• Title/Summary/Keyword: Pulsed laser ablation

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Fabrication and Characterization of$(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$ Thin Films by Pulsed Laser Deposition (펄스 레이저 증착법에 의한 $(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$ 박막의 제작 및 특성)

  • Shim, Kyung-Suk;Lee, Sang-Yeol
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.5
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    • pp.303-308
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    • 1999
  • Dielectric thin films of PLT(28) ($(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$) have been deposited on $Pt/Ti/SiO_2/Si$ substrates in situ by a laser ablation. We have systematically changed the laser fluence from 0.4 J/$cm^2$ to 3 J/$cm^2$, and deposition temperature from $450^{\circ}C\; to\; 700^{\circ}C$. The surface morphology was changed from planar grain structure to columnar structure as the nucleation energy was increased. The PLT thin film with columnar structure showed good dielectric properties. The deposition temperature influenced on nucleation energy much stronger than the laser energy density did.

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Small Thruster Development Based on Pulse Energy (펄스 에너지 기반의 소형 추력 장치 개발)

  • Choi, Soo-Jin;Gojani, Ardian B.;Yoh, Jai-Ick
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2009.05a
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    • pp.365-368
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    • 2009
  • A new concept of a small thruster for altitude control of a micro/nano class satellite is developed, which utilizes the pulsed laser energy. As the laser-based thruster does not require burning of any fuel, it gives promise of small satellite design criteria, namely light weight and cost effectiveness. In this paper, we develop gel-type material for generating strong plasma plume for enhancing thrust for propulsion. Moreover, we quantify the level of thrust via the momentum coupling coefficient measured by the pendulum system. We discover that the driving force is significantly improved via the gel-typed propellant for laser ablation.

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Micro patterning of conductor line by laser induced forward transfer(LIFT) (LIFT 방법에 의한 전도성 미세 패터닝 공정 연구)

  • 이제훈;한유희
    • Laser Solutions
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    • v.2 no.3
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    • pp.52-61
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    • 1999
  • The laser induced forward transfer(LIFT) technique employs a pulsed laser to transfer parts of a thin metal film from an optically transparent target onto an arbitrary substrate in close proximity to the metal film on the target. In this work, a two-step method, the combination of LIFT process, in which a Au film deposited on the $Al_2$O$_3$ substrate by Nd:YAG laser and subsequent Au electroless metal plating on the by LIFT process generated Au seed, was presented. The influence of laser parameters, wavelength, laser power, film thickness and overlap ratio of pulse tracks, on the shapes of deposit and conductor line after electroless plating is experimentally studied. As a results, the threshold power densities for ablation, deposition and metallization were determined and comparison of threshold value between the wave length 1064nm and the second harmonic generated 532nm. In odor to determine a possible application in the electronic industry, a smallest conduct spot size, line width and isolated line space were generated.

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Processing of gelatin using nanosecond and femtosecond pulsed lasers (나노초 및 펨토초 레이저를 이용한 젤라틴의 미세가공)

  • Seo, C.;Ahn, D.;Kim, D.
    • Laser Solutions
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    • v.15 no.2
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    • pp.1-5
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    • 2012
  • Gelatin is used as a model for soft biological tissues in studying laser interaction with the soft tissues. In this work, we analyze the interaction between gelatin and excimer and Ti:Sapphire femtosecond laser under various conditions, especially by varying the laser, laser fluence and pulse number. The results show that swelling of the surface and ablation depth can be controlled by adjusting the process parameters.

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Magnetic Properties of SmCo Thin Films Grown by Using a Nd-YAG Pulsed Laser Ablation Method (Nd-YAG Pulsed Laser Ablation법으로 제작한 SmCo계 박막의 자기특성)

  • 김상원;양충진
    • Journal of the Korean Magnetics Society
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    • v.10 no.1
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    • pp.30-36
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    • 2000
  • SmCo films were deposited on Si(100) substrate by a Nd-YAG pulsed laser ablation of the targets of Sm$\_$100-x/Co$\_$x/ (73$\leq$x$\leq$93) at the substrate temperature of 600∼700$\^{C}$ and the laser beam energy density of Q switching mode or fixed Q mode. The magnetic properties of the films obtained from the Q switching mode exhibited a 4 $\pi$ Ms of 5200∼7700 Gauss, iHc of 190-250 Oe, and 4$\pi$M$\_$r//4$\pi$M$\_$s/ of 0.4∼0.74, respectively, while the fixed Q mode gave the magnetic properties of corresponding films of a 4$\pi$M$\_$r//4$\pi$M$\_$s/ = 0.32∼0.91 and iHc of 430-6290 Oe, respectively. The fixed Q mode gave the better magnetic properties of the SmCo films which seems to be due to a formation of magnetically hard minor phases in droplet of Sm-rich intermetallics. However, the resultant rough surface of the SmCo films is a problem to be solved by a continued study.

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Study on the synthesis and the frequency response of HTS microwave device fabricated by pulsed laser deposition (레이저 공정을 이용한 초전도 통신소자 제작과 고주파특성 연구)

  • Park, Joo-Hyung;Jeong, Young-Sik;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.288-290
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    • 1997
  • Pulsed laser ablation has been used to fabricate superconducting $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The epitaxial YBCO thin films were grown at $750^{\circ}C$ and oxygen partial pressure of 200 mTorr. The electrical property and the characteristics of the YBCO thin films have been studied by R-T measurement. scanning electron microscopy (SEM) and X-ray diffraction (XRD). A microstrip line resonator has been fabricated using YBCO superconducting thin films by photolithography and wet-etch process. The resonator has linear microstrip line separated by a gap of 0.278 mm. We observed a fundamental resonance peak at the frequency of 10.007 GHz.

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Electrical Properties of PLZT Thin Films Prepared By Pulsed Laser Ablation (레이저 어블레이션법으로 제작된 PLZT 박막의 전기적특성)

  • 이도형;장낙원;마석범;최형욱;박창엽
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.139-142
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    • 1998
  • PLZT thin films were fabricated with different Zr/Ti ratios by pulsed laser deposition. PLZT films deposited on Pt/Ti/SiO$_2$/Si substrate. This PLZT thin films of 5000${\AA}$. thickness were crystallized at 600$^{\circ}C$, 200 mTorr O$_2$ press. 2/55/45 PLZT thin film showed a maximum dielectric constant value of $\varepsilon$$\_$r/=1500, and dielectric loss was 0.O$_3$. At 2/70/30 PLZT thin film, Coercive field and remnant polarization was respectively 19[kV/cm], 8[${\mu}$C/$\textrm{cm}^2$].

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A Study on Electrical Characteristics of the PLZT Thin Film Acorrding to Thickness for DRAM Capacitor (DRAM소자용 PLZT 박막의 두께에 따른 전기적 특성에 관한 연구)

  • 박용범;장낙원;마석범;김성구;최형욱
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.278-281
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    • 1999
  • PLZT thin films on Pt/Ti/SiO$_2$/Si substrate were fabricated with different Thickness by pulsed laser deposition. 14/50/50 PLZT thin film showed a maximum dielectric constant value of $\varepsilon$$_{t}$=985 at 5000$\AA$, and $\varepsilon$$_{t}$=668 at 2000A. P-EI hysteresis loop of 14/50/50 PLZT thin film was slim ferroelectric. Leakage current density of 14/50/70 PLZT thin film was 10$^{-8}$ A/$\textrm{cm}^2$ at 2000$\AA$.EX>.

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Magnetic Hardening of Nano-thick $Sm_2Fe_{17}N_x$ Films Grown by Pulsed Laser Deposition

  • Yang, Choong Jin;Wu, Jianmin
    • Journal of Magnetics
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    • v.5 no.4
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    • pp.124-129
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    • 2000
  • $Sm_2Fe_{17}N_x$ film magnets were prepared using a $Sm_2Fe_{17}$ target in a $N_2$ gas atmosphere using a Nd-YAG pulsed laser ablation technique. The effect of nitrogen pressure, deposition temperature, pulse time and film thickness on the structure and magnetic properties of $Sm_2Fe_{17}N_x$ film were studied. Increasing the nitrogen pressure up to 5 atm led to the formation of complete $Sm_2Fe_{17}N_x$ compound. Optimized magnetic properties with the nitrogenation temperature in the range 500-53$0^{\circ}C$ could be obtained by extending the nitrogenation time up to 4 hours. Relatively low coercivities of 400~600 Oe were found in $Sm_2Fe_{17}N_x$films 50~100 m thick, while a $4\piM_s$ of 10$\sim$12 kG could be achieved. In-plane anisotropy, which was the basic goal in this study, was achieved by controlling the nitrogenation parameters.

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Endpoint Depth When Removing Xanthelasma Using CO2 Laser Ablation: A Case Report

  • Park, Jeong Do;Kim, Se Young;Jeong, Hyun Gyo;Wee, Syeo Young
    • Medical Lasers
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    • v.10 no.4
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    • pp.246-249
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    • 2021
  • The carbon dioxide (CO2) laser is one of the treatment options used for xanthelasma palpebrarum. However, even if the full dermal layer is removed, the lesion can recur due to the residual lipid deposits. A 44-year-old male patient with xanthelasma on both upper eyelids was treated with a pulsed dye CO2 laser. On the right upper eyelid, we carried out a CO2 laser treatment until the yellowish plaque was almost invisible and the full thickness of the dermal layer was removed. On the left upper eyelid, the dermal layer was partially removed and an additional squeezing out of yellowish particles was done. The lesion treated by the squeezing out of lipid droplets showed better long-term results than the lesion treated up to the deeper dermal layer.