Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.07c
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- Pages.2163-2165
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- 2005
Carbon Plume Modeling Assisted by Ar Plasmas
Ar 플라즈마 상태에서 운동하는 탄소 입자 모델링
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So, Soon-Youl
(Department of Electrical Engineering, Chonnam National University) ;
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Lee, Jin
(Department of Electrical Engineering, Mokpo National University) ;
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Chung, Hae-Deok
(Department of Electrical Engineering, Mokpo National University) ;
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Yeo, In-Seon
(Department of Electrical Engineering, Chonnam National University)
- Published : 2005.07.18
Abstract
A pulsed laser ablation deposition (PLAD) technique has been used for producing fine particle as well as thin film at relatively low substrate temperatures. However, in order to manufacture and evaluate such materials in detail, motions of plume particles generated by laser ablation have to be understood and interactions between the particles by ablation and gas plasma have to be clarified. Therefore, this paper was focused on the understanding of plume motion in laser ablation assisted by Ar plasma at 50(mTorr). Two-dimensional hybrid model consisting of fluid and particle models was developed and three kinds of plume particles which are carbon atom (C), ion