• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• Journal of the Korean Society of Food Science and Nutrition
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• v.37 no.2
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• pp.217-222
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• 2008

The aim of the present study was to evaluate the effect of marination with mixed salt (NaCl, $CaCl_2$, and phosphate) and kiwi juice and of different cooking methods for pork loin-based products in order to establish the basic database for increasing the consumption of pork loin in Korea. Diced chilled pork loin ($2{\times}2{\times}2\;cm$) was marinated in 4 different treatments: no additives (T1), salt mix only (T2), kiwi juice only (T3), and salt mix+kiwi juice (T4). The mixed salt was prepared by the addition of NaCl, $CaCl_2$, and phosphate dissolved in water (10% of pork loin weight) at concentrations of 0.5, 0.5, and 0.3% per pork loin weight, respectively. The amount of kiwi juice was 10% of pork loin weight. After marination for 24 hrs at $4^{\circ}C$, the samples were cooked with different methods including roasting with Kimchi, pan broiling, and simmering. After simmering, pH of pork loin of T1 and T2 was higher than that of T3 and T4 (p<0.05), while that of roasted with Kimchi and pan broiled did not show any difference. Water holding capacity of T4 after pan broiling was higher than that of T1, T2, and T3 (p<0.001) and shear force of T4 was lower than other treatments. Also flavor and acceptability of T4 after pan broiling were scored higher by 11 sensory panelists (p<0.05). From this result, the pork loin-based products marinated with mixed salt and kiwi juice with pan broiling would be preferred by consumers as one of the methods to promote the consumption of pork loin in Korea.

• Korean journal of food and cookery science
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• v.30 no.6
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• pp.670-678
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• 2014

The purpose of this study was to find the optimal swelling method and condition for seacucumber to improve its taste and texture to accomodate the rapid increase of consumption. Another purpose was to try to determine an easy way to soak dried sea-cucumber under different conditions, and identify the influence of swelling time on the texture of sea-cucumber, in order to reduce preparation time and provide basic data for easy handling. After boiling or steaming for six different periods including 5, 15, 30 and 60 minutes the texture of the sea-cucumbers were compared, For the additive test, the sea-cucumbers were boiling for 30 minutes period with 4 different additives and the textures were compared, Since the texture is an important characteristic of sea-cucumber, there are many variables that affect this property including the, drying and preservation methods. This study provides basic understanding of the influence of the heating method, time and temperature on the swelling of sea-cucumber for handy use at processing sites.

• Journal of Mushroom
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• v.18 no.4
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• pp.357-364
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• 2020

The grade and price of Lentinula edodes largely differs in preference depending on the product area and seasonal factors. The product amount of autumn L. edodes was higher than that of spring L. edodes, but high quality, which is divided into "Hwago" is low in preference. Mostly, the autumn L. edodes is obtained as powder; hence, it is necessary to develop a processing method to utilize its flavor and aroma at an affordable price. Additionally, we estimated the content of 𝛽-glucan, ergosterol, vitamin D₂, reducing sugars, and free amino acids and evaluated the anti-inflammatory activity of saccharification powder of log-cultivated L. edodes. In the saccharification powders obtained via 7 min of UV irradiation of log-cultivated L. edodes, 𝛽-glucan and vitamin D₂ contents were found to be the highest, whereas ergosterol content was found to be the lowest. The content of reducing sugars ranged from 62.4 mg/L to 68.2 mg/L. The free amino acids were higher in these saccharification powders than in the control. Subsequently, RAW 264.7 cells were treated with different concentrations (10, 50, 100, 200, 300, and 500 ㎍/mL) of the saccharification powders of log-cultivated L. edodes obtained via different UV irradiation time applications. The cells showed good viability; the anti-inflammatory effect was found to be the highest at 7 min UV irradiation. Therefore, 7 min of UV irradiation was determined to be the optimum condition for manufacturing saccharification powders of log-cultivated L. edodes. Hence, saccharification powders of log-cultivated L. edodes may be used as a raw material for natural sweeteners, food additives, and in the food industry.

• Resources Recycling
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• v.32 no.1
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• pp.50-59
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• 2023

The amount of dust generated during the dissolution of scrap in an electric arc furnace is approximately 1.5% of the scrap metal input, and it is primarily collected in a bag filter. Electric arc furnace dust primarily consists of zinc and ion. The processing of zinc starts with its conversion into pellet form by the addition of a carbon-based reducing agent(coke, anthracite) and limestone (C/S control). These pellets then undergo reduction, volatilization, and re-oxidation in rotary kiln or RHF reactor to recover crude zinc oxide (60%w/w). Next, iron is discharged from the electric arc furnace dust as a solid called Fe clinker (secondary by-product of the Fe-base). Several methods are then used to treat the Fe clinker, which vary depending on the country, including landfilling and recycling (e.g., subbase course material, aggregate for concrete, Fe-source for cement manufacturing). However, landfilling has several drawbacks, including environmental pollution due to leaching, high landfill costs, and wastage of iron resources. To improve Fe recovery in the clinker, we pulverized it into optimal -sized particles and employed specific gravity and magnetic force selection methods to isolate this metal. A carbon-based reducing agent and a binding material were added to the separated coarse powder (>10㎛) to prepare briquette clinker. A small amount (1-3%w/w) of the briquette clinker was charged with the scrap in an electric arc furnace to evaluate its feasibility as an additives (carbonaceous material, heat-generating material, and Fe source).