• Title/Summary/Keyword: RF 센서

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Properties of ITO thin films fabricated by R.F magnetron sputtering (R.F. magnetron sputtering 법으로 제작한 ITO 박막의 특성)

  • Jeong, W.J.;Park, G.C.;Yoo, Y.T.
    • Journal of Sensor Science and Technology
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    • v.4 no.2
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    • pp.51-57
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    • 1995
  • Indium Tin Oxide (ITO) thin films have been fabricated by the rf magnetron sputtering technique with a target of a mixture $In_{2}O_{3}$ (90mol%) and $SnO_{2}$ (10mol%). We prepared ITO thin films with substrate temperature 100, 200, 300, 400, $500^{\circ}C$ and post-annealing temperature 300, 400, $500^{\circ}C$. And we analyzed X -ray diffraction patterns, electrical properties, transmission spectra and SEM photographs. As a result, the crystallinity, electrical conductivity and transmittance of ITO thin films were improved with increasing substrate temperature. But, as increasing post-annealing temperature in air, conductivity of the film was decreased. When the ITO thin film was fabricated with substrate temperature of $500^{\circ}C$ and thickness of $3000{\AA}$, its resistivity and transmittance were about $2{\times}10^{-4}{\Omega}cm$ and 85% or more, respectively.

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A Development of The Remote Robot Control System with Virtual Reality Interface System (가상현실과 결합된 로봇제어 시스템의 구현방법)

  • 김우경;김훈표;현웅근
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.10a
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    • pp.320-324
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    • 2003
  • Recently, Virtual reality parts is applied in various fields of industry. In this paper we got under control motion of reality robot from interface manipulation in the virtual world. This paper created virtual robot using of 3D Graphic Tool. And we reappeared a similar image with reality robot put on texture the use of components of Direct 3D Graphic. Also a reality robot and a virtual robot is controlled by joystick. The developed robot consists of robot controller with vision system and host PC program. The robot and camera can move with 2 degree of freedom by independent remote controlling a user friendly designed joystick. An environment is recognized by the vision system and ultra sonic sensors. The visual mage and command data translated through 900MHz and 447MHz RF controller, respectively. If user send robot control command the use of simulator to control the reality robot, the transmitter/recever got under control until 500miter outdoor at the rate of 4800bps a second in Hlaf Duplex method via radio frequency module useing 447MHz frequency.

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Electrical and Optical Properties of Asymmetric Dielectric/Metal/Dielectric (D/M/D) Multilayer Electrode Prepared by Radio-Frequency Sputtering for Solar Cells

  • Pandey, Rina;Lim, Ju Won;Lim, Keun Yong;Hwang, Do Kyung;Choi, Won Kook
    • Journal of Sensor Science and Technology
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    • v.24 no.1
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    • pp.15-21
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    • 2015
  • Transparent and conductive multilayer thin films consisting of three alternating layers FZTO/Ag/$WO_3$ have been fabricated by radio-frequency (RF) sputtering for the applications as transparent conducting oxides and the structural and optical properties of the resulting films were carefully studied. The single layer fluorine doped zinc tin oxide (FZTO) and tungsten oxide ($WO_3$) films grown at room temperature are found to have an amorphous structure. Multilayer structured electrode with a few nm Ag layer embedded in FZTO/Ag/$WO_3$ (FAW) was fabricated and showed the optical transmittance of 87.60 % in the visible range (${\lambda}=380{\sim}770nm$), quite low electrical resistivity of ${\sim}10^{-5}{\Omega}cm$ and the corresponding figure of merit ($T^{10}/R_s$) is equivalent to $3.0{\times}10^{-2}{\Omega}^{-1}$. The resultant power conversion efficiency of 2.50% of the multilayer based OPV is lower than that of the reference commercial ITO. Asymmetric D/M/D multilayer is a promising transparent conducting electrode material due to its low resistivity, high transmittance, low temperature deposition and low cost components.

Implementation of IEEE 802.15.4a Software Stack for Ranging Accuracy Based on SDS-TWR (SDS-TWR 기반의 거리측정 정확도를 위한 IEEE 802.15.4a 소프트웨어 스택 구현)

  • Yoo, Joonhyuk;Kim, Hiecheol
    • Journal of Korea Society of Industrial Information Systems
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    • v.18 no.6
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    • pp.17-24
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    • 2013
  • The localization accuracy in wireless sensor networks using ranging-based localization algorithms is greatly influenced by the ranging accuracy. Software implementation of HAL(Hardware Abstraction Layer) and MAC(Medium Access Layer) should seamlessly deliver the raw performance of ranging-based localization provided by hardware capability fully to the applications without degrading the raw performance. This paper presents the design and implementation of the software stack for IEEE 802.15.4a which supports normal ranging mode of the Nanotron's NA5TR1 RF chip. The experiment results shows that average ranging error rate with our implementation is 24.5% for the normal mode of the SDS-TWR ranging scheme.

The characteristics of $(Ba_{0.5},Sr_{0.5})TiO_3$ thin films deposited on ITO glass for TFELD insulating layer (TFELD 절연층을 위해 ITO glass위에 증착시킨 $(Ba_{0.5},Sr_{0.5})TiO_3$ 박막의 특성)

  • Kim, Jeong-Hwan;Bae, Seung-Choon;Park, Sung-Kun;Kwon, Sung-Ryul;Choi, Byung-Jin;Nam, Gi-Hong;Kim, Ki-Wan
    • Journal of Sensor Science and Technology
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    • v.9 no.1
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    • pp.83-89
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    • 2000
  • BST thin films were deposited on the ITO coated glass for using TFELD insulating layer by rf magnetron sputtering method. $O_2/(Ar+O_2)$ mixing ratio was 10%, substrate temperature was changed from R.T. to $500^{\circ}C$, and working pressure was changed from 5 mTorr to 30 mTorr. BST thin films deposited with various conditions were investigated electrical, optical, structural properties, and stoichiometry. The result of investigation was achieved good fabrication condition that substrate temperature of $400^{\circ}C$, and working pressure of 30 mTorr. Relative dielectric constant of 254 at 1 kHz, leakage current density was below $3.3{\times}10^{-7\;}A/cm^2$ at 5\;MV/cm applied electric field, and transmittance was over 82% at visible range.

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Gas sensing properties of $LaFeO_3$ thin films fabricated by RF magnetron sputtering method (RF Magnetron Sputtering 법으로 제조된 $LaFeO_3$ 박막의 가스감지 특성)

  • Jang, Jae-Young;Ma, Dae-Young;Park, Ki-Cheol;Kim, Jeong-Gyoo
    • Journal of Sensor Science and Technology
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    • v.9 no.5
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    • pp.357-364
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    • 2000
  • The structural, electrical and gas sensing characteristics of $LaFeO_3$ thin films fabricated by r.f. magnetron sputtering method on $Al_2O_3$ substrates were investigated. (121) domonant crystalline plane was observed for the films heat-treated at above $600^{\circ}C$ and gas sensing properties showed p-type semiconductor behaviors. Gas sensing characteristics of the $LaFeO_3$ thin films was studied as a function of film thicknesses and heat treatment temperatures. While the variation of the film thickness showed a little effect on the sensitivity, the heat treatment temperature was critical to the sensitivity. The thin films with thickness of 400 nm heat-treated at $800^{\circ}C$ showed the sensitivity of 400% for 5000ppm CO and 60% for 350ppm $NH_3$ at the working temperature of $300^{\circ}C$.

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Pressure Sensing Properties of AlN Thin Films Sputtered at Room Temperature

  • Seok, Hye-Won;Kim, Sei-Ki;Kang, Yang-Koo;Lee, Youn-Jin;Hong, Yeon-Woo;Ju, Byeong-Kwon
    • Journal of Sensor Science and Technology
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    • v.23 no.2
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    • pp.94-98
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    • 2014
  • Aluminum nitride (AlN) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 25~75% $N_2$ /Ar. The characterization of film properties were performed using surface profiler, X-ray diffraction, X-ray photoelectron spectroscopy(XPS), and pressure-voltage measurement system. The deposition rates of AlN films were decreased with increasing the $N_2$ concentration owing to lower mass of nitrogen ions than Ar. The as-deposited AlN films showed crystalline phase, and with increasing the $N_2$ concentration, the peak of AlN(100) plane and the crystallinity became weak. Any change in the preferential orientation of the as-deposited AlN films was not observed within our $N_2$ concentration range. But in the case of 50% $N_2$ /Ar condition, the peak of (002) plane, which is determinant in pressure sensing properties, appeared. XPS depth profiling of AlN/TiN/SUS430 revealed Al/N ratio was close to stoichiometric value (45:47) when deposited under 50% $N_2/Ar$ atmosphere at room temperature. The output signal voltage of AlN sensor showed a linear behavior between 26~85 mV, and the pressure-sensing sensitivity was calculated as 7 mV/MPa.

Humidity Sensor Using Microstrip Patch Antenna (마이크로스트립 패치 안테나를 이용한 습도 센서)

  • Junho Yeo
    • Journal of Advanced Navigation Technology
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    • v.27 no.1
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    • pp.71-76
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    • 2023
  • In this paper, a humidity sensor using a microstrip patch antenna(MPA) and polyvinyl alcohol(PVA) is studied. PVA is a polymer material whose permittivity changes with humidity, and a rectangular slot is added to the radiating edge of the MPA, which is sensitive to changes in electric field, in order to increase the sensitivity to changes in relative permittivity. After thinly coating the area around the radiating edge with the rectangular slot of the MPA fabricated on a 0.76 mm-thick RF-35 substrate with PVA, the changes in the resonant frequency and magnitude of the MPA's input reflection coefficient are measured when relative humidity is adjusted from 40% to 80% in 10% increments at a temperature of 25 degrees using a temperature and humidity chamber. Experiment results show that when the relative humidity increases from 40% to 80%, the resonance frequency of the antenna' input reflection coefficient decreases from 2.447 GHz to 2.418 GHz, whereas the magnitude increases from -7.112 dB to -3.428 dB.

433 MHz Radio Frequency and 2G based Smart Irrigation Monitoring System (433 MHz 무선주파수와 2G 통신 기반의 스마트 관개 모니터링 시스템)

  • Manongi, Frank Andrew;Ahn, Sung-Hoon
    • Journal of Appropriate Technology
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    • v.6 no.2
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    • pp.136-145
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    • 2020
  • Agriculture is the backbone of the economy of most developing countries. In these countries, agriculture or farming is mostly done manually with little integration of machinery, intelligent systems and data monitoring. Irrigation is an essential process that directly influences crop production. The fluctuating amount of rainfall per year has led to the adoption of irrigation systems in most farms. The absence of smart sensors, monitoring methods and control, has led to low harvests and draining water sources. In this research paper, we introduce a 433 MHz Radio Frequency and 2G based Smart Irrigation Meter System and a water prepayment system for rural areas of Tanzania with no reliable internet coverage. Specifically, Ngurudoto area in Arusha region where it will be used as a case study for data collection. The proposed system is hybrid, comprising of both weather data (evapotranspiration) and soil moisture data. The architecture of the system has on-site weather measurement controllers, soil moisture sensors buried on the ground, water flow sensors, a solenoid valve, and a prepayment system. To achieve high precision in linear and nonlinear regression and to improve classification and prediction, this work cascades a Dynamic Regression Algorithm and Naïve Bayes algorithm.

The Fabrication and Characteristics of RTD(Resistance Thermometer Device) for Micro Thermal Sensors (마이크로 열 센서용 측온저항체 온도센서의 제작 및 특성)

  • Chung, Gwiy-Sang;Hong, Seog-Woo
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.171-176
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    • 2000
  • The physical and electrical characteristics of MgO and Pt thin-films on it, deposited by reactive sputtering and rf magnetron sputtering, respectively, were analyzed with annealing temperature and time by four-point probe, SEM and XRD. Under annealing conditions of $1000^{\circ}C$ and 2 hr, MgO thin-film had the properties of improving Pt adhesion to $SiO_2$ and insulation without chemical reaction to Pt thin-film, and the sheet resistivity and the resistivity of Pt thin-film deposited on it were $0.1288\;{\Omega}/{\square}$ and $12.88\;{\mu}{\Omega}{\cdot}cm$, respectively. We made Pt resistance pattern on $SiO_2$/Si substrate by lift-off method and fabricated thin-film type Pt-RTD(resistance thermometer device) for micro thermal sensors by Pt-wire, Pt-paste and SOG(spin-on-glass). In the temperature range of $25{\sim}400^{\circ}C$, the TCR value of fabricated Pt-RTD with thickness of $1.0{\mu}m$ was $3927\;ppm/^{\circ}C$ close to the Pt bulk value. Resistance values were varied linearly within the range of measurement temperature.

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