• Title/Summary/Keyword: Purge Process

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Effects on the Al2O3 Thin Film by the Ar Pulse Time in the Atomic Layer Deposition (원자층 증착에 있어서 아르곤 펄스 시간이 Al2O3 박막에 미치는 효과)

  • Kim, Ki Rak;Cho, Eou Sik;Kwon, Sang Jik
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.4
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    • pp.157-160
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    • 2021
  • As an insulator for a thin film transistor(TFT) and an encapsulation material of organic light emitting diode(OLED), aluminum oxide (Al2O3) has been widely studied using several technologies. Especially, in spite of low deposition rate, atomic layer deposition (ALD) has been used as a process method of Al2O3 because of its low process temperature and self-limiting reaction. In the Al2O3 deposition by ALD method, Ar Purge had some crucial effects on the film properties. After reaction gas is injected as a formation of pulse, an inert argon(Ar) purge gas is injected for gas desorption. Therefore, the process parameter of Ar purge gas has an influence on the ALD deposited film quality. In this study, Al2O3 was deposited on glass substrate at a different Ar purge time and its structural characteristics were investigated and analyzed. From the results, the growth rate of Al2O3 was decreased as the Ar purge time increases. The surface roughness was also reduced with increasing Ar purge time. In order to obtain the high quality Al2O3 film, it was known that Ar purge times longer than 15 sec was necessary resulting in the self-limiting reaction.

A Study on Cleaning Process for Benzene Recovery in Activated Carbon Bed (활성탄을 충전한 흡착탑에서 벤젠 회수를 위한 세정공정의 연구)

  • Kang, Sung-Won;Min, Byong-Hoon;Suh, Sung-Sup
    • Journal of the Korean Applied Science and Technology
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    • v.19 no.2
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    • pp.108-116
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    • 2002
  • Experimental Study was carried out for benzene desorption by purge gas or evacuation in an activated carbon bed. As purge gas flow rate increased, desorption rate increased due to the higher interstitial linear gas velocity. For various purge gas flow rates, desoption curves almost got together if they were plotted against dimensionless time. At a higher flow rate, mass transfer zone became narrower. Temperature drop in the bed was more fast and severe at higher flow rates and higher outer temperature. It was found out that desorption was almost completed when the temperature in the drop of the bed returned to the initial temperature before temperature drop. Desorption by vacuum purge was completed in shorter time than desorption by purge gas. Countercurrent purge was more effective than cocurrent purge.

A study on the characteristic of the anodic dead-end mode PEM fuelcell and performance improvement by pulsation effect (수소 데드 앤드 연료전지의 특성 및 맥동을 이용한 성능 향상에 관한 실험적 연구)

  • Choi, Jong-Won;Hwang, Yong-Sheen;Kim, Sung-Il;Ha, Jeong-Hoon;Park, Joon-Ho;Cha, Suk-Won;Kim, Min-Soo
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.336-340
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    • 2009
  • This paper presents experimental results carried out on the purge characteristic of the anodic dead-end mode fuelcell and how to improve the cell performance by pulsation effects. The dead-end mode fuelcell has some merits that a fuel supplying device is not needed and the cell power is higher than that in the open mode fuelcell. However, the purge is necessary for preventing the porous media from being flooded by liquid water formed in the channel. At this time, the un-reacted fuel is discharged with the liquid water together in purge process. The discharged fuel can make the fuel efficiency lower. Therefore, the number of purge times should be decreased for the better fuel efficiency. In this study, the outlet of the anode channel was equipped with a purge solenoid valve and a pulsation generator. The purge times was decreased when the current density decreased and operation pressure increased without the pulsation effects. In addition, when the pulsation effects such as various frequencies or amplitudes were applied, purge times was alleviated up to 40%.

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Intelligent Decision System for Purging a Residual Gas inside Tubing in Semiconductor Process (반도체공정의 Tubing 내 잔여가스제거 지적결정시스템)

  • Lee, Sa-Hwan;Huh, Yong-Jeong;Choi, Seong-Joo;Lee, Jong-Rark
    • Journal of the Semiconductor & Display Technology
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    • v.5 no.4 s.17
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    • pp.23-27
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    • 2006
  • Semiconductor industry has been dramatically developed with the information era of 21C, and the trend now is to consider that the technology of management system of the computer utility that has a high efficiency is important. This study investigated the intelligent decision system for residual gas purge process to effectively remove the residual gas in the tube after replacing the cylinder that is used for the gas cabinet or BSGS(Bulk Specialty Gas Supply System) of the semiconductor process. It was suggest from this study that it is possible to decide the type, frequency and volume of purge gas using various toxic gases which is necessary for each process. Also, this result will be utilized for operating the system, increasing the efficiency of management and saving energy.

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A Six Sigma Application Case Study to Improve a Rolled Throughput Yield of an Automobile PCSV(Purge Control Solenoid Valve) (자동차 PCSV (Purge Control Solenoid Valve) 제조공정의 누적수율 개선을 위한 6시그마 적용연구)

  • Yang, Sung-Nam;Noh, Seong-Ho;Seo, Jong-Hyen
    • Journal of the Korea Safety Management & Science
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    • v.14 no.1
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    • pp.179-187
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    • 2012
  • This paper presents a six sigma application case study for an automobile PCSV manufacturing process using rolled throughput yield improvement activity. Hidden factor and first yield concept is introduced and DMAIC procedure is implemented to maximize the first pass yield. The result of the six sigma project amounts to the reduction of failure cost of 0.1 billion won per year in the PCSV manufacturing process. This paper can benefit six sigma practitioners in some ways.

Experimental Study on PSA Process for High Purity CH4 Recovery from Biogas (바이오가스로부터 고순도 CH4 회수를 위한 PSA 공정의 실험적 연구)

  • Kim, Young-Jun;Lee, Jong-Gyu;Lee, Jong-Yeon;Kang, Yong-Tae
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.4
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    • pp.281-286
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    • 2011
  • The objective of this study is to optimize the four-bed six-step pressure swing adsorption(PSA) process for high purity $CH_4$ recovery from the biogas. The effects of P/F(purge to feed) ratio and cycle time on the process performance were evaluated. The cyclic steady-states of PSA process were reached after 12 cycles. The purity and recovery rate of product gas, pressure and temperature changes were constant as the cycle repeated. It was shown that the P/F ratio gave significant effect on the product recovery rate by increasing the amount of purge gas in purge and regeneration step. The optimal P/F ratio was found to be 0.08. As the cycle time increased, the product purity decreased by increasing the feed gas flow rate. It was found that the optimal operating conditions were P/F ratio of 0.08 and total cycle time of 1,440 seconds with the purity of 97%.

Optimization of Dynamic Headspace Purge Conditions for Concentration of Volatile Flavor Compounds of Roasted Perilla Seeds Oil by Response Surface Methodology (반응표면 분석에 의한 볶음들기름의 향기성분 포집조건 최적화)

  • Kim, Suk-Ju
    • The Korean Journal of Food And Nutrition
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    • v.17 no.2
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    • pp.220-228
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    • 2004
  • Dynamic headspace purge conditions were investigated to obtain minimum loss of high volatile compounds by breakthrough and maximum recovery of low volatile components of roasted perilla seed oil (RPSO). A response surface methodology was applied to evaluate the effect of purge temperature, purge time, and sample weight on $\ell$ n (total peak area), breakthrough ratio, and peak area of perilla ketone the least volatile component of RPSO. Sample weight was the most important factor on the $\ell$ n (total peak area) but it did not affect peak area of perilla ketone. All process variables significantly influenced breakthrough ratio. The optimum condition was determined by superimposing contour plots at purge temperature of 48$^{\circ}C$ for 12 min purge time at sample weight of 0.60 g. 2-Propanone, 2-butanone, acetic acid, 2-methyl propanal were main breakthrough compounds in RPSO flavor.

A Parallel Implementation of Purge Process for Lustre File System (Lustre 파일 시스템을 위한 Purge 기능의 병렬화 구현)

  • Kwon, Min-Woo;Yoon, Jun-Weon;Hong, Tae-Young;Park, Chan-Yeol
    • Proceedings of the Korea Information Processing Society Conference
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    • 2016.10a
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    • pp.64-65
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    • 2016
  • 슈퍼컴퓨터는 대용량의 데이터를 효율적으로 관리하기 위해 Lustre 파일 시스템과 같은 고성능의 병렬 파일 시스템을 이용한다. 한국과학기술정보연구원의 슈퍼컴퓨터 4호기 Tachyon 2차 시스템과 같이 다수의 사용자가 접속하는 슈퍼컴퓨터는 사용자의 데이터가 한없이 누적됨으로 Lustre 파일 시스템의 성능이 저하되는 이슈가 있다. 본 논문에서는 사용자의 데이터가 누적되는 것을 방지하기 위해 장기간 사용하지 않는 데이터를 자동 삭제하는 기능인 Purge기능을 구현하였다. 특히, 기하급수적으로 늘어나는 병렬 파일 시스템의 용량에 대처하기 위해 병렬 컴퓨팅 기술을 이용해 고속 Purge 기능을 구현하였다. 단일 컴퓨팅 노드와 병렬 환경에서 구현한 결과를 비교하였을 때, 단일 컴퓨팅 노드에서는 1,517GB 용량을 지우는데 221.2초가 걸렸으며 16개의 컴퓨팅 노드를 이용한 병렬 환경에서는 49.9초가 걸렸다. 이 결과를 비교했을 때 단일 컴퓨팅 노드에서 구현한 결과 대비 병렬 환경에서 구현했을 때 약 4.4배의 성능향상을 얻을 수 있었다.

Numerical Simulation of Catalyst Regeneration Process for Desulfurization Reactor (수치해석을 통한 탈황반응기용 촉매의 재생공정 분석)

  • Choi, Chang Yong;Kwon, Sang Gu;Liu, Jay;Im, Do Jin
    • Clean Technology
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    • v.23 no.2
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    • pp.140-147
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    • 2017
  • In this study, we performed numerical simulation for the catalyst regeneration process of diesel desulfurization reactor. We analyzed the changes in regeneration process according to purge gas flow rate, catalyst permeability, reactor size, and heat loss of reactor. We have found that the regeneration process is very much affected by temperature changes whereas it is hardly affected by catalyst permeability and porosity. We also estimated the regeneration time according to purge gas flow rate and initial temperatures and have found that increasing purge gas temperature is more effect for fast regeneration. The present results can be utilized to design a regeneration process of diesel desulfurization reactor for a fuel cell used in ships. Furthermore, the present work also can be used to design low sulfur diesel supply in oil refineries and therefore contribute to the development of clean petrochemical technology.