• Title/Summary/Keyword: Process Stage

Search Result 6,385, Processing Time 0.036 seconds

Optimal Design and Control of xy${\theta}$ Fine Stage in Lithography System (리소그라피 장비에서 xy${\theta}$미세구동기의 최적 설계 및 제어)

  • 김동민;김기현;이성규;권대갑
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.19 no.12
    • /
    • pp.163-170
    • /
    • 2002
  • The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

Fashion Adoption Process Model (유행채택모형 연구)

  • Lee, Mi-Ah;Rhee, Eun-Young
    • Journal of the Korean Society of Clothing and Textiles
    • /
    • v.34 no.10
    • /
    • pp.1671-1686
    • /
    • 2010
  • This research presents a fashion adoption process model based on collective selection theory and examines the differences in the consumer adoption process of merchandising types at each stage of the fashion cycle. A questionnaire survey of 472 adult women was conducted for the purpose of empirical analysis of the fashion adoption process. The results show that fashionability and popularity (the primary attributes of fashion goods) have direct effects on resistance and adoption as well as indirectly through social compatibility and personal compatibility in the evaluation stage. In conclusion, on the theoretical side, this study verified the fashion process model according to consumer participation in the adoption process of fashion goods existing at different stage of the fashion cycle, internally through negotiating with individual tastes, and externally through interacting with others. On the practical side, this study presented an empirical result that can apply to merchandizing strategy centered on merchandizing type by connecting consumer adoption for the fashion goods released by actual companies.

A study on the fabrication method of middle size LGP using continuous micro-lenses made by LIGA reflow

  • Kim, Jong-Sun;Ko, Young-Bae;Hwang, Chul-Jin;Kim, Jong-Deok;Yoon, Kyung-Hwan
    • Korea-Australia Rheology Journal
    • /
    • v.19 no.3
    • /
    • pp.171-176
    • /
    • 2007
  • LCD-BLU (Liquid Crystal Display-Back Light Unit) of medium size is usually manufactured by forming numerous dots with $50{\sim}300\;{\mu}m$ in diameter by etching process and V-grove shape with $50\;{\mu}m$ in height by mechanical cutting process. However, the surface of the etched dots is very rough due to the characteristics of the etching process and V-cutting needs rather high cost. Instead of existing optical pattern made by etching and mechanical cutting, 3-dimensional continuous micro-lens of $200\;{\mu}m$ in diameter was applied in the present study. The continuous micro-lens pattern fabricated by modified LIGA with thermal reflow process was tested to this new optical design of LGP. The manufacturing process using LIGA-reflow is made up of three stages as follows: (i) the stage of lithography, (ii) the stage of thermal reflow process and (iii) the stage of electroplating. The continuous micro-lens patterned LGP was fabricated with injection molding and its test results showed the possibility of commercial use in the future.

Landfill Leachate Treatment and Boron Removal by Reverse Osmosis (RO막을 이용한 매립지 침출수 처리 및 붕소 제거)

  • Jung, Soojung;Na, Sukhyun;Bae, Sangok;Lim, Byungjin
    • Journal of Korean Society on Water Environment
    • /
    • v.28 no.5
    • /
    • pp.657-662
    • /
    • 2012
  • This study was carried out to evaluate the removal rate of organic and inorganic matters from landfill leachate using pre-treatment process as coagulation and limonite adsorption, and membrane process as RO (reverse osmosis) and NF(nanofiltration). By adding limonite adsorption as pre-treatment process, about 40% of organic matters in leachate was removed through pre-treatment process and 74.7% of boron was removed after RO process without pH adjustment. The rejection rate of boron in RO process mainly depends on the pH and increased at pH value of 10. RO process was performed as two stage system adjusting pH condtion to 7 and 10 in second RO stage for boron removal. Most (>90%) of TOC, Cl- and inorganic matters as Ca was rejected in first RO stage, the residue was rejected in second RO and the rejection rate was above 97%. Considering economic efficiency of operation cost, NF substituted for the first RO and total removal rate of TOC was above 90%. Through RO system toxicity to Daphnia in leachate was removed completely.

Quality Management Model for Process Performance Level and Development Technology (프로세스 이행 수준과 개발 기술 품질 관리 모델)

  • Park, J.H.;Park, Y.S.;Jung, H.T.;Kim, S.H.
    • Electronics and Telecommunications Trends
    • /
    • v.32 no.6
    • /
    • pp.105-115
    • /
    • 2017
  • This paper describes a project - based quality management model that identifies development technologies and codes while at the same time verifying the ability to implement processes that are essential in R & D projects. In order to verify the process implemented in the R & D project implementation, there are review, checking points, and evaluating methods the process performance levels for five processes such as defining requirements which is the beginning stage of system development, testing process which is the completion stage of system development, and project management and peer review process for project management and support in the proposed project-based quality management model. For development technology and code validation, the model included the documented test cases for each requirement by the developer in the requirements definition stage, debugging and testing in the design and implementation stages, static analysis and open source licence verification procedure, and system environment. After applying the model in SW development R&D project for evaluating the process performance, and verifying the development technology and the code, the developers responded that the improvement in the development technique and the code, and upgrade of process performance level for project are more than 10%.

Integrated Process Planning and Scheduling for Machining Operation in Shipbuilding (선각 내업 가공작업의 공정계획과 일정계획의 통합화 방안 연구)

  • Cho, Kyu-Kab;Oh, Jung-Soo;Kim, Young-Goo
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.14 no.10
    • /
    • pp.75-84
    • /
    • 1997
  • This paper describes the development of an integrating method for process planning and scheduling activities for block assembly in shipbuilding. A block is composed of several steel plates and steel sections with the predetermined shapes according to the ship design. The parts which constitute the block are manufac- tured by cutting and/or bending operations, which are termed as machining operation in this paper. The machining operation is the first process for block assembly which influences the remaining block assembly processes. Thus process planning and scheduling for machining operation to manufacture parts for block are very important to meet the assembly schedule in the shipyard. An integrating method for process plan- ning and scheduling is developed by introducing the concept of distributed process planning and scheduling composed of initial planning, alternative planning and final planning stages. In initial planning stage, nesting parts information and machining emthods are generated for each steel plate. In alternative plan- ning stage, machine groups are selected and workcenter dispatching information is generated. In final planning stage, cutting sequences are determined. The integrated system is tested by case study. The result shows that the integrated system is more efficient than existing manual planning system.

  • PDF

Environmental Impact of Soil Washing Process Based on the CO2 Emissions and Energy Consumption (토양세척 공정의 환경영향 분석 - 이산화탄소 배출량 및 에너지 사용량을 중심으로)

  • Kim, Do-Hyung;Hwang, Bo-Ram;Her, Namguk;Jeong, Sangjo;Baek, Kitae
    • Korean Chemical Engineering Research
    • /
    • v.52 no.1
    • /
    • pp.119-125
    • /
    • 2014
  • This study evaluated the environmental impacts of a soil washing (SW) process, especially, we compared the on-site and off-site remediation of TPH-contaminated soil using green and sustainable remediation (GSR) tool. To assess relative contribution of each stage on environmental footprints in the entire soil washing process, we classified the process into four major stages: site foundation (stage I), excavation (stage II), separation & washing (stage III), and wastewater treatment (stage IV). In on-site SW process, the relative contribution of $CO_2$ emissions and energy consumption were 87.1% and 80.4%, respectively in stage I, and in off-site SW process, the relative contribution of $CO_2$ emissions and energy consumption were 82.7% and 80.5%, respectively in stage II. In conclusion, the major factor contributing environmental impact in the SW process were consumable materials including steel and stainless steel for washing equipment in on-site treatment and fuel consumption for transportation of soil in off-site treatment.

Design of Ultra-precision Micro Stage using Response Surface Methodology (반응표면분석법을 이용한 초정밀 마이크로스테이지의 설계)

  • Ye, Sang-Don;Min, Byeong-Hyeon;Lee, Jae-Kwang
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.5 no.1
    • /
    • pp.39-44
    • /
    • 2006
  • Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

  • PDF

Simulation and Control performance evaluation of Ultra-Precision Single Plane X-Y Stage (초정밀 평면 X-Y 스테이지의 시뮬레이션 및 제어성능 평가)

  • 곽이구;김재열;한재호;김영석;안재신;노기웅
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
    • /
    • 2002.04a
    • /
    • pp.422-428
    • /
    • 2002
  • In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

  • PDF

A Comparison of Alternative Approaches to Determinants of DEA Efficiency Scores (DEA효율성점수의 결정요인 분석방법 비교)

  • Kim, Seong-Ho
    • Journal of the Korean Operations Research and Management Science Society
    • /
    • v.35 no.2
    • /
    • pp.19-35
    • /
    • 2010
  • Many papers have used a two-stage approach of first calculating DEA efficiency scores and then seeking to correlate these scores with various environmental variables. Most of the studies have not checked whether such a two-stage approach is statistically valid for identifying significant environmental variables. Recently Simar and Wilson (2007) (SW) introduce a sensible data generating process and bootstrap procedure based on truncated regression for the two-stage approach. Banker and Natarajan (2008) (BN) provide a statistical foundation for the two-stage approach comprising a DEA followed by an ordinary least squares or maximum likelihood estimation. Researchers have to identify an approach suitable for their research circumstances in terms of properties, merits, demerits, and robustness to plausible departures from its chosen data generating process. We summarize the foundations and properties of the two-stage procedures suggested by SW and BN. And we discuss merits and demerits of those procedures. Also using Monte Carlo simulation we assess their relative performance under several misspecified settings.