• Journal of Advanced Navigation Technology
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• v.20 no.6
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• pp.556-561
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• 2016

This paper describes implementation of a 13.56 MHz, 5 kW RF high power generator for ISM band applications. This RF generator consists of four LDMOS modules of 1.25kW class-AB push-pull power amplifier with drive amplifier and its outputs are combined by using Wilkinson type transmission-line transformers. Its generator has a high efficiency and output power better than linearity. In order to discharge power transistor heats, we used on water cooled copper plate. Also, these have a composite circuit of combiner and low-pass filter and safety circuit to detector over and reflected power. The RF generator has achieved a efficiency of 79 % at 5.33 kW of saturated power level experimentally.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.15 no.5
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• pp.175-181
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• 2005

Ingots of rutile single crystals were grown by the skull melting method, and their characteristics were compared in terms of melt-dwelling time for each melt. The method is based on direct inductive heating of an electrically conducted melt by an alternating RF field, and the heating is performed by absorption of RF energy. $TiO_2$ is an insulator at room temperature but its electric conductivity increases elevated temperature. Therefore, titanium metal ring(outside diameter : 6cm, inside diameter : 4cm, thickness 0.2cm) was embedded into $TiO_2$, powder (anatase phase, CERAC, 3N) for initial RF induction heating. Important factors of the skull melting method are electric resistivity of materials at their melting point, working frequency of RF generator and cold crucible size. In this study, electric resitivity of $TiO_2$, $(10^{-2}\~10^{-1}\;{\Omega}{\cdot}m)$ at its melting point was estimated by compairing the electric resitivities of alumina and zirconia. Inner diameter and height of the cold crucible was 11 and 14cm, respectively, which were determined by considering of the Penetration depth $(0.36\~1.13cm)$ and the frequency of RF generator.

• Proceedings of the KIPE Conference
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• 2014.07a
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• pp.95-96
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• 2014

450mm 반도체 CVD 장비 개발 및 300mm F-CVD (Flowable CVD) 공정 개발에 있어서 공정 마진 확보 및 막질 품질 개선을 위해 주파수 가변형 RF Generator가 필수적으로 요구되고 있다. 20nm이하 STI (Shallow Trench Isolation), PMD (Pre-metal Dielectric) & IMD (Inter-Metal Dielectric) 미세공정 gap fill에 많은 문제점이 도출되고 있으며, 이유로는 Generator 고정 주파수에서 Matching Time delay 또는 Shooting에 의한 산포의 한계로 파악되었으며, 주파수 가변에 의한 고속 Tune 기능이 요구되어진다. 따라서 400kHz 주파수 가변형 RF-Generator 개발을 진행하였으며 본 논문을 통해 개발되어진 장비의 성능과 시험 평가한 결과를 소개하고자 한다.

• Journal of Satellite, Information and Communications
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• v.8 no.2
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• pp.88-93
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• 2013

The wideband chirp signal generator to enhance the resolution of synthetic aperture radar of obtaining the earth observation image is needed. This paper deals with designing, manufacturing and testing the wideband digital chirp signal generator having high resolution for LEO earth observation satellite. The wideband digital chirp signal generator is implemented with the memory-map based structure which is mostly applied in the satellite, and consists of the digital module to generate the digital chirp signal and the RF module to perform the quadrature modulation. The I/Q signals stored in the memory of the digital module are D/A converted and delivered to be quadrature modulated with the reference signal of 1275 MHz in the RF module. Furthermore, the test bench and GUI to validate the signal generator function are also developed. It is found that the requirement of 144 MHz bandwidth for the digital chirp signal generator is well met. Finally it is noteworthy that the distortion occurred in the chirp signal generator was compensated by the pre-distortion compensation.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.12
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• pp.1205-1214
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• 2013

Recently spaceborne SAR systems are increasing image resolution and frequency. As a high quality image resolution, the wider bandwidth is required and a wideband signal generator with RF component is very complicated and RF impairments of device is increased. Therefore, it is very important to improve performance by reducing these errors. In this study, the transmission signal of the wideband signal generator is applied to the phase noise, IQ imbalance, ripple gain, nonlinear model of high power amplifier. And we define possible structures of wideband signal generator and measure the PSLR and ISLR for the performance assesment. Also, we extract error of the amplitude and phase from the waveform and use a quadratic polynomial curve fitting and examine the performance change due to nonlinear device. Finally, we apply a high power amplifier predistortion method for non-linear error compensation. And we confirm that distortion in the output of the amplifier by intermodulation component is decreased by 15 dB.

• Journal of the Semiconductor & Display Technology
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• v.15 no.2
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• pp.6-10
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• 2016

In RF plasma processing, when the plasma is generated, there is the difference of impedance between RF generator and plasma source. Its difference is normally reduced by using the matcher and the RF power is transferred efficiently from the power generator to the plasma source. The generated plasma has source impedance that it can be changed during processing by pressure, frequency, density and so on. If the range of source impedance excesses the matching range of the matcher, it cannot match all value of the impedance. In this research, we studied the elevation mechanism of the RF power delivery efficiency between RF generator to the plasma source by using the transmission line and impedance tuning of the plasma source. We focus on two plasma sources (capacitive coupled plasma (CCP), inductive coupled plasma (ICP)) which is most widely used in industry recently.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.41 no.2
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• pp.65-70
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• 2004

This paper presents a novel linearization scheme for a nonlinear RF amplifier It is based on the amplitude modulation with envelope signal. The 3rd order distortion generator is composed of two FETs and it adopts a balanced structure for the purpose of main carrier cancellation. The amplitude and phase of the IM3 component can be controlled at RF band. This predistorter is implemented and tested at the KOREA PCS Tx. band (1840∼1870MHz). Experimental results of two-tone test show that the IM3 cancellation is achieved about 30-40 ㏈ for the wide dynamic range. The adjacent channel power ratio is improved by over 10 ㏈ at the broad-band CDMA signal with a peak to average power ratio of l0㏈, and this improvement is maintained through a wide range of output power levels.

• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.371-378
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• 1996

An RF inductively coupled plasma (ICP) torch has been developed as a typical thermal plasma generator and reactor. It has been applied to various materials processings such as plasma flash evaporation, thermal plasma CVD, plasma spraying, and plasma waste disposal. The RF ICP reactor has been generally operated under one atmospheric pressure. Lately the characteristics of low pressure RF ICP is attracting a great deal of attention in the field of plasma application. In our researches of RF plasma applications, low pressure RF ICP is mainly used. In many cases, the plasma generated by the ICP torch under low pressure seems to be rather capacitive, but high density ICP can be easily generated by our RF plasma torch with 3 turns coil and a suitable maching circuiit, using 13.56 MHz RF generator. Plasma surface modification (surface hardening by plasma nitriding and plasma carbo-nitriding), plasma synthesis of AIN, and plasma CVD of BN, B-C-N compound and diamond were practiced by using low pressure RF plasma, and the effects of negative and positive bias voltage impression to the substrate on surface modification and CVD were investigated in details. Only a part of the interesting results obtained is reported in this paper.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.507-511
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• 2010

Digital Radio Frequency Memory (below, DRFM) performs RF signal data store, delay and re-transmission. DRFM is wildly used as core module of Jammer, EW simulator, Target Echo Generator etc. This paper suggests a hardware design of DRFM which is composed RF section(RF Input/Output Module, Local Oscillator Module) and Digital section(ADC module, memory, DAC module), and confirm the validity of the propose by the test result.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.16 no.10
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• pp.2163-2170
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• 2012

A signal receiving system can measure and analyze frequency, pulse modulation, scan modulation, frequency modulation on pulse, phase modulation on pulse of RF signal. A signal receiving system should be verified under simulated RF signal environment prior to verification on operation in fields. This paper describes an effective method to generate simulated RF signals with considering operational scenario. The simulated RF signal generator can be effectively used to evaluate the performance of the signal receiver and reduce the test cost of the signal receiver.