• Korean Journal of Materials Research
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• v.14 no.6
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• pp.436-442
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• 2004

Elastic and plastic deformation behaviors of the high purity aluminum and the silica glass were studied using nanoindentation and finite element analysis(FEA) techniques. Berkovich- and cone-type indenters were used for the nanoindentation test. Deformation behaviors and nanoindent profiles of elastic, elastic-plastic or plastic materials were clearly visualized by FEA simulation. Effects of the penetration depth and strain hardening on the deformation behavior were examined. Pile-up and sink-in behaviors were studied by using FEA technique. Degree of pile-up or sink-in was found to be a function of the ratio of elastic modulus to yield strength of materials. FEA was found to be an effective method to study deformation behaviors of materials under nanoindentation, especially in the case when pile-up or sink-in phenomena occurred.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.389-395
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• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• Steel and Composite Structures
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• v.38 no.1
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• pp.103-120
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• 2021

This research examines the eccentric compression performance of composite columns composed of recycled aggregate concrete (RAC)-filled square steel tube and profile steel. A total of 17 specimens on the composite columns with different recycled coarse aggregate (RCA) replacement percentage, RAC strength, width to thickness ratio of square steel tube, profile steel ratio, eccentricity and slenderness ratio were subjected to eccentric compression tests. The failure process and characteristic of specimens under eccentric compression loading were observed in detail. The load-lateral deflection curves, load-train curves and strain distribution on the cross section of the composite columns were also obtained and described on the basis of test data. Results corroborate that the failure characteristics and modes of the specimens with different design parameters were basically similar under eccentric compression loads. The compression side of square steel tube yields first, followed by the compression side of profile steel. Finally, the RAC in the columns was crushed and the apparent local bulging of square steel tube was also observed, which meant that the composite column was damaged and failed. The composite columns under eccentric compression loading suffered from typical bending failure. Moreover, the eccentric bearing capacity and deformation of the specimens decreased as the RCA replacement percentage and width to thickness ratio of square steel tube increased, respectively. Slenderness ratio and eccentricity had a significantly adverse effect on the eccentric compression performance of composite columns. But overall, the composite columns generally had high-bearing capacity and good deformation. Meanwhile, the mechanism of the composite columns under eccentric compression loads was also analysed in detail, and the calculation formulas on the eccentric compression capacity of composite columns were proposed via the limit equilibrium analysis method. The calculation results of the eccentric compression capacity of columns are consistent with the test results, which verify the validity of the formulas, and the conclusions can serve as references for the engineering application of this kind of composite columns.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.9
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• pp.1299-1304
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• 2010

We examined the working fracture behavior of a silicon-steel strip caused by deformation deviation by performing a pilot rolling test. The deformation deviation resulted in the edges (or center portion) of the strip being stretched and the other parts being compressed in the rolling direction; this was because of different degrees of deformation in these parts. We designed roll grooves shape to reflect the role of roll bending, which generates waviness in the strip in an actual cold rolling process, into the pilot rolling test. The material used in the rolling test was highsilicon steel (about 3%). The results of the test showed that the type of fracture in the strip specimen varied with the magnitude of the deformation deviation. The tensile stress produced at the strip edges because of the center waviness in the rolling direction was a crucial factor that resulted in edge cracking and a zigzag-shaped fracture at the center.

• Geomechanics and Engineering
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• v.33 no.5
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• pp.477-486
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• 2023

In the studies on fault dislocation of tunnel, existing literatures are mainly focused on the problems caused by normal and reverse faults, but few on strike-slip faults. The paper aims to research the deformation and failure mechanism of a tunnel under strike-slip faulting based on a model test and test-calibrated numerical simulation. A potential faulting hazard condition is considered for a real water tunnel in central Yunnan, China. Based on the faulting hazard to tunnel, laboratory model tests were conducted with a test apparatus that specially designed for strike-slip faults. Then, to verify the results obtained from the model test, a finite element model was built. By comparison, the numerical results agree with tested ones well. The results indicated that most of the shear deformation and damage would appear within fault fracture zone. The tunnel exhibited a horizontal S-shaped deformation profile under strike-slip faulting. The side walls of the tunnel mainly experience tension and compression strain state, while the roof and floor of the tunnel would be in a shear state. Circular cracks on tunnel near fault fracture zone were more significant owing to shear effects of strike-slip faulting, while the longitudinal cracks occurred at the hanging wall.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.7
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• pp.1166-1173
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• 1997

Due to progress in manufacturing techniques, the performance of the harmonic drive has been improved but not sufficiently. One of the important problems which the current harmonic drive has is that while there is the potential for having a wider tooth contact area, the total number of teeth engaged simultaneously is still small. This is mainly due to the involute tooth profile. Hence, in this study, the cycloid-type tooth profile is developed to improve this problem. This paper represents the design methodology and performance evaluation f the cycloid-type harmonic drive. Cycloide tooth profile was derived by analyzing geometry of the tooth engagement and the contact mechanisms of the tooth which were examined and analyzed by load analysis. The stress due to elastic deformation of a flexspline was also obtained by approximate formula and computer analysis. Finally, the cycloid-type harmonic drive with 1:100 speed ratio was manufactured and the performance of the harmonic drive was evaluated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.98-101
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• 2003

As the ultra precision grinding can be applied to wafering process by the refinement of the abrasive. the development of high stiffness equipment and grinding skill, the conventional wafering process which consists of lapping, etching, 1st, 2nd and 3rd polishing could be exchanged to the new process which consists of precision surface grinding, final polishing and post cleaning. Especially, the ultra precision grinding of wafer improves the flatness of wafer and the efficiency of production. Futhermore, it has been not only used in bare wafer grinding, but also applied to wafer back grinding and SOI wafer grinding. This paper focused on the flatness of the ground wafer. Generally, the ground wafer has concave profile because of the difference of wheel path density, grinding temperature and elastic deformation of the equiptment. Tilting mathod is applied to avoid such non-uniform material removes. So, in this paper, the geometric analysis on grinding process is carried out, and then, we can predict the profile of th ground wafer by using profile simulation.

• Journal of Ocean Engineering and Technology
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• v.33 no.6
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• pp.581-589
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• 2019

In order to understand the characteristics of beach deformation, in this study, numerical simulations were conducted using a 3-D hydro-morphodynamic model (HYMO-WASS-3D) to analyze the characteristics of beach deformation due to the coastal groundwater levels. HYMO-WASS-3D directly analyzed the nonlinear interaction between the hydrodynamic and morphodynamic processes in the coastal area. The simulation results of HYMO-WASS-3D showed good agreement with the experimental results on the changes in the profile of the beach in the surf and swash zones. Then, numerical simulations were conducted to examine the characteristics of beach deformation due to the variation of the level of the coastal groundwater. As a result, the beach profiles were examined in relation to the wave breaking in the surf zone and the wave uprush and backwash in the swash zone due to the differences in the water levels. This paper also discussed the temporal and spatial distributions of the velocities, vorticities, and suspended sediments in the surf and swash zones with various levels of the coastal groundwater.

• Structural Engineering and Mechanics
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• v.68 no.2
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• pp.237-245
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• 2018

This study proposes an empirical formulation to predict the maximum deformation of offshore blast wall structure that is subjected to impact loading caused by hydrocarbon explosion. The blast wall model is assumed to be supported by a simply-supported boundary condition and corrugated panel is modelled. In total, 1,620 cases of LS-DYNA simulations were conducted to predict the maximum deformation of blast wall, and they were then used as input data for the development of the empirical formulation by regression analysis. Stainless steel was employed as materials and the strain rate effect was also taken into account. For the development of empirical formulation, a wide range of parametric studies were conducted by considering the main design parameters for corrugated panel, such as geometric properties (corrugation angle, breadth, height and thickness) and load profiles (peak pressure and time). In the case of the blast profile, idealised triangular shape is assumed. It is expected that the obtained empirical formulation will be useful for structural designers to predict maximum deformation of blast wall installed in offshore topside structures in the early design stage.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.357-360
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• 2007

The profile ring rolling process of Ti-6Al-4V alloy was designed by finite element(FE) simulation and experimental analysis. The design includes geometry design and optimization of process variables. The geometry design such as initial billet and blank sizes, and final rolled ring shape was carried out with the calculation method based on the uniform deformation concept between the wall thickness and ring height. FEM simulation was used to calculate the state variables such as strain, strain rate and temperature and to predict the formation of forming defects during ring rolling process. Finally, the mechanical properties of profiled Ti-6Al-4V alloy ring product were analyzed with the evolution of microstructures during the ring rolling process.