• Title/Summary/Keyword: Process measurement system

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The Study for the CMP Automation wish Nova Measurement system (NOVA System을 이용한 CMP Automation에 관한 연구)

  • 김상용;정헌상;박민우;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.176-180
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    • 2001
  • There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

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A Study on the Universal Outer Diameter Measurement Module using LVDT (LVDT를 이용한 범용 외경측정 모듈에 관한 연구)

  • Lee, Neung-Gu;Kwac, Lee-Ku;Kim, Hong-Gun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.3
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    • pp.100-106
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    • 2017
  • A universal outer diameter measurement module was developed using a linear variable differential transformer (LVDT). This outer diameter measurement module enables simultaneous measurement of outer diameter, displacement, and perpendicularity of bench-type high-precision products by combining analogue and digital measurement principles with mechanically precise and fine adjustment functions. The developed module showed a performance of 0.001mm in measurement resolution, 0.001mm in measurement accuracy, reference surface abrasion lower than Ra 0.1864, and measurement stability of 0.002mm. Therefore, we have acquired domestic measurement technology to improve productivity by securing technical competitiveness for universal diameter measurement technology, lower production costs through import substitution, and increased quality of products with more precise measurement technology. Furthermore, a substitution effect is expected for expensive import measurement system equipment used in production, research, and inspection sites in industries that produce precision processing products such as automobile and machine components.

A study on the establishment of an MES system that converges design, processing, and measurement during cutting (절삭가공 시 설계, 가공, 측정을 융합한 MES 시스템 구축에 관한 연구)

  • Park, Hae-Woong;Lee, Seung-Wook;Han, Heui-Bong;Yun, Jae-Woong;Choi, Kye-Kwang;Han, Seong-Ryeol;Kim, Kyung-A;Lee, Chun-Kyu
    • Design & Manufacturing
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    • v.15 no.2
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    • pp.42-48
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    • 2021
  • In this paper, when manufacturing large/multi-mold parts (more than 30 core parts),A mold manufacturing (tolerance) management system was established through design-processing linkage.The mold manufacturing (tolerance) management system is a design-based measurement shape/measurement position determination system, M/C processing-linked measurement drive system,It is composed of four parts: CAD-linked measurement result analysis system and manager mold part quality management system.In addition, the constructed system was applied to the field and the effect of system construction was evaluated by comparing it with the existing process.As a result of the evaluation, the measurement precision is within 0.02mm, and the time it takes to measure after the end of processing is shorter than that of the existing process.(12 hours → 2 hours) It was shortened to 16.7%.In addition, it was confirmed that the time required for reprocessing after measurement was reduced by 25% (4 hours → 1 hour) compared to the existing process.

Development of the Performance Measurement Model of Electronic Medical Record System - Focused on Balanced Score Card - (균형성과표를 활용한 전자의무기록시스템의 성과측정 모형개발)

  • Lee, Kyung Hee;Kim, Young Hoon;Boo, Yoo Kyung
    • Korea Journal of Hospital Management
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    • v.21 no.4
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    • pp.1-12
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    • 2016
  • The purpose of this study are suggest to performance measurement model of Electronic Medical Record(EMR) and Key Performance Index(KPI). For data collection, 665 questionnaires were distributed to medical record administrators and insurance reviewers at 31 hospitals, and 580 questionnaires were collected(collection rate: 87.2%). Regarding methodology, Critical Success Factor(CSF) and index of the information system were derived based on previous studies, and these were set as performance measurement factors of EMR system. The performance measurement factors were constructed by perspective using BSC, and analysis on causal relationship between factors was conducted. A model of causal relationship was established, and performance measurement model of EMR system was proposed through model validation. Analysis on causal relationship between performance management factors revealed that utility cognition of the learning & growth perspective factor had causal relationship with job efficiency(${\beta}=0.20$) and decision support(${\beta}=0.66$) of the internal process perspective factors, and security had causal relationship with system satisfaction(${\beta}=0.31$) of the customer perspective factor. System quality had causal relationship with job efficiency(${\beta}=0.66$) and decision support(${\beta}=0.76$) of the internal process perspective factors, all of which were statistically significant(P<0.01). Job efficiency of the internal process perspective had causal relationship with system satisfaction(${\beta}=0.43$), and decision support had causal relationship with decision support satisfaction(${\beta}=0.91$) and job satisfaction (${\beta}=0.74$), all of which were statistically significant(P<0.01). System satisfaction of the customer perspective had causal relationship with job satisfaction(${\beta}=0.12$), job satisfaction had causal relationship with cost reduction(${\beta}=0.53$) of the financial perspective, and decision support satisfaction had causal relationship with productivity improvement(${\beta}=0.40$)of the financial perspective(P<0.01). Also, cost reduction of the financial perspective had causal relationship with productivity improvement(${\beta}=0.37$), all which were statistically significant(P<0.05). Suitability index verification of the performance measurement model whose causal relationship was found to be statistically significant revealed that $X^2/df=2.875$, RMR=0.036, GFI=0.831, AGFI=0.810, CFI=0.887, NFI=0.838, IFI=0.888, RMSEA=0.057, PNFI=0.781, and PCFI=0.827, all of which were in suitable levels. In conclusion, the performance measurement indices of EMR system include utility cognition, security, and system quality of the learning & growth perspective, decision support and job efficiency of the internal process perspective, system satisfaction, decision support satisfaction, and job satisfaction of the customer perspective, and productivity improvement and cost reduction of the financial perspective. In this study, it is expected that the performance measurement indices and model of EMR system which are suggested by the author, will be a measurement tool available for system performance measurement of EMR system in medical institutions.

Real-Time Measurement Technology for Bi-directional Diameter in Ground Spindles (IN-LINE 진원도 측정을 위한 비접촉식 3접점법)

  • Bae, Jong-Il;Je, Chang-Woo;Kim, Do;Lee, Dan-Hyung;Jung, Young-Ill
    • Proceedings of the KIEE Conference
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    • 2002.07d
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    • pp.2537-2539
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    • 2002
  • This paper presents an in-process measurement system for shaft radius measurement during grinding process. This system does not require to stop the grinding process, which can enhance productivity and quality. For data analysis, the measurement system is modeled as a linearized discrete form where the states with noise are estimated by an extended Kalman filter. This system has been validated through simulations and experiments.

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Improvement of machining process for mold parts using on-machine measuring system and CAM automation (기상측정 및 CAM 자동화를 통한 금형 제작 공정 개선)

  • Park, Hae-Woong;Yun, Jae-Woong;Lee, Chun-Kyu
    • Design & Manufacturing
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    • v.16 no.1
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    • pp.21-26
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    • 2022
  • In the CNC machining process, problems such as lowering of machine operation rate, setting errors, and machining precision occur due to the increase in setting time and preparation time. These machining errors cause delays in delivery and increase in cost due to an increase in the number of mounting and dismounting of the workpiece, an increase in measurement and reprocessing time, and an increase in the finishing time in the assembly process. Therefore, in this study, by automating the setting of the work piece using OMV (On Machine Verification), which is a meteorological measurement system, the preparation time for machining the work piece and the setting accuracy were improved, the rework rate was reduced, and the mold manufacturing process was shortened. Through the advancement, standardzation, and automation of the mold part manufacturing process, we have improved productivity by minimizing low-value-added repetitive tasks. In addition, the measurement time was reduced by more than 50% and the machining measurement rate was improved by more than 20%, eliminating repetitive work for correcting machining defects, and reducing the work preparation time by more than 15% through automatic setting.

A Study for the Measurement System Assessment (측정시스템 평가에 관한 연구)

  • 백재욱
    • Journal of Korean Society for Quality Management
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    • v.26 no.4
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    • pp.124-142
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    • 1998
  • It is essential to have a correct measurement system assessment to help improve process or quality. In this paper, we emphasize that a confidence interval a, pp.oach for the parameters of measurement error study and GR&R is crucial and a simple a, pp.oach for constructing them is presented. We also discuss on the issue of linearity of the gauge. Next, we try to reveal the relationship between measurement error and the process capability index. Finally some aspects of conducting the measuring experiment concerning the number of parts, number of measurements per part, and recommendations on how the experiment is to be performed will be considered.

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On-line Measurement and Characterization of Nano-web Qualities Using a Stochastic Sensor Fusion System Design and Implementation of NAFIS(NAno-Fiber Information System)

  • Kim, Joovong;Lim, Dae-Young;Byun, Sung-Weon
    • Proceedings of the Korean Fiber Society Conference
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    • 2003.10a
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    • pp.45-46
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    • 2003
  • A process control system has been developed for measurement and characterization of the nanofiber web qualities. The nano-fiber information system (NAFIS) developed consists of a measurement device and an analysis algorithm, which are a microscope-laser sensor fusion system and a process information system, respectively. It has been found that NAFIS is so successful in detecting irregularities of pore and diameter that the resulting product has been quitely under control even at the high production rate. Pore distribution, fiber diameter and mass uniformity have been readily measured and analyzed by integrating the non-contact measurement technology and the random function-based time domain signal/image processing algorithm. Qualifies of the nano-fiber webs have been revealed in a way that the statistical parameters for the characteristics above are calculated and stored in a certain interval along with the time-specific information. Quality matrix, scale of homogeneity is easily obtained through the easy-to-use GUI information. Finally, ANFIS has been evaluated both for the real-time measurement and analysis, and for the process monitoring.

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A study of On-Machine Measurement for PC-NC system

  • Yoon, Gil-Sang;Kim, Gun-Hee;Cho, Myeong-Woo;Seo, Tae-Il
    • International Journal of Precision Engineering and Manufacturing
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    • v.5 no.1
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    • pp.60-68
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    • 2004
  • The purpose of this paper is to establish an effective inspection system by using OMM (On-Machine Measurement) system based PC-NC. This system can reduce manufacturing lead time because a workpiece is inspected at every machining process and the manufacturing system which includes inspection faculty is able to realize on-line process on CNC machining center. The proposed OMM system is composed of a few algorithms for determination of inspection parameters. It is accomplished by determining the number of measuring points, their location, measuring path using fuzzy logic, Hammersley's method, TSP (Traveling Salesperson Problem) algorithm. The inspection feature applied to this system is based on machining feature. This method is tested by simulation and experiment that are analyzed measuring data and geometry tolerance.

A Study of Gage R&R Analysis Considering the Variations of Between-Within Group and Within Part (군간-군내-부품내 변동을 고려한 Gage R&R 분석에 관한 연구)

  • Lee, Seung-Hun;Lee, Chang-U
    • Proceedings of the Korean Operations and Management Science Society Conference
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    • 2005.05a
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    • pp.975-982
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    • 2005
  • The purpose of the Gage R&R study is to determine whether a measurement system is adequate for monitoring a process. If the measurement system variation is small relative to the process variation, then the measurement system is deemed 'adequate'. The sources of variation associated with the measurement system are compared using an analysis of variance (ANOVA) model, in general. A typical ANOVA model used in a standard Gage R&R study is the two-factor random effect model. Then, the ANOVA partitions the total variation into three categories: repeatability, reproducibility, part variation. However, if the process variation possesses the between group variation, within group variation, and within-part variation, these variations can cause the measurement system evaluation to provide misleading results. That is, in the standard Gage R&R study these variations affect the estimate of repeatability, reproducibility, or both. This paper presents a four-factor nested factorial ANOVA model which explicitly considers these variations for the Gage R&R study. The variance component estimates are derived by setting the EMS equations equal to the corresponding mean square from the ANOVA table and solving. And the proposed model is compared with the standard Gage R&R model.

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