• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 전자공학회논문지
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• 제52권3호
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• pp.199-205
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• 2015

본 연구는 이온수기의 필터에 관련된 것으로 요즘 건강에 많은 관심을 가지고 있는 물은 그 종류도 매우 다양하다. 그 중에서 이온 수기는 의료기기로 분류되어 식약청에서 승인을 거친 후 제조할 수 있고, 기능을 가지고 있는 물을 만드는 시스템이다. 이온 수기는 기본적으로 저장되고 포장된 물이 아니며 이온 수기는 수도나 지하수에 직접 연결되어 여러 가지 필터를 통해 깨끗하게 정수된 pH7~7.5의 중성수를 격막을 이용하여 전기 분해하면 물속에 있는 음이온과 양이온을 격막을 통해서 -전극 쪽에는 칼슘($Ca^+$), 칼륨($K^+$), 마그네슘($Mg^+$), 나트륨($Na^+$)을 포함한 물로 인체에 유익한 미네랄이 포함된 알칼리이온수를 얻을 수 있다. 일반적으로 이온수기에서 전기분해의 전압의 크기를 조절하여 Ph농도를 5~9까지 변화를 주어 사용한다. 통상1단(pH8), 2단(pH8.5), 3단(pH9), 4단(pH9.5)으로 알칼리 이온 수에 사용되고 -1단(pH6.0), -2단(pH5.0)의 산성이온수로 사용하고 있다. 그런데 초기 필터의 상태를 확인해 보면 직수에서 필터를 통과한 정수상태에서 물은 약알칼리로 출수된다는 것이 큰 문제이다. 따라서 초기에 설정된 이온수의 pH값은 필터가 안정화된 후 값은 전혀 틀린 값이 나온다는 것을 확인하였다. 즉 초기에 설정된 이온수기의 pH 값은 사용 중 크게 변화하여 참값이 될 수 없음을 규명하였다. 이 문제를 해결하기 위해서는 필터를 일정시간 통수 세척을 해서 사용하거나 필터의 초기 산성화 처리를 해서 중성화하여야 할 것으로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2 \; (PN_2)$ gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and $PN_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 한국세라믹학회지
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• 제51권4호
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• pp.332-336
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• 2014

A non-electric water purification system using the Korean traditional ceramic ware Onggi, was demonstrated as an appropriate technology to solve water shortages in under developed regions. Generally, Onggi is produced using large size raw materials that are sintered at low temperature, resulting in a porous body that shows air and water permeability. An Onggi filter was prepared using a spinning wheel with the addition of rice bran to the body to increase porosity. The porosity of the obtained Onggi filter was 25.1%; the water permeability was 85.1 $L/m^2h$. Turbidity and TDS of the purified water using Onggi filter were decreased by 97.7% and 29.1%, respectively.

• 환경위생공학
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• 제23권2호
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• pp.55-63
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• 2008

All over the world, the existing process of water purification needs more flocculants and chlorine due to a gradual decline in the quality of source water. Therefore, the problem of the remaining aluminium and DBPs in purified water is on the rise. To solve this problem, the process of membrane filter has recently come into the spotight. This study reaches the following conclusions concerning TMP variation in order to solve the dropping of flux throgh a membrane filter when operating a membrane filter system in the process of water purification. 1. In case that a cohesion-precipitation process was introduced to pre-treatment of a membrane filter, initial TMP was very satisfactory(0.27kg/cm) in producing the constantly safe quality of water, $0.04{\sim}0.1$(mean 0.05) NTU by pouring 2mg/l of PACI(10% $Al_2O_3$) used for the existing process of water purification in high-density turbidity at a dry or flood season and at occurrence of high algae. 2. As flux increased at 0.5m/day.m, TMP increased 0.05 kgf/cm. 3. As filtering, operation mode of PVDF MF membrane filtering was 48 minutes and 1 cycle of back washing was 42 minutes, flux was increased 1.5m/day.m and TMP increased $0.25{\sim}0.27kgf/cm$. Without back washing, TMP increased 0.03 kgf/cm per a cycle.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권5호
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• pp.191-195
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• 2002

Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 한국축산시설환경학회지
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• 제1권1호
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• pp.77-82
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• 1995

In order to investigate the purification effects of livestock waste water, Modified Activated-Sludge Process(MASP) containing marine silica and volcanic ash-rock as the contact media and Sawdust-Soil Filter Method were used. The results obtained are as follows: 1. MASP which treated two metric tons' livestock waste water a day decreased BOD by 97.5% from 4,400.0mg/I to 108.8mg/I and SS by 98.0% from 5,335.0mg/I to 111.0mg/I. 2. MASP decreased BOD by 93.9% from 2,549.1mg/I to 156.6mg/I and SS by 96.3% from 3,521.9mg/I to 132.0mg/I when ten metric ton's livestock waste water was treated a day. 3. BOD and SS were decreased by 83.4% from 45.1mg/I to 7.5mg/I and by 83.4% from 47.5mg/I to 7.9mg/I when the supernatant layer treated by MASP was purified by Sawdust-Soil Filter Method.

• 멤브레인
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• 제25권6호
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• pp.503-514
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• 2015

본 연구는 잔류함으로써 문제를 일으킬 수 있는 응집제를 사용하지 않고 물리적인 처리만을 사용하는 막여과 정수처리의 전처리로 F/A 공정을 구성하고자 하였고 이를 구성하는 여재의 성능을 연구하였다. 특히, 탁질 물질과 유기물 제거가 가능한 것으로 알려진 Filtralite의 도입 가능성을 검토하였다. Filtralite의 탁도 제거효율은 원수대비 83~84%로 여과사와 비슷한 결과 값을 나타내었으며 여재표면에 잘 발달된 공극 때문에 유기물 제거능은 여과사보다 50% 더 높게 나타났다. 따라서 F/A 공정을 구성함에 있어 여과사보다 Filtralite가 더 효율적이라 검토되었다. 활성탄과 연계한 F/A 공정을 구성하여 막여과 처리 시스템의 전처리효율을 실험한 결과, TOC 농도는 TMP의 증가에 큰 영향을 주는 것으로 판단되어 막오염 저감에 유기물 제어가 중요함을 확인하였으며 유기물 제거 효율이 뛰어난 여재 사용이 필요할 것으로 판단되었다.

• 한국환경과학회지
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• 제15권1호
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• pp.21-31
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• 2006

Aquatic plants grow in water with photosynthesis and purify water quality as taking organic and inorganic matter in water. Polluted water in stagnant stream channel where nutritive salts load is great can be purified by activities of aquatic plants. Aquatic plants should be fixed to bed easily to plant and sustainable environment is needed. So in this study, Mattress/Filter system is suggested to plant aquatic plant in stagnant stream channel. In the result of study, coverage of Phragmites australis, Zizania latifolia and Typha angustifolia which planted in mattress was $78\%,\;62\%\;and\;82\%$ and numbers of species in each mattress system were 7, 11, 3. The evenness index of each mattress system was 0.86, 0.91 and 0.79 and diversity index of each mattress system was 1.67. 2.18 and 0.87. Removal rates of phosphorus at Phragmites australis, Zizania latifolia and Typha angustifolia which planted in mattress were $68.7\%,\;62.7\%,\;55.3\%$ and removal rates of nitrogen of them were $79.8\%,\;74.7\%,\;64.9\%$. The removal rate of nitrogen was greater than phosphorus at all system and both removal rates were greater at Phragmites australis than at Zirania latifolia and at Typha angustifolia the rate was the least. Removal rates of $PO_4^{-3},\;NH_4-N,\;NO_{3-}N$ at Phragmites australis were $57.4\%,\;52.8\%,\;47.8\%$ and at Zizania latifolia were $82.6\%,\;77.2\%,\;67.5\%$ and at Typha angustifolia were $80.6\%,\;73.7\%,\;64.3\%$. It seems that removal effect is great by the planted mattress system.

• 한국재난관리표준학회지
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• 제3권2호
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• pp.47-55
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• 2010

재난 재해 발생시 즉각적인 식수 공급이 어려운 점과 재난을 대비한 생수비축의 문제점을 해결하기 위하여 현장에서 비상시 식수생산이 가능한 휴대용 정수시스템을 개발하였다. 정수시스템은 필터, 펌프, 태양전지, 충전 컨트롤러, 케이스 등으로 구성되었으며, 휴대성과 무전원 상태에서도 작동이 가능하도록 비상용 배터리와 태양전지를 갖추어 시간과 장소에 제한없이 현장에서 식수공급이 이루어지도록 하였다. 개발된 휴대용 정수시스템은 현장 성능측정 실험을 수행하였으며 실험결과 정수된 물은 먹는 물 기준을 충족하였다.