• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.289-294
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• 2012

There are several indicators to represent characteristics of chemical mechanical planarization (CMP) such as material removal rate (MRR), surface quality and removal uniformity on a wafer surface. Especially, the removal uniformity on the wafer edge is one of the most important issues since it gives a significant impact on the yield of chip production on a wafer. Non-uniform removal rate at the wafer edge (edge effect) is mainly induced by a non-uniform pressure from nonuniform pad curvature during CMP process, resulting in edge exclusion which means the region that cannot be made to a chip. For this reason, authors tried to minimize the edge exclusion by using an edge profile control (EPC) ring. The EPC ring is equipped on the polishing head with the wafer to protect a wafer from the edge effect. Experimental results showed that the EPC ring could dramatically minimize the edge exclusion of the wafer. This study shows a possibility to improve the yield of chip production without special design changes of the CMP equipment.

• Korean Journal of Optics and Photonics
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• v.11 no.4
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• pp.221-226
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• 2000

We observed the spatial distributions of atom in a magneto-optical trap. These distributions include sphere, stick, ring, ring with core, sphere-sphere, sphere-ring etc. Coordinate-dependent asymmetry radiation force (CDARF) that arises due to laser beams misalignment and transverse profile of the laser beams is exerted on atoms, and the shape of trapped cloud is changed with the misalignment parameter. We use equations of motion that takes into account the Zeeman sublevels of the 87Rb atom, magnitude and direction of magnetic field, polarization of trapping lasers, and transverse profile of the laser beams. A theoretical analysis of the equation of motion for the trapped atom explained all the experimental observations.

• Convergence Security Journal
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• v.23 no.1
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• pp.3-8
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• 2023

Multi-domain optical transport networks are not fundamentally interoperable and require an integrated orchestration mechanism and path provision mechanism at the entire network level. In addition, ensuring network survivability is one of the important issues. MPLS-TP (Multi-Protocol Label Switching-Transport Profile) defines various protection/recovery methods as standards, but does not mention how to calculate and select protection/recovery paths. Therefore, an algorithm that minimizes protection/recovery collisions at the optical circuit packet integrated network level and calculates and sets a path that can be rapidly protected/recovered over the entire integrated network area is required. In this paper, we proposed an algorithm that calculates and sets up a path that can be rapidly protected and restored in a T-SDN network composed of multiple ring-mesh topology.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.3
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• pp.123-129
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• 2000

To make high accuracy cutting of long materials and a piston for the engines it must be necessary to keep the thermal stability of spindle and tail stock in CNC lathe. If a object is clamped at the ends the thermal expansion and cutting process generate the deflection of cutting objects. Especially in the case of a piston ring piston ovality and piston profile the influences of deflection are very serious. In order to solve the problems most of piston cutting are worked under simply support. However the prob-lems exist yet. Therefore this paper proposes the new structure of tail stock which can compensates the deflection.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.361-366
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• 2000

To make high precision cutting of long materials or a piston for the engines, it must be necessary to keep the stability of spindle and tail stock in CNC lathe. If a object is clamped at the ends, the thermal expansion and cutting generated in cutting process appear as the deflection of in cuttings objects. Especially, of a piston ring, piston ovality and piston profile, the influences are very serious. In order to solve the problems most of piston cutting are worked in simply support. However, the problems exist, yet.

• Journal of Power System Engineering
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• v.7 no.3
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• pp.23-28
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• 2003

In heavy nuclear power plant, high energy through main steam line is provided to turbine that generate the electric power. Since plant had generated power, high noise has been occurred. Noise make equipments and work environment worse. For finding out the location and the cause of making noise, noise was measured along main steam line at open/close test of Main Steam Isolation Valve (MSIV hereafter). As the result, it was identified that the vortex shedding in the cavity of MSIV is main noise source. The profile change of MSIV seat ring was proposed as the method of noise reduction. After filletting MSIV seat ring, the noise level reduced $10{\sim}20dB$ compared before the change of profile.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.146-151
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• 2009

A Gaussian beam of single mode fiber laser was changed into a ring-shaped pattern after it was transmitted through the hollow optical fiber. The ring-shaped beam was focused on a plane by an f-. lens and it was scanned by a Galvano-mirror. The spatial profile of laser energy incident on a plane had two peaks at both sides of the scanned linear track. The profile was compared with the result obtained when the Gaussian beam was dithered transversely by an acousto-optic modulator. It is found that hollow optical fiber beam shaper can replace acousto-optic beam dithering device which is employed in a laser induced thermal printing system.

• Korean Journal of Optics and Photonics
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• v.12 no.6
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• pp.496-502
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• 2001

We generated a nondiffracting beam and investigated its intensity profile on propagation. We first obtained an annular output beam from Nd:YAG laser with a negative branch unstable ring resonator and, using a 1m focal length lens, we generated a Bessel- Gauss beam. The inner radius of the annular output beam was 2.57 mm and the ring width was 0.145 mm. The intensity profile of the nondiffracting beam did not show any appreciable diffraction up to 33 m distance from the focal lens. This result was compared with the theory.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.4
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• pp.245-252
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• 2016

Girth gears are applied in the mining, cement, and mineral processing industries and used in various types of horizontal mills, rotary dryers and kilns, and other heavy-gear ring applications. The large ring gears are normally fitted outside mills or kilns to provide the primary rotational drive. Recently, an external pinwheel gear set (e-PGS) was introduced to overcome manufacturing problems associated with girth gears. e-PGS is also suitable for low-speed, heavy-duty mechanical transmission and dusty and poor-lubrication conditions. This paper first presents a new profile modification of root relief for the e-PGS cam pinion. We then investigate load-stress factors to estimate the surface fatigue life by varying the shape design parameters. The results show that the contact fatigue life of an e-PGS can be extended significantly by increasing the profile shift coefficient. However, support bearing life of the pinwheel depends more on the contact force distribution than the profile shift coefficient.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.21-29
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• 2016

To overcome the large ring gear manufacturing problems seen in slewing bearings and girth gears, pin gear drive units have been developed. Among them, a novel slewing bearing with an internal pinwheel gear set (i-PGS) is introduced in this paper. First, we consider the exact cam pinion profile of i-PGS with the introduction of a profile shift coefficient. Furthermore, a new root relief profile modification for the i-PGS cam pinion is presented. Then, the contact stresses are investigated to determine the characteristics of the surface fatigue by varying the shape design parameters. The results show that the contact stresses of i-PGS can be reduced significantly by increasing the profile shift coefficient. In addition, the contact ratio, a measure of teeth overlapping action, decreases with the decrease of the allowable pressure angle.