• 제목/요약/키워드: Pure W layer

검색결과 53건 처리시간 0.023초

산화인듐아연 박막 트랜지스터에서 질소 첨가가스가 활성층의 물성 및 소자의 특성에 미치는 영향 (Effects of Nitrogen Additive Gas on the Property of Active Layer and the Device Characteristic in Indium-zinc-oxide thin Film Transistors)

  • 이상혁;방정환;김원;엄현석;박진석
    • 전기학회논문지
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    • 제59권11호
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    • pp.2016-2020
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    • 2010
  • Indium-zinc-oxide (IZO) films were deposited at room temperature via RF sputtering with varying the flow rate of additive nitrogen gas ($N_2$). Thin film transistors (TFTs) with an inverted staggered configuration were fabricated by employing the various IZO films, such as $N_2$-added and pure (i.e., w/o $N_2$-added), as active channel layers. For all the deposited IZO films, effects of additive $N_2$ gas on their deposition rates, electrical resistivities, optical transmittances and bandgaps, and chemical structures were extensively investigated. Transfer characteristics of the IZO-based TFTs were measured and characterized in terms of the flow rate of additive $N_2$ gas. The experimental results indicated that the transistor action occurred when the $N_2$-added (with $N_2$ flow rate of 0.4-1.0 sccm) IZO films were used as the active layer, in contrast to the case of using the pure IZO film.

Pyrolytic Carbon Coating on A Simulated Fuel by Fluidized Bed Type Chemical Vapour Deposition

  • Park, Y.;Kim, Bong G.;Lee, Young W.;Dong S. Sohn
    • 한국원자력학회:학술대회논문집
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    • 한국원자력학회 1997년도 춘계학술발표회논문집(2)
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    • pp.159-164
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    • 1997
  • Pyrolytic carbon layer was coated on A1203 balls by fluidized bed type chemical vapour deposition unit to develop the coating technology for the preparation of coated nuclear fuel. The deposition was carried out at the temperature ranges between 110$0^{\circ}C$ and 130$0^{\circ}C$ with various gas contents and flow rates. Source and carrier gas were propane and argon, respectively. X-ray analysis shows that the deposition layer was typical carbon spectra. The growth rate of carbon layer depended on the amount of source gas and the deposition temperature. For the alumina balls with 2mm in diameter, the deposition rate was 11${\mu}{\textrm}{m}$/hr in the flow gases containing 30% source gas at 130$0^{\circ}C$ with a total flow rate of 2.0$\ell$/min. Microstructural observation of the deposits with scanning electron microscope revealed that the deposits had relatively dense and isotropic structure. Chemical analysis by energy dispersive spectroscopy showed that the layer was pure carbon.

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Cu seed layer 표면의 플라즈마 전처리가 Cu 전기도금 공정에 미치는 효과에 관한 연구 (Effects of Plasma Pretreatment of the Cu Seed Layer on Cu Electroplating)

  • 오준환;이성욱;이종무
    • 한국재료학회지
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    • 제11권9호
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    • pp.802-809
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    • 2001
  • Electroplating is an attractive alternative deposition method for copper with the need for a conformal and conductive seed layer In addition, the Cu seed layer should be highly pure so as not to compromise the effective resistivity of the filled copper interconnect structure. This seed layer requires low electrical resistivity, low levels of impurities, smooth interface, good adhesion to the barrier metal and low thickness concurrent with coherence for ensuring void-free fill. The electrical conductivity of the surface plays an important role in formation of initial Cu nuclei, Cu nucleation is much easier on the substrate with higher electrical conductivities. It is also known that the nucleation processes of Cu are very sensitive to surface condition. In this study, copper seed layers deposited by magnetron sputtering onto a tantalum nitride barrier layer were used for electroplating copper in the forward pulsed mode. Prior to electroplating a copper film, the Cu seed layer was cleaned by plasma H$_2$ and $N_2$. In the plasma treatment exposure tome was varied from 1 to 20 min and plasma power from 20 to 140W. Effects of plasma pretreatment to Cu seed/Tantalum nitride (TaN)/borophosphosilicate glass (BPSG) samples on electroplating of copper (Cu) films were investigated.

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MOCVD 법에 의해 제조된 YBCO 초전도 박막의 물성에 대한 완충층 템플릿의 영향 (Effect of the Buffered-template on the Property of YBCO Superconducting Film Deposited by MOCVD Method)

  • 전병혁;최준규;김찬중
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.27-32
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    • 2006
  • [$YBa_2Cu_3O_{7-x}$] thin films were deposited on various buffered-templates by a metal organic chemical vapor deposition(MOCVD). Three different templates of $CeO_2/YSZ/CeO_2/pure-Ni(CYC),\;CeO_2/YSZ/Y_2O_3/Ni-3at.%W(YYC)$ and $CeO_2/IBAD-YSZ$/stainless steel were used. The Ni and Ni-W alloy tapes were biaxially textured by cold rolling and annealing heat treatment. The dense YBCO films were grown on both the IBAD and YYC templates with no microcrack, while the YBCO films on the CYC templates were grown with the formation of microcracks and NiO. The YBCO film on the YYC template showed the higher $I_c$ than that on CYC template. Especially, the IBAD templates with a thin $CeO_2$(type I) and thick $CeO_2$(type II) top layer were used to compare the deposition nature of the YBCO on them. Comparing the current property of the YBCO films on IBAD templates, the YBCO film deposited on thick $CeO_2$ layer was better than the film on thin $CeO_2$ layer.

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막응축 열전달에서 공기-수증기 혼합기체의 속도 및 온도분포 (Velocity and Temperature Profiles of Steam-Air Mixture on the Film Condensation)

  • 강희찬;김무환
    • 대한기계학회논문집
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    • 제18권10호
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    • pp.2675-2685
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    • 1994
  • A study has been conducted to provide the experimental information for the velocity and temperature profiles of steam-air mixutre and to investigate their roles on the film condensation with wavy interface. Saturated gas mixture of steam-air was made to flow through the nearly horizontal$(4.1^{\circ})$ square duct of 0.1m width and 1.56m length at atmospheric pressure, and was condensated on the bottom cold plate. The air mass fraction in the gas mixture was changed from zero(W =0, pure steam) to one(W =1, pure air), and the bulk velocity was varied from 2 to 4 m/s. Water film was injected concurrently to investigate the effect of wavy interface on the condensation. The velocity and temperature profiles were measured by LDA system and thermocouples along the three parameters ; air mass fraction, mixture velocity and film flow rate. The profiles moved toward the interface with increasing steam mass fraction, mixture velocity and film flow rate. The Prandtl and Schmidt numbers were near one in the present experimental range, however there was no complete similarity between the velocity and temperature profiles of gas mixture. And the heat transfer characteristics and interfacial structure were coupled with each other.

Investigation of Initiation of Electroless Ni-P and Ni-Cu-P deposition on pure iron

  • Yiyong, W-U;Kim, M.;S.C. Kwon
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2001년도 추계학술발표회 초록집
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    • pp.10-10
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    • 2001
  • In this paper, initial depositing process of electroless Ni-Cu-P alloy was investigated by means of SEM, TEM and AES. The results show that the initial deposition is inhomogeneous and there exist different transition layers between different coatings and substrates, which are decided by the structures and compositions of the bath. For Ni-P binary alloy, its deposition takes place superiorly at grain boundary and on some grains with beneficial texture, the thickness of transition layer composed of Ni-Fe-P reaches 2000 angstrom. But during initiation of Ni-Cu-P trinary alloy, only at grain boundary is prIor to be deposited electrolessly, transited layer contains Ni-Fe-Cu-P and is decreased to about 500 angstrom. The structures of the films of Ni-P and Ni-Cu-P are crystalline at the initial depositing stage. The mechanisms of the process are put forward in this paper.

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The Formation of Magnetite Nanoparticle in Ordered System of the Soybean Lecithin

  • Li, Tiefu;Deng, Yingjie;Song, Xiaoping;Jin, Zhixiong;Zhang, Ying
    • Bulletin of the Korean Chemical Society
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    • 제24권7호
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    • pp.957-960
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    • 2003
  • A method of preparation of magnetite nanoparticles in ordered systems, as in vesicle and microemulsion, consisting of soybean lecithin and water has been introduced. The size of magnetite grain was controlled by the content of soybean lecithin and size of liposomes in the systems. It was found by experiment that magnetite nanoparticles were formed inside the double layer vesicles. The magnetite nanoparticles were separated by magnetic separation and centrifugation and the dispersion of the magnetite nanoparticles prepared at 10% (w/w) soybean lecithin was particularly stable. The formation of pure magnetite nanoparticles was confirmed by analyses of XRD and electron diffraction pattern.

CdSe 나노입자 형광층 구조에 따른 백색 LED 발광 특성 연구 (Luminescence Properties of White LED with Different CdSe nanoparticles Phosphor Layer)

  • 정원근;유홍정;박선희;전병희;김성현
    • Korean Chemical Engineering Research
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    • 제49권3호
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    • pp.320-324
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    • 2011
  • TOPO/TOP로 안정화된 CdSe 반도체 발광 나노입자를 용해열 방법을 이용하여 합성하였다. 합성 온도 및 시간 조절을 통하여 540 nm 녹색 발광과 620 nm 적색발광 CdSe 나노입자를 얻었다. 형광체 변환 백색 발광다이오드(LED)는 460 nm 발광 InGaN 발광다이오드(LED) 여기원(excitation)과 540, 620 nm 발광 CdSe 나노입자 형광체를 결합하여 제작하였다. CdSe 나노입자 형광층은 녹색과 적색이 혼합된 단층과 분리된 다층구조로 이루어졌으며, 형광층 구성에 따른 백색 LED 소자의 특성 차이를 비교하였다. 단층구조 백색 LED는 20 mA에서 5.78 lm/W의 효율을 가지며, 형광층 내에서의 에너지 전이로 인하여 적색광이 강한(0.36, 0.45)의 색좌표를 보였다. 반면 다층 구조 백색광 LED는 20 mA에서 7.28 lm/W의 효율과 순수 백색광 영역인(0.32, 0.34)의 색좌표를 나타냈다. 또한, 400 nm의 청자색 LED를 여기원으로 적용 시, 소자의 효율이 8.76 lm/W로 증가하였다.

THE STABILITY OF ALL-TRANS-RETINOL IN NOVEL LIQUID CRYSTALLINE OW EMULSION

  • Kang, H.H.;Cho, J.C.;Lee, J.H.;Lee, O.S.
    • 대한화장품학회지
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    • 제24권3호
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    • pp.111-115
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    • 1998
  • We investigated the stability of all-trans-retinol on the liquid crystalline O/W emulsion composed of mainly alkyl polyglycerine, alkyl polyglucose and glycerine, and compared the activity of all-trans-retinol in the various forms of liquid crystal. Under certain conditions, novel liquid crystalline gel was formed around oil droplets, and layers of this liquid crystalline gel were very wide and rigid. (SWLC; Super Wide Liquid Crystal) SWLC was very helpful to stabilize retinol in O/W emulsion. After storage at 45 C for 4 weeks, all-trans-retinol in O/W emulsion composed of SWLC retained above 85% of the activity upon HPLC analysis, whereas those within no liquid crystalline emulsion gave 47% and normal liquid crystalline emulsion composed of fatty alcohols gave 40 60%. Retinol in oil phase is nealy insoluble in pure water, but in cosmetic emulsion systems can be slightly solubilized into water because emulsifiers and polyols in emulsion systems function as solubilizers. In this case, water in outer phase acts as a media for oxygen transporation$.$and thus destabilizes retinol. As a result, retinol in O/W emulsion has a tendency to become unstable. SWLC surrounding oil droplet which contains retinol is wide and rigid, therefore reduces contact between inner phase and outer phase To make SWLC, properties of emulsifiers are very important phase transition temperature should be high, and the structure of surfactants should be bulky, and their ratio should be suitable to make rigid and wide liquid crystalline gel layer in order to reduce contact between retinol in inner phase and water in outer phase.

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Low molecular amorphous spirobifluorene derivatives for blue electroluminescence

  • Lee, Hyo-Young;Oh, Ji-Young;Chu, Hye-Yong;Lee, Jeong-Ik;Kim, Seong-Hyun;Yang, Yong-Suk;Do, Lee-Mi;Zyung, Tae-Hyoung
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2001년도 International Meeting on Information Display
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    • pp.209-212
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    • 2001
  • We report the synthesis and characterization of new alkoxy substituted spirobifluorene derivatives. The spiro compounds having alkoxy hydrocarbon chains were readily soluble in common organic solvents, having improved film-forming properties and had a significantly reduced tendency to crystallize, resulting in increasing their service lifetime. The results of DSC showed that it was amorphous. The optical and electroluminescent spectra were characterized. Electroluminescence (EL) properties of three-layer light emitting diodes (LED) of $ITO/TPD/spirobifluorene/Alq_3/LiF/Al$ as the active layer were characterized. Blue emission peaking of the EL spectrum of the three-layer device at 402 nm and a luminance of 3,125 $cd/m^2$ were achieved at a drive voltage 12.8 V. The luminous efficiency was obtained to be 1.7 lm/W. The color coordinate in CIE chromaticity is (0.16, 0.09), which is in a pure blue region. The external quantum efficiency was obtained to be 2.0%. The results indicate that the spirobifluorene compounds having alkoxy hydrocarbon chains are strongly potential blue emitters for LED applications.

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