성과 균일한 박막 및 대면적 공정이 가능한 RF-magnetron sputtering방법을 이용하여 N2 분위기에서 TiN박막을 $100^{\circ}C{\sim}400^{\circ}C$의 온도범위에서 $100^{\circ}C$간격으로 열처리 후 증착하여 비교실험을 하였다. 이와 같이 제작된 TiN박막을 XRD(X-ray Diffraction)를 사용하여 결정성을 확인한 결과 온도가 높을수록 (111)방향의 결정성장이 뚜렷하게 나타났으며 그 외 Scratch Test와 HM-220(Micro-vicker's tester)를 사용하여 경도특성을 확인하고 SEM(Scanning Electron Microscope), AFM(Atomic Force Microscope)를 이용하여 박막의 표면형상을 측정하였다. 이러한 측정 결과로 향후에는 높은 내마모성 및 초경도가 요구되는 절삭공구 및 경질표면코팅이 필요한 금속산업분야에 적용이 가능 할 것이라 사료된다.

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초생추 유래 Salmonella속균의 생물학적 특성 (Studies on Salmonella isolated from chicks)

  • 오강희;최원필
    • 대한수의학회지
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    • 제34권3호
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    • pp.501-510
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    • 1994
  • This paper deals with the distribution, reservoir and mode of spread of infection on 6 hatcheries in Taegu, Kyungpook and 5 broiler farms in Kyungpook during the period from June 1991 to June 1992. Isolated Salmonella were examined for serotypes, biotyping of Salmonella(S) typhimurtum, antibiotic susceptibility and some biochemical characteristics. Forty two Salmonella strains were isolated from 42(2.7% of 1,577 caecal samples of chicks, and their serotypes were S typhimurium 10, S typhimurium var Copenhagen 5, S infantis 4, S thompson 3, and untypable 20. The isolation rate of Salmonella varied from 0 to 5.1% in 6 hatcheries and that of Salmonella from 5 broiler farms was 10. 5%. Biotypes of 10 S typhimurium and 5 S typhimurium var Copenhagen strains isolated from chicks of hatcheries and broiler farms were biotype 2(86.6%), 8(6.7%), and 10a(6.7%), and 26i(6.7%) according to Duguid's scheme. Antibiotic susceptibility test of Salmonella isolated were performed by agar dilution method, using 9 antibiotics as follows: ampicillin(Am), chloramphenicol(Cm), gentamicin(Gm), kanamycin(Km), nalidixic acid(Na), rifampicin(Rf), streptomycin(Sm), sulfadimethoxine(Su), and tetracycline(Tc), All the strains were sensitive to RF. But 8 strans(23.8%) were resistant to one or more drugs and the most common resistance patterns of transferred R plasmids were SmSuGm and SmSu. Among 42 isolates, one had transferable citrate utilizing plasmid. S typhimurium and S typhimurium var copenhagen strains were resistant to killing by 90% normal guinea pig serum.

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플라스틱 기판의 Outgassing이 TCO 박막의 전기적 특성에 미치는 영향 (Out Gassing from Plastic Substrates Affect on the Electrical Properties of TCO Films)

  • 김화민;지승훈
    • 한국전기전자재료학회논문지
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    • 제22권11호
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    • pp.961-968
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    • 2009
  • In this work, transparent conductive oxide(TCO) films such as $In_2O_3-SnO_2$(ITO) and $In_2O_3-ZnO$(IZO) were prepared on polyethylene naphthalene(PEN) and glass substrates by using rf-magnetron sputtering system. The TCO films deposited on PEN substrate show very poor conductivity as compared to that of the TCO films deposited on glass substrates. From the results of the residual gas analysis(RGA) test, this poor stability of plastic substrate is presumed to be caused by the deteriorated adhesion between the TCO films and the plastic substrate due to outgassing from the plastic substrate during deposition of TCO films. From our experiment, it is found that the vaporization of some defects in the plastic substrates deteriorate the adhesion of the TCO films to the plastic substrate, because the most plastic substrates containing the water vapor and/or other adsorbed particles such as organic solvents. Mixing of these gases vaporized in the sputtering process will also affect the electrical property of the deposited TCO films. Inorganic thin composite $(SiO_2)_{40}(ZnO)_{60}$ film as a gas barrier layer is coated on the PEN substrate to protecting the diffusion of vapors from the substrate, so that the TCO films with an improved quality can be obtained.

Ear Canal Insertable Size Wireless Transceiver for Hearing Aid

  • Woo, Sang-Hyo;Mohy-Ud-Din, Zia;Yoon, Young-Ho;Kim, Min-Kyu;Lee, Jyung-Hyun;Kim, Myoung-Nam;Cho, Jin-Ho
    • 대한의용생체공학회:의공학회지
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    • 제31권1호
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    • pp.20-26
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    • 2010
  • The aim of this study was to test the feasibility of a wireless transceiver that can be inserted into the ear canal. The wireless technology could minimize the cosmetic problems of patients, and it can be applied to binaural hearing aids for improving speech perception. In order to implement the ear canal insertable transceiver, simple finite-difference time-domain (FDTD) simulations were carried out to determine the feasibility, and the hardware of the transceiver was implemented within the ear shell. The size of the implemented transceiver was only $7{\times}7mm$, and it could successfully transmit signals to external devices. In order to measure the radiation pattern, a simple RF phantom was used, and the maximum attenuation from the phantom was observed to be 23 dB when the reference antenna was placed at a distance of 2 m from the transmitter.

Fabrication of Metal-insulator-metal Capacitors with SiNx Thin Films Deposited by Plasma-enhanced Chemical Vapor Deposition

  • Wang, Cong;Kim, Nam-Young
    • Transactions on Electrical and Electronic Materials
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    • 제10권5호
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    • pp.147-151
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    • 2009
  • For integrated passive device (IPD) applications, we have successfully developed and characterized metalinsulator-metal (MIM) capacitors with 2000 $\AA$ plasma-enhanced chemical vapor deposition (PECVD) silicon nitride which are deposited with the $SiH_4/NH_3$ gas mixing rate, working pressure, and RF power of PECVD at $250^{\circ}C$. Five PECVD process parameters are designed to lower the refractive index and lower the deposition rate of $Si_3N_4$ films for the high breakdown electric field. For the PECVD process condition of gas mixing rate (0.957), working pressure (0.9 Torr), and RF power (60 W), the atomic force microscopy (AFM) root mean square (RMS) value of about 2000 $\AA$ $Si_3N_4$ on the bottom metal is lowest at 0.862 nm and the breakdown electric field is highest at about 8.0 MV/cm with a capacitance density of 326.5 pF/$mm^2$. A pretreatment of metal electrodes is proposed, which can reduce the peeling of nitride in the harsh test environment of heat, pressure, and humidity.

초음파경혈요법의 진통소염효과 연구 (Analgesic and Anti-inflammatory Effects of Sono-acupoint Therapy)

  • 임사비나;손양선;진수희
    • Journal of Acupuncture Research
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    • 제19권5호
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    • pp.176-188
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    • 2002
  • Objective : Sono-acupoint (SA) therapy is a new therapeutic technique that combined with acupuncture points, herbal medicine and ultrasound therapy. This study was carried out to investigate the analgesic and anti-inflammatory effects of sono-acupoint therapy. Methods : We performed the tail-flick test with normal rats to examine the tail-flick latency (TFL), and the Freund's adjuvant-induced arthritis rat model to examine the edema, skin temperature and serum concentration of c-reactive protein and rheumatoid factor (RF). Herbal SA (HSA) treatment was performed at bilateral Zusanli (ST36) with the hanbang-gel made of several selected herbal drugs in Sprague-Dawley rats (male, $250{\pm}30g$). General SA (GSA) treatment was performed at bilateral Zusanli (ST36) with the gel used in ultrasound therapy. In arthritis rat model, Freund's adjuvant (50mg/ml) was injected in dorsal part of right foot, and these treatments were performed after 15 days. Results : TFL was lengthened after SA treatments. Skin temperature and RF concentration that were the evidence of arthritis in rats were decreased by HSA treatment (P < 0.05). Conclusion : These results indicate that HSA has the analgesic and anti-inflammatory effects in rats, and further developments will produce the advance of this new therapeutic skill.

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Ru/RuO2전극에 성장한 PZT 박막의 특성에 관한 연구 (Properties of PZI Thin film on the Ru/RuO2 Electrode)

  • 강현일;최장현;박영;송준태
    • 한국전기전자재료학회논문지
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    • 제15권10호
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    • pp.865-869
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    • 2002
  • The structural and electrical properties of PZT (lead zirconate titante) thin films grown on Pt (platinum) and Ru/Ru $O_2$(ruthenium/ruthenium oxide) electrodes were investigated. Thin films of PZT were deposited on a variety of electrodes using the rf-magnetron sputtering process. PZT films exhibited polycrystalline structure with strong PZT (100) plane and weak (211) plane for an optimizied Pt electrode and (100), (101), (111), (200), (210), (211) planes for Ru/Ru $O_2$. Switching polarization versus fatigue characteristic of Pt/Ti electrodes showed 20% degradation up to 1 $\times$ 10$_{9}$ cycles. No significant fatigue was observed in the films on Ru/Ru $O_2$ electrodes up to Ix109 test cycles. The results show that the new Ru/Ru $O_2$ bottom electrodes are expected to reduce the degradation of ferroelectric fatigue.

YIG 발진기를 이용한 밀리미터파대역의 PLL 시스템 개발 (Development of Millimeter-Wave band PLL System using YIG Oscillator)

  • 이창훈;김광동;정문희;김효령;한석태
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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    • pp.116-119
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    • 2005
  • In this paper, we propose the PLL system of the local oscillator system for the millimeter wave band's radio astronomy receiving system. The development of the proposed local oscillator system based on the YIG oscillator VCO with 26.5 ${\sim}$ 40GHz specification. This system consists of the oscillator part including the YIG VCO, the harmonic mixer, and the isolator, the RF processing part including the triplexer, limiter, and RF discrimination processor. and the PLL system including YIG modulator and controller. Based on this configuration. we verify the frequency and power stability of the developed local oscillator system according to some temperature variation. From this test results we confirm the stable output frequency and power characteristic performance of the developed La system at constant temperature.

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Diamond-like Carbon의 stainless steel 합성시 전처리 효과 (Effect of pre-treatment for synthesis of diamond-like carbon on stainless steel)

  • 백일호;윤덕용;박용섭;최은창;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.272-272
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    • 2008
  • Diamond-like carbon (DLC) 박막은 높은 경도, 내 마모성, 화학적 안정성, 전기적 절연성, 높은 광 투과성을 가지고 있어, 공구강, 광학렌즈 및 플라스틱의 보호 코팅을 위해 응용되어진다. 하지만, DLC 박막은 높은 잔류응력으로 adhesion이 떨어진다는 단점이 있다. 따라서 본 연구에서는 전처리가 13.56MHz 150W RF플라즈마 화학기상 증착(RF-PECVD) 법을 통한 DLC 박막의 합성에 어떤 영향을 미치는지 알아보기 위해, $H_2$ (80 sccm), $O_2$ (10 sccm), $N_2$ (20 sccm)의 다른 가스를 사용하여 전처리를 하였다. DLC 박막 합성 후, 특성은 Raman, scratch test, contact angle 등의 측정을 통하여 분석되었다.

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3D-QSAR Studies of 2-Arylbenzoxazoles as Novel Cholesteryl Ester Transfer Protein Inhibitors

  • Ghasemi, Jahan B.;Pirhadi, Somayeh;Ayati, Mahnaz
    • Bulletin of the Korean Chemical Society
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    • 제32권2호
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    • pp.645-650
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    • 2011
  • The 3D-QSAR study of 2-arylbenzoxazoles as novel cholesteryl ester transfer protein inhibitors was performed by comparative molecular field analysis (CoMFA), CoMFA region focusing (CoMFA-RF) for optimizing the region for the final PLS analysis, and comparative molecular similarity indices analysis (CoMSIA) methods to determine the factors required for the activity of these compounds. The best orientation was searched by all-orientation search strategy using AOS, to minimize the effect of the initial orientation of the structures. The predictive ability of CoMFARF and CoMSIA were determined using a test set of twelve compounds giving predictive correlation coefficients of 0.886, and 0.754 respectively indicating good predictive power. Further, the robustness and sensitivity to chance correlation of the models were verified by bootstrapping and progressive scrambling analyses respectively. Based upon the information derived from CoMFA(RF) and CoMSIA, identified some key features that may be used to design new inhibitors for cholesteryl ester transfer protein.