• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.6
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• pp.622-634
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• 2003

This paper is concerned with a computational method for recovering a crack shape of steam generator tubes of nuclear plants. Problems on the shape identification are discussed arising in the characterization of a structural defect in a conductor using data of eddy current inspection. A surface defect on the generator tube ran be detected as a probe impedance trajectory by scanning a pancake type coil. First, a mathematical model of the inspection process is derived from the Maxwell's equation. Second, the input and output relation is given by the approximate model by virtue of the hybrid use of the finite element and boundary element method. In that model, the crack shape is characterized by the unknown coefficients of the B-spline function which approximates the crack shape geometry. Finally, a parameter estimation technique is proposed for recovering the crack shape using data from the probe coil. The computational experiments were successfully tested with the laboratory data.

• International Union of Geodesy and Geophysics Korean Journal of Geophysical Research
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• v.23 no.1
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• pp.12-17
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• 1995

Space explorations by spacecraft have detected the solar wind and the interplanetary magnetic field (IMF), whose existences had been suggested to explain the narrow comet plasma tail formation before the space age. Thereafter, a global magnetic structure seperating the opposite polarity regions of IMF in the heliosphere was discovered (Wilcox and Ness, 1965). It is called helispheric current sheet (HCS). Comets have been proved as the useful heliospheric probes. Recently, another capability of comet as a probe of HCS was suggested by Yi (1994). In the process of comet plasma tail disconnection events (EDs) showing the ray folding and main tail severance between the folding rays (Brandt, 1982), the folding rays preceding DE might be the visualization of HCS draped around comet, In order to test this new idea, the association of comet Halley 16 DEs with comet crossings of HCS confirmed by spacecraft observations at the time of comet Halley apparition 1985~1986 was investigated.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.7 no.4
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• pp.600-610
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• 1995

When combustion gas is cooled down below the dew point of sulfuric acid vapor in the heat recovery systems, condensation occurs. Since the condensed sulfuric acid solution causes low-temperature corrosion in materials, it is important to measure the SOx dew point by electric measurement. In this study, two kinds of probes having electric gaps of 1mm or 2mm were used. and experiments were carried out by the parameters of sulfuric acid vapor and water vapor concentration. The changes of electric current caused by sulfuric acid condensed on the surface of probe according to the cooling rate and the probe head surface temperature were sudied. The opimum cooling rate was decreased with the increasing of water vaper concentration regardless of sulfuric acid concentration. The sensitivity of electric current is improved for the narrower gap(1mm) of ring electrodes, but it rarely affects the SOx dew point measuring of different probes according to the change of cooling rate.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Journal of the Korean Vacuum Society
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• v.10 no.1
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• pp.112-118
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• 2001

Magnetic field is commonly used in low temperature processing plasmas to enhance the performance of the plasma reactors. E$\times$B magnetron or surface multipole configuration is the most popular. However, the properties of capacitively coupled rf plasma confined by axial static magnetic field have rarely been studied. With these background, the effect of magnetic field on the characteristics of capacitively coupled 13.56 MHz/40 KHz argon plasma was studied, Ion saturation current, electron temperature and plasma potential were measured by Langmuir probe and emissive probe. At low pressure region (~10 mTorr), ion current increases by a factor of 3-4 due to reduction of diffusion loss of charged particles to the wall. Electron temperature slightly increases with magnetic field for 13.56 MHz discharge. However, for 40 KHz discharge, electron temperature decreased from 1.8 eV to 0.8 eV with magnetic field. It was observed that the magnetic field induces large temporal variation of the plasma potential. Particle in cell simulation was performed to examine the behaviors of the space potential. Experimental and simulation results agreed qualitatively.

• Nuclear Engineering and Technology
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• v.54 no.10
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• pp.3614-3619
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• 2022

To operate the ion cyclotron resonance heating (ICRH) antennas in a better heating state and produce relatively low impurities, it is necessary to control the antenna spectrum by changing the antenna phasing. As the electrical length of the antenna feeding transmission lines is changing as a matter of the standing wave pattern at the ceramic supports, 90° elbows, T-connectors and antenna loops, we chose to measure the current at the grounding points of the antenna loops by antenna strap probe. The voltage drops along a small, several millimeter-long paths at the end of the antenna loops give a signal that is proportional to the current in the antenna loop. Through the simulation of the antenna strap probe and the actual measurement of the antenna phasing under vacuum conditions, the reliability of the antenna strap probe based diagnostic system have been successfully proved. Moreover, this system was successfully applied to the ICRH daily experiments in the spring of 2021. In the near future, the active real-time feedback control of the antenna phasing system will be developed based on this diagnostic system in the EAST tokamak.

• Journal of Astronomy and Space Sciences
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• v.39 no.3
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• pp.117-126
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• 2022

The Ionospheric Anomaly Monitoring by Magnetometer And Plasma-probe (IAMMAP) is one of the scientific instruments for the Compact Advanced Satellite 500-3 (CAS 500-3) which is planned to be launched by Korean Space Launch Vehicle in 2024. The main scientific objective of IAMMAP is to understand the complicated correlation between the equatorial electro-jet (EEJ) and the equatorial ionization anomaly (EIA) which play important roles in the dynamics of the ionospheric plasma in the dayside equator region. IAMMAP consists of an impedance probe (IP) for precise plasma measurement and magnetometers for EEJ current estimation. The designated sun-synchronous orbit along the quasi-meridional plane makes the instrument suitable for studying the EIA and EEJ. The newly-devised IP is expected to obtain the electron density of the ionosphere with unprecedented precision by measuring the upper-hybrid frequency (f_UHR) of the ionospheric plasma, which is not affected by the satellite geometry, the spacecraft potential, or contamination unlike conventional Langmuir probes. A set of temperature-tolerant precision fluxgate magnetometers, called Adaptive In-phase MAGnetometer, is employed also for studying the complicated current system in the ionosphere and magnetosphere, which is particularly related with the EEJ caused by the potential difference along the zonal direction.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.1 s.244
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.437-437
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• 2010

DC Hollow cathode 방전은 약 100여 년 전, Paschen에 의해 실험된 이후로 광원, 스퍼터링 공정, 이온빔 소스 등 다양한 분야에 이용되어 왔다. 최근 태양전지용 마이크로 결정질 실리콘 증착 시, RF CCP의 전극에 복수의 홀 혹은 트렌치 구조를 두어 Hollow cathode 방전 효과를 이용하여 향상된 공정 속도로 공정을 진행한다. 그러나 RF-MHCD (Multi hole cathode discharge) 공정을 위한 최적 규격의 홀 기에 관한 연구는 그 중요성과 응용성에도 불구하고 깊게 이루어지지 못한 바 있다. 그러므로 저자는 Capacitively Coupled Plasma (전극 간격 : 4cm, 전극 직경 : 14cm) 장비에서 평면 전극과 10mm 깊이와 각각 3.5mm, 5mm, 7mm, 10mm 직경의 홀이 있는 4개의 전극을 이용하여 Argon RF-MHCD 방전을 관찰하여 조건 별 최적의 홀 전극 디자인을 도출하였다. 실험 조건은 64.5mTorr ~ 645mTorr압력 범위/ 1A~9A이며, 플라즈마는 전극 사이 중앙에 설치한 RF-compensated Langmuir Probe와, 전극과 전기적으로 접촉하는 1000:1 Probe 와 Voltage-Current Probe를 이용하여 측정되었다. 실험 결과 압력 조건 별로, 최적의 전자 밀도를 유도하는 전극 상 홀의 직경이 달라짐을 확인하였다.

• Proceedings of the Korean Nuclear Society Conference
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• 2002.05a
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• pp.249.1-249
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• 2002