• Title/Summary/Keyword: Pulsed-laser ablation

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Preparation of High Quality ZnO Thin Films by Separated Pulsed Laser Deposition (분리형 펄스 레이져 증착법을 이용한 ZnO 박막의 특성에 관한 연구)

  • Park, Sang-Moo;Lee, Boong-Joo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.818-824
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    • 2008
  • The Separated Pulsed Laser Deposition (SPLD) technique uses two chambers that are separated by a conic metallic wall with a central orifice. The pressures of ablation chamber and deposition chamber were controlled by the differential vacuum system. We deposited zinc oxide (ZnO) thin films by SPLD method to obtain high quality thin films. When the bias voltage of +500 V was applied between a substrate and an orifice, the ZnO thin film was deposited efficiently. The deposited ZnO thin film at ablation chamber gas pressure of Ar 5 mTorr showed the sharpest ultraviolet absorption edge indicatory the band gap of about 3.1 eV. ZnO thin films were deposited using effect of electric and magnetic fields in the SPLD method. E${\times}$B drift happened by an electric fields and a magnetic fields, activated plasma plume, as a result the film surface became very smooth. When the bias voltage of +500 V and magnet of 0,1 T were applied the ZnO thin films surface state showed high quality. Grain size was 41.99 nm and RMS was 0.84 nm.

Real Time Monitoring of Ionic Species Generated from Laser-Ablated Pb$(Zr_{0.52}Ti_{0.48})O_3$ Target Using Pulsed-Field Time-Of-Flight Mass spectrometer

  • 최영구;임훙선;정광우
    • Bulletin of the Korean Chemical Society
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    • v.19 no.8
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    • pp.830-835
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    • 1998
  • The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

Polycarbonate Track-Etched Membrane Micromachining by Ultrafast Pulse Laser (극초단 레이저를 이용한 PC-TEMs 초정밀 가공에 대한 연구)

  • Choi, Hae-Woon
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.1
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    • pp.24-30
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    • 2011
  • PC-TEMs (Polycarbonate Track-Etched membranes) were micro-drilled for biomedical applications by ultrafast pulsed laser. The ablation and damage characteristics were studied on PE-TEMs by assuming porous thin membranes. The experiments were conducted in the range of 2.02 $J/cm^2$ and 8.07$J/cm^2$. The ablation threshold and damage threshold were found to be 2.56$J/cm^2$ and 1.14$J/cm^2$, respectively. While a conical shaped drilled holes was made in lower fluence region, straight shaped holes were drilled in higher fluence region. Nanoholes made the membrane as porous material and ablation characteristics for both bulk and thin film membranes were compared.

The Carbon Plume Simulation by Pulsed Laser Ablation Method - Interactions between Ar plasmas and Carbon Plume - (레이져 용삭법에 의한 탄소입자 운동모델 - 플라즈마와의 상관관계 -)

  • So, Soon-Youl;Chung, Hae-Deok;Lee, Jin;Park, Gye-Choon;Park, Gye-Chun;Kim, Chang-Sun;Moon, Chae-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.12a
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    • pp.96-100
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    • 2006
  • A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films. This paper was focused on the understanding and analysis of the motion of carbon atom (C) and carbon ion ($C^+$) particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=10~100 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are C, $C^+$ and electron were considered in the calculation of particle method. The motions of energetic $C^+$ and C deposited upon the substrate were investigated and compared.

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Characterization of a Micro-Laser-Plasma Electrostatic-Acceleration Hybrid-Thruster

  • Akira Igari;Masatoshi Kawakami;Hideyuki Horisawa;Kim, Itsuro ura
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2004.03a
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    • pp.271-277
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    • 2004
  • As one of the concepts of the laser/electric hybrid propulsion system, a feasibility study on possibilities of electrostatic acceleration of a laser ablation plasma induced from a solid target was conducted. Energy distributions of accelerated ions were measured by a Faraday cup. A time-of-flight measurement was also conducted for ion velocity measurement. It was found that an average speed of ions from a pure laser ablation in this case was about 20 km/sec for pulse energy of 40 $\mu$J/pulse with pulse width of 250 psec. On the other hand, through an electrostatic field with a + I ,000 V electrode, the speed could be accelerated up to 40 km/sec. It was shown that the electrode with positive potential was more effective than that with negative potential for positive-ion acceleration in laser induced plasma, or pulsed plasma, in which ions were induced with the Coulomb explosion following electrons. In addition, the ion-acceleration or deceleration strongly depended on conditions of pairs of inner diameter and electrodes gap.

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Carbon Plume Modeling Assisted by Ar Plasmas (Ar 플라즈마 상태에서 운동하는 탄소 입자 모델링)

  • So, Soon-Youl;Lee, Jin;Chung, Hae-Deok;Yeo, In-Seon
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2163-2165
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    • 2005
  • A pulsed laser ablation deposition (PLAD) technique has been used for producing fine particle as well as thin film at relatively low substrate temperatures. However, in order to manufacture and evaluate such materials in detail, motions of plume particles generated by laser ablation have to be understood and interactions between the particles by ablation and gas plasma have to be clarified. Therefore, this paper was focused on the understanding of plume motion in laser ablation assisted by Ar plasma at 50(mTorr). Two-dimensional hybrid model consisting of fluid and particle models was developed and three kinds of plume particles which are carbon atom (C), ion $(C^+)$ and electron were considered in the calculation of particle method It was obtained that ablated $C^+$ was electrically captured in Ar plasmas by strong electric field (E). The difference between motions of the ablated electrons and $C^+$ made E strong and the collisional processes active.

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Thermomechanical Effect on the Water Wet Dental Hard Tissue by the Q-switched Er : YAG Laser

  • Y. H. Kwon;Ky0-han Kim
    • Journal of Biomedical Engineering Research
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    • v.20 no.2
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    • pp.231-236
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    • 1999
  • Understanding the exgenous water induced thermomechanical effect on the dental hard tissue by the Q-switched Er:YAG laser (1-$mutextrm{s}$-long pulse width) has an important impact on the further understanding of the free-running Er:YAG laser (250-$mutextrm{s}$-long pulse width) ablation on the dental gard tissue because one macroscopic effect in the free-running laser is an accumulation of microscopic effects we investigated in this study. The Q-switched Er:YAG laser with exogenous water on the tooth enhanced ablation rate compared to the case of no water on the tooth. The frequency of exogenous-water jet on the tooth has affected the ablation rate in such a way that as we dispensed water drops less frequently we could get more enhanced ablation rate. The amplitude of the recoil pressure depends on the tooth surface conditions such that as surfaces wet, and as the volume of the exogenous water drop increased, the amplitude of the recoil pressure increased also. From this study we realized that the 1 $mutextrm{s}$ long pulsed induced thermomechanical effect provides us useful information for the understanding of the free-running Er:YAG laser induced ablation with exogenous water.

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Hydrophilic Graphite Nanoparticles Synthesized by Liquid Phase Pulsed Laser Ablation and Their Carbon-composite Sensor Application (액상 펄스 레이저 어블레이션에 의한 친수성 그라파이트 나노입자의 제조 및 센서 응용)

  • Choi, Moonyoul;Kim, Yong-Tae
    • Journal of the Korean Electrochemical Society
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    • v.15 no.4
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    • pp.236-241
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    • 2012
  • It is widely recognized that it is hard to prepare hydrophilic graphite nanoparticles because of their high crystallinity and inert characteristics. In this study, we successfully synthesized the hydrophilic graphite nanoparticles by using liquid phase pulsed laser ablation method which has been actively employed for the thin film deposition up to now. The obtained hydrophilic graphite showed an ultra-high dispersion stability in water, because the hydrophilic functional groups like carboxyl and carbonyl group was simultaneously introduced onto the graphite surface with the nanoparticle formation, as confirmed by FT-IR and zeta potential measurements. Finally, a markedly enhanced gas sensing ability for acetone was shown in comparison with the conventional carbon black for the carbon polymer composite sensor with polyethyleneglycol (PEG).