• Title/Summary/Keyword: Pulse laser ablation

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Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser

  • Noh, Ji-Whan;Lee, Jae-Hoon;Shin, Dong-Sig;Sohn, Hyon-Kee;Suh, Jeong;Oh, Jeong-Seok
    • Journal of the Optical Society of Korea
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    • v.13 no.1
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    • pp.75-79
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    • 2009
  • A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a $1{\mu}m$ peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A $1{\mu}m$ pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).

Real Time Monitoring of Ionic Species Generated from Laser-Ablated Pb$(Zr_{0.52}Ti_{0.48})O_3$ Target Using Pulsed-Field Time-Of-Flight Mass spectrometer

  • 최영구;임훙선;정광우
    • Bulletin of the Korean Chemical Society
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    • v.19 no.8
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    • pp.830-835
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    • 1998
  • The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

Micro patterning of conductor line by laser induced forward transfer(LIFT) (LIFT 방법에 의한 전도성 미세 패터닝 공정 연구)

  • 이제훈;한유희
    • Laser Solutions
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    • v.2 no.3
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    • pp.52-61
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    • 1999
  • The laser induced forward transfer(LIFT) technique employs a pulsed laser to transfer parts of a thin metal film from an optically transparent target onto an arbitrary substrate in close proximity to the metal film on the target. In this work, a two-step method, the combination of LIFT process, in which a Au film deposited on the $Al_2$O$_3$ substrate by Nd:YAG laser and subsequent Au electroless metal plating on the by LIFT process generated Au seed, was presented. The influence of laser parameters, wavelength, laser power, film thickness and overlap ratio of pulse tracks, on the shapes of deposit and conductor line after electroless plating is experimentally studied. As a results, the threshold power densities for ablation, deposition and metallization were determined and comparison of threshold value between the wave length 1064nm and the second harmonic generated 532nm. In odor to determine a possible application in the electronic industry, a smallest conduct spot size, line width and isolated line space were generated.

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Processing of gelatin using nanosecond and femtosecond pulsed lasers (나노초 및 펨토초 레이저를 이용한 젤라틴의 미세가공)

  • Seo, C.;Ahn, D.;Kim, D.
    • Laser Solutions
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    • v.15 no.2
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    • pp.1-5
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    • 2012
  • Gelatin is used as a model for soft biological tissues in studying laser interaction with the soft tissues. In this work, we analyze the interaction between gelatin and excimer and Ti:Sapphire femtosecond laser under various conditions, especially by varying the laser, laser fluence and pulse number. The results show that swelling of the surface and ablation depth can be controlled by adjusting the process parameters.

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Modeling of Polymer Ablation with Excimer Lasers (폴리머 미세가공을 위한 레이저 어블레이션 모델링)

  • Yoon, Kyung-Koo;Bang, Se-Yoon
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.9 s.174
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    • pp.60-68
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    • 2005
  • To investigate the effects of beam focusing in the etching of polymers with short pulse Excimer lasers, a polymer etching model of SSB's is combined with a beam focusing model. Through the numerical simulation, it was found that in the high laser fluence region, SSB model considering both photochemical and thermal contribution is considered to be suitable to predict the etched hole shape than a simple photochemical etching model. The average temperature distribution into the substance obtained by assuming 1-D heat transfer is found to be fairly similar to the fluence distribution on the ablated surface. The experimental etching data fur polymers are used to give material properties for ablation model. The fitted etch depth curve gives a nice agreement with the experimental data.

The spectroscopic study of chemical reaction of laser-ablated aluminum-oxygen by high power laser (분광분석을 활용한 고에너지 레이저 환경에서의 알루미늄-산소 화학반응 연구)

  • Kim, Chang-hwan
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.44 no.9
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    • pp.789-795
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    • 2016
  • Laser-induced combustions and explosions generated by high laser irradiances were explored by Laser-Induced Breakdown Spectroscopy (LIBS). The laser used for target ablation is a Q-switched Nd:YAG laser with 7 ns pulse duration at wavelength of 1064 nm laser energies from 40 mJ to 2500 mJ ($6.88{\times}10^{10}-6.53{\times}10^{11}W/cm^2$). The plasma light source from aluminum detected by the echelle grating spectrometer and coupled to the gated ICCD(a resolution (${\lambda}/{\Delta}{\lambda}$) of 5000). This spectroscopic study has been investigated for obtaining both the atomic/molecular signals of aluminum-oxygen and the calculated ambient condition such as plasma temperature and electron density. The essence of the paper is observing specific electron density ratio which can support the processes of chemical reaction and combustion between ablated aluminum plume and oxygen from air by inducing high laser energy.

Application of a LIBS technique using femtosecond and nanosecond pulses for the CIGS films analysis (펨토초 및 나노초 레이저를 이용한 박막태양전지의 레이저 플라즈마 분광 분석)

  • Lee, S.H.;Choi, J.H.;Gonzalez, J.J.;Hou, H.;Zorba, V.;Russo, R.E.;Jeong, S.H.
    • Laser Solutions
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    • v.17 no.4
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    • pp.7-13
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    • 2014
  • In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

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The thermal analysis of te-based media for the optical recording (광기록에 이용되는 Te-based media에 대한 열적 해석)

  • 이성준;천석표;이현용;정홍배
    • Electrical & Electronic Materials
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    • v.8 no.1
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    • pp.64-70
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    • 1995
  • We discussed the thermal analysis for a recording media with the variation of the laser pulse duration, the laser power and the temperature distribution in order to optimize the Te-based antireflection structure from the computer calculations. In the case that the radial heat diffusion is negligible, we can calculate the maximum temperature of the recording layer at the center of the spot by the Simple Model. The temperature profile of the recording layer is obtained from the Numerical Model by considering the total specific heat and the latent heat. As a result, the effect of the heat sinking acting as a thermal loss for the hole formation could be minimized by introducing the pulse with the hole formation duration(.tau.) below the thermal time constant(.tau.$_{D}$) of a dielectric layer. These requirments can be satisfied by using the dielectric thickness of the 2nd ART(Anti-Reflection Trilayer) condition or the dielectric materials with a low thermal diffusivity.y.

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Ultrashort Pulse Laser Microsurgery System with Plasma Luminescence Feedback Control

  • Kim, B.M.;Feit, M.D.;Rubenchik, A.M.;Gold, D.M.;Darrow, C.B.;Silva, L.B. Da
    • Proceedings of the KOSOMBE Conference
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    • v.1997 no.11
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    • pp.385-387
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    • 1997
  • Plasma luminescence spectroscopy was used or precise ablation of bone tissue during ultrashort pulse laser (USPL) micro-spinal surgery. Strong contrast of the luminescence spectra between bone marrow and spinal cord provided the real time feedback control so that only bone tissue can be selectively ablated while preserving the spinal cord.

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WATER INDUCED MECHANICAL EFFECT ON THE DENTAL HARD TISSUE BY THE SHORT PULSED LASER

  • Kwon,Yong-Hoon;Kim, You-Young
    • Journal of Photoscience
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    • v.5 no.1
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    • pp.33-37
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    • 1998
  • One macroscopic effect in the free-running Er:YAG laser is an accumulation of microscopic effects. Understanding of the exogenous water induced mechanical effect on the dental hard tissue by the Qswitched Er:YAG laser has an important impact on the further understanding of the free-running Er:YAG laser ablation on the dental hard tissue. The Q-switched Er:YAG laser (1-$\mu$s-long pulse width) was used in the recoil pressure measurement with an aid of water-jet system and a pressure transducer. The amplitude of the recoil pressure depends on the tooth surface conditions (dry and wet) and the volume of the water upon it. Wet surfaces yielded higher recoil pressure than that of dry, surface, and as the volume of the exogenous water drop increased, the amplitude of the recoil pressure increased also.

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