Slip Formation of 300mm Polished and Epitaxial Silicon Wafer Annealed by Rapid Thermal Annealing (Rapid thermal Annealing에 의한 300mm Polished 및 Epitaxial 실리콘 웨이퍼의 슬립 형성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2001.11a
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- pp.155-155
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- 2001