• 한국세라믹학회지
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• 제56권3호
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• pp.277-283
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• 2019

We have examined minimization of the number of impurity particles by replacing the load-lock chamber materials of the chemical vapor deposition equipment through optimization of the pumping method in the deposition chamber. In order to reduce the number of impurity particles in the chamber, the load-lock spacer material was changed from monomer casting nylon to Torlon. Furthermore, we controlled the pumping speed and number of pumping ports, which resulted in a reduction in the impurity particle generation from 2.67% to 0.52%. This study revealed that the selection of the material for the parts of a chemical vapor deposition chamber can minimize particle generation, thereby presenting a method of optimization method of the chemical vapor deposition chamber.

• KSTLE International Journal
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• 제3권2호
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• pp.101-109
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• 2002

This paper presents the fabrication and performance inspection of a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of base plate, mid plate, top plate and connection tubes fur inlet and outlet. In detail, the base plate is composed of two diffuser nozzles and three chambers, the mid plate consists of a glass diaphragm for the volumetric change of the pumping chamber. The inlet and outlet tubes are connected at the top plate and the actuator fur pressing the diaphragm is located beneath the top plate. The micropump is fabricated on the silicon wafer by DRIE (Deep Reactive ion Etching) process. The pumping performances are tested by the pneumatic test rig and compared with the simulated results fur various dimensions of diffuser nozzles. The pumping characteristics of the micropump by the volumetric change at the pumping chamber is modeled and simulated by the commercial software of FLOW-3D. The simulated results shows that reverse flow is the inherent phenomena in the diffuser nozzle type micropump, but it can be reduced at the dual pumping chamber model.

• 한국자동차공학회논문집
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• 제11권3호
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• pp.106-114
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• 2003

The pressure ripple in the delivery port is caused by flow ripple, which is induced by variation of pumping chamber volume. The other reason is the reverse flow from the outlet volume produced by pressure difference between pumping chamber and outlet volume, when the pumping chamber is connected with the outlet volume. In this study, a mathematical model is presented for analyzing discharge pressure ripple, which includes vane detachment, cam ring movement , and fluid inertia effects in V-groove in the side plate. From the analysis and experiment, it was found that V-groove on the side plate, coefficient of spring supporting the cam ring, and average discharge pressure are the main factors of discharge pressure ripple in variable displacement vane pump. The theoretical results, provided in this study, were well agreed with experimental results. The analytical model to estimate the magnitude of pressure ripple in this study is expected to be used f3r the optimal design of the variable displacement vane pump.

• 한국진공학회지
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• 제8권4B호
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• pp.548-555
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• 1999

The NBI (Neutral BGeam Injection) System for the Korea Superconducting Tokamak Advanced Research (KSTAR) is composed of ion sources, neutralizers, bending magnets, ion dumps, and calorimeter. The vacuum chamber, in which all of the beam line components are enclosed, is composed of differential pumping system for the effective transfer of the neutral beams. The needed pumping speeds of each of the divided vacuum chamber and the optimized gas flow rate ot the neutralizer were calculated with the help of the particle balance equations. The minimum gas flow rate to the ion sources for producing needed beam current (120kV, 65A, 78MW), the pressure distributions in the vacuum chamber for minimizing re-ionization loss, and the beam loss rate on the beam line components were used as the input in the calculation. Also the scenario for short pulse operation was determined by analysing the time dependent equations. It showed that beam extraction during less than 0.5 sec could be made only with TMP.

• 한국정밀공학회지
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• 제26권4호
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• pp.55-63
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• 2009

This paper reports on the theoretical and experimental study of the pressure ripples in a pressure unbalanced type vane pump which have widespread use in industry. Because they can infinitely vary the volume of the fluid pumped in the system by a control. Pressure ripples occur due to the flow ripples induced by geometry of side plate, leakage flow, reverse flow from the outlet volume produced by pressure difference between pumping chamber and outlet volume when the pumping chamber connected with the outlet volume. In this paper, we measured the pressure variation of a pumping chamber, reaction force on a cam ring, the mathematical model for analyzing the pressure ripples which included vane detachment and fluid inertia effects in notch area has been presented, and was applied to predict the level and the wave form of the pressure ripples according to operating conditions.

• 한국에너지공학회:학술대회논문집
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• 한국에너지공학회 1999년도 추계 학술발표회 논문집
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• pp.149-154
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• 1999

This paper describes a passive safety injection system with free piston Stirling pump working withabundant decay heat in the nuclear reactor during the hypothetical accident. The water column in the tube assembly connected from the hot chamber to the cold chamber in the pump oscillates periodically due to thermal volume changes of non-condensable gas in each chamber. The oscillating pressure in the water column is converted into the pumping power with a suction-and-bleed type valve assembly. In this paper a dynamic model describing the frequency of oscillation and pumping pressure is developed. It was found that the pumping pressure is a function of the temperature difference between the chambers. Also, the frequency oscillation depends on the length of the tube with water column.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.922-929
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• 2006

In this study, flow characteristics of the FPN (Fountain Pen Nano-Lithography) using active membrane pumping are investigated. This FPN has integrated chamber, micro channel, and high capacity reservoir for continuous ink feed. The most important aspect in this probe provided control of fluid injection using active membrane pumping in chamber. The flow rates in channel by capillary force are theoretically analyzed, including the control of mass flow rates by deflection of membrane. The above results are compared with numerical simulations that calculated by commercial code, FLUENT. The velocity of fluid in micro channel shows linear behaviors. And the mass flows are proportional to the second order function of pumping pressure that is imposed to membrane.

• 대한기계학회논문집B
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• 제30권8호
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• pp.722-730
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• 2006

In this study, the flow characteristics of a FPN (Fountain Pen Nano-Lithography) using active membrane pumping are investigated. The FPN has integrated chamber, micro channel, and high capacity reservoir for continuous ink feed. The most important aspect in this probe provided control of fluid injection using active membrane pumping in chamber. The flow rates in channel by capillary force are theoretically analyzed, including the control of the mass flow rates by the deflection of the membrane. The above results are compared with the numerical simulations that calculated by commercial code, FLUENT. The velocity of the fluid in micro channel shows linear behaviors. And the mass flows are proportional to the second order function of the pumping pressure that is imposed to the membrane.

• 대한기계학회논문집B
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• 제37권2호
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• pp.111-117
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• 2013

탄성튜브가 연결된 펌핑 챔버를 이용한 무밸브 펌프를 가상경계방법을 이용하여 수치적으로 연구하였다. 탄성 튜브와 펌핑 챔버 사이의 상호작용으로 인하여 무밸브 펌프 내의 유동이 생성되었으며, 탄성튜브의 스트레칭 계수, 벤딩 계수, 종횡비가 무밸브 펌프의 전체 유량에 미치는 영향을 살펴보았다. 펌프의 메커니즘을 이해하고자, 시간에 따른 탄성 튜브의 움직임과 그에 따른 유동 속도의 변화를 자세히 살펴보았으며, 탄성 튜브의 직경 크기와 펌프의 평균 유량 사이의 관계를 분석하였다.

• 한국유체기계학회 논문집
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• 제11권3호
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• pp.14-21
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• 2008

A numerical simulation on the flow field of a valveless bidirectional piezoelectric micropump has been performed. In this type of micropump, the oscillation of the piezoelectric diaphragm generates the blowing and suction flow through the oblique channel from the pumping chamber. The angle between the oblique and main channel causes the variation of flow distribution through upstream and downstream channels in suction and blowing modes. In the suction flow mode, the working fluid flows from both the upstream and downstream of the main channel to the pumping chamber through the oblique channel. However, in the blowing flow mode, the fluid pushed out of the pumping chamber flows more toward the downstream of the main channel due to the inertia of the fluid. In the present study, the effects of geometries such as the angle of oblique channel and the shape of main channel on the flow rate of the up/downstream were investigated. The flow rate obtained from the pump and the energy required to the pump were also analyzed for various displacements and frequencies of the oscillation of the diaphragm.