• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.361.1-361.1
• /
• 2016

Due to their high sensitivity, fast response, small energy consumption and ease of integration, nanoelectromechanical systems (NEMS) have attracted much interest in various applications such as high speed memory devices, energy harvesting devices, frequency tunable RF receivers, and ultra sensitive mass sensors. Since the device performance of NEMS is closely related with the mechanical and flexural properties of the material in NEMS, analysis of the mechanical and flexural properties such as intrinsic tensile stress and Young's modulus is a crucial factor for designing the NEMS structures. In the present work, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams are investigated as a function of the beam length using two different techniques: (i) dynamic flexural measurement using optical interferometry and (ii) quasi-static flexural measurement using atomic force microscopy. The reliability of the results is analysed by comparing the results from the two different measurement techniques. In addition, the mass density, Young's modulus and internal stress of the SiN beams are estimated by combining the techniques, and the prospect of SiN based NEMS for application in high sensitive mass sensors is discussed.

• Korean Journal of Optics and Photonics
• /
• v.20 no.2
• /
• pp.71-75
• /
• 2009

A compact electric field probe sensor incorporating two different electro-optic materials of $LiNbO_3$ and GaAs was proposed and fabricated, and it was used to measure the strength of the horizontal and vertical fields generated by a microstrip ring-resonator filter. The sensitivities of the sensors in $LiNbO_3$ and GaAs were $9.315{\mu}V/\sqrt{Hz}$ and ${\sim}49.346{\mu}V/\sqrt{Hz}$ respectively, and their signal to noise ratios were approximately ${\sim}50\;dB$ and ${\sim}40\;dB$ respectively. And the operating frequency range was up to ${\sim}1.2\;GHz$. The electric field profile for the test circuit was scanned and found to be in good agreement with that obtained by using the HFSS simulation.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.105-105
• /
• 2000

현재 급격히발전하는 이동통신기술로 미루어 보아 앞으로는 모든 정보통신이 무선통신으로 이루어질 것이다. 그런데 무선통신은 이동성과 대용량의 정보전송에 초점을 맞추어 발전하고 있다. 많은 정보량을 전달하기 위해서 현재 사용되는 주파수 대역보다 고주파의 전파가 사용되어야 한다. 또한 이동성을 향상시키기 위해서는 통신기기의 소형화를 이루어야 하고 그러기 위해서 궁극적으로 모든 소자를 하나의 칩(chip)으로 집적화하는 것이 필요하다. 따라서 벌크상태로 사용되고 있는 유전체 공진기를 소형화, 즉 박막화해야만 한다. 결국 유전체 박막의 마이크로파 대역에서의 유전특성을 연구하고 그 특성을 향상시켜야만 한다. 통신기기에서 사용되는 유전체 공진기는 소형화를 위해 높은 유전율과 낮은 유전손실(tan$\delta$), 즉 높은 품질계수 (Q)를 가져야 한다. 마이크로파 대역에서 사용되고 있는 유전체 중에서 TiO2는 벌크 상태의 rutile 상에서 100정도의 높은 유전율과, 4 GHz에서 10,000 정도의 높은 품질계수를 나타낸다고 보고되어 있다. 따라서 본 연궁서는 TiO2 박막의 마이크로파 유전특성을 연구하였고 anatase 박막의 유전특성도 측정하였다. TiO2 박막을 RF magnetron reactive sputtering 방법으로 Ar (15 sccm)과 O2 (1.5 sccm) 기체를 사용하여 상온에서 증착하였다. 4mTorr의 증착압력에서 안정한 rutile 박막을 얻었고, 15 mTorrdo서 준안정한 anatase 박막을 얻을 수 있었다. 그리고 그 중간의 압력에서 두 상이 혼합된 박막이 증착되었다. 위와 같은 방법으로 형성한 TiO2 박막의 마이크로파 유전특성을 측정하기 위해 마이크로스트립 링공진기 (microstrip ring resonator)를 제작하였다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
• /
• 2022.11a
• /
• pp.113-114
• /
• 2022

This study demonstrates the performance of flexible surface wave resonators in spaces on a ship to overcome environmental limits like non-metallic walls where conventional surface wave resonators cannot installable. Although test results in plane structures show that the performance of conventional surface wave resonators are better than the flexible ones, the results are reversed in curved structures. Flexible surface wave resonators can be installed on metal-pipes that connects all spaces in a ship, and this will allow to build ultimate communication network all over the ship including the rooms like cabins or bridges that are enclosed in non-metallic walls.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.18 no.2 s.117
• /
• pp.126-135
• /
• 2007

This paper proposes a new miniaturization method for a parallel coupled line filter with enhanced bandwidth characteristics. A previous method incorporated several advantages, such as size reduction through the use of only a small number of capacitors, in addition to grounding, suppression of harmonic characteristics, and improved skirt characteristics for the parallel coupled line filter, which is conventional in the field of RE filters due to its design and fabrication simplicity. However, the previous method also has disadvantages related to the bandwidth shrinkage of the miniaturized filters. In this paper, the amount of bandwidth shrinkage is analyzed in terms of the relationship between the loaded Q(quality factor) and the group delay of a resonator. Moreover, the reduction in the bandwidth is solved by a design with new design equations. To show the validity of the proposed method, a hairpin filter with a center frequency of 5.2 GHz and an fractional bandwidth(FBW) of 10% was scaled down to half its original dimension by the proposed method with the enhanced bandwidth characteristics. The measured result shows a high level of agreement with theoretical results.