Laser Solutions (한국레이저가공학회지)
- Volume 2 Issue 3
- /
- Pages.52-61
- /
- 1999
- /
- 1229-0963(pISSN)
Micro patterning of conductor line by laser induced forward transfer(LIFT)
LIFT 방법에 의한 전도성 미세 패터닝 공정 연구
Abstract
The laser induced forward transfer(LIFT) technique employs a pulsed laser to transfer parts of a thin metal film from an optically transparent target onto an arbitrary substrate in close proximity to the metal film on the target. In this work, a two-step method, the combination of LIFT process, in which a Au film deposited on the
Keywords