• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1649-1650
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• 2006

반도체 소자의 선폭이 나노미터 스케일로 진입함에 따라 소자의 물리적 특성을 나노미터 스케일에서 정밀하게 측정하고자 하는 요구가 증대되고 있다. Atomic Force Microscopy (AFM)은 나노미터 이하의 해상도를 가지고 물질 표면의 기하하적, 전기적 특성 등을 측정할 수 있으므로 나노소자 연구에 필수적인 도구가 되었다. 그러나 AFM은 낮은 측정속도와 탐침의 기하학적 형상에 의한 AFM 영상의 왜곡 등과 같은 치명적인 단점도 가지고 있다. AFM의 낮은 측정 속도를 개선하기 위해서 진보된 마이크로머시닝기술을 이용하여 캔틸레버의 크기를 줄이거나 캔틸레버 위에 박막 구동기를 집적시키는 등의 노력이 진행되고 있으나, 이 경우 전통적인 식각 공정을 이용하여 캔틸레버 위에 tip을 형성하는 것이 매우 어렵다. 본 연구에서는 이미 제작된 캔틸레버 위에 전자빔 조사법을 이용하여 탄소상 tip을 직접 성장시킴으로써 전통적인 식각 공정에 비해 매우 간단하고 값싸며, 활용도가 높은 공정을 개발하였다. 탄소상 tip 성장에 필요한 탄소 소스는 dipping 방법을 이용하여 공급하였고, 시분할법을 사용하여 캔틸레버의 원하는 위치에 tip을 성장시킬 수 있었다. 이렇게 제작된 tip은 최대 $5{\mu}m$ 높이까지 가능했으며, 종횡비는 10:1 이상이어서 tip의 형상에 의한 AFM 영상 왜곡 현상을 최소화할 수 있을 것으로 기대된다.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.31 no.4C
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• pp.117-125
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• 2011

The practical use of the electrical resistivity, which can makes the acquirement of the high resolution data in specific area, is increased in order to obtain a reasonable data for a ground investigation. The objective of this study is development of TRPF(Temperature-compensated Resistivity Probe for Field test), and an application in the field test for obtaining a reliable electrical resistivity value about considering the temperature effects. Temperature sensor is attached at 15mm, 30mm, 90mm below from the cone tip in consideration with the results of temperature transient process of cone probe and safety, and the angle of cone tip is $60^{\circ}$ for geometrical reason and minimizing the disturbance during the penetration test. Diameter of the cone probe is equally 35.7mm and penetration rate is 2 cm/sec for a comparison with standard cones such as CPT and SPT, and others. The temperature change is instantly observed around $4^{\circ}C$ when touching the ground, and the comparing results among the other cones indicates that the temperature compensation should be conducted in the ground survey using the electrical resistivity. This study shows that the necessity of temperature effects compensation during penetration test through the development and field verification of TRPF (Temperature-compensated Resistivity Probe for Field test).

• The KSFM Journal of Fluid Machinery
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• v.9 no.2 s.35
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• pp.19-24
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• 2006

Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction of patterns and surface variation in the micro process. In this study, nuo fountain-pen is composed with reservoir, micro channels, tip and scondary chamber. Instead of traditional method only using capillary force, liquid can be definitely and exactly injected with membrane pumping by the repulse force of tip. It is dfficult to perform experiments in the micro range so that we carried out a numerical analysis for internal flow, using a commercial code, FlUENT, The velocity, pressure and flow rate are obtained under laminar, unsteady, three-dimensional incompressible flow with no-slip condition, and results are graphically described.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.73-76
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• 2004

Tapping mode atomic force microscopy (TM-AFM) utilizes the dynamic response of a resonating probe tip as it approaches and retracts from a sample to measure the topography and material properties of a nanostructure. We present recent results based on numerical techniques that yield new perspectives and insight into AFM. It is compared that the dynamic models including van der Waals and Derjaguin-Muller-Toporov(DMT) or Johnson-Kendall-Roberts(JKR) contact forces demonstrates that periodic solutions can be represented with respect to the approach distance and excitation frequency.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.1
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• pp.75-84
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• 2000

Performance and flow characteristics of a small forward swept propeller fan for home refrigerators are studied experimentally. An unusual discontinuity is observed in the performance curve of the fan. Mean flow fields measured with as-hole Pitot probe reveal that the flow is axial at the high flow rate and radial at the low flow rate. The flow structure changes abruptly across the discontinuity. Unsteady flow measurements with a set of hot-wire probes indicate that near the discontinuity a single-cell stall rotates at 40% speed of the fan speed, while away from the discontinuity the flow shows periodic variation corresponding to the blade passage frequency. Phase-lock averaged flow fields measured with a triple-sensor hot-wire probe show that there appears radially inward flow over the pressure side of the blade and the outward passage flow over the tip.

• Tribology and Lubricants
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• v.29 no.2
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• pp.91-97
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• 2013

Quantifying the nanoscale force between the atomic force microscopy (AFM) probe of a force-sensing cantilever and the sample is one of the challenges faced by AFM researchers. The normal force calibration is straightforward; however, the lateral force is complicated due to the twisting motion of the cantilever. Force measurement in a liquid environment is often needed for biological applications; however, calibrating the force of the AFM probes for those applications is more difficult owing to the limitations of conventional calibration methods. In this work, an accurate nondestructive lateral force calibration method using multiple pivot loading was proposed for liquid environment. The torque sensitivity at the location of the integrated probe was extrapolated based on accurately measured torque sensitivities across the cantilever width along a few cantilever lengths. The uncertainty of the torque sensitivity at the location of the integrated tip was about 13%, which is significantly smaller than those for other calibration methods in a liquid environment.

• Journal of the Korean Ceramic Society
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• v.29 no.9
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• pp.705-710
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• 1992

For the ultimate purpose of mapping, with a high precision, the local electrochemical potentials of an ionic carrier in nonisothermal conditions, an ionic probe for Ag+ ions, Pt/Ag/AgI, has been miniaturized to a tip size of 20∼30$\mu\textrm{m}$, by an electrochemical technique combined with gas (I2)/solid (Ag) reaction, and its performance checked by measuring the partial electronic and ionic conductivities of Ag2S from the ion and electron blocking cells, Ag/Ag2S/Pt and Ag/Ag2S/AgI/Ag, respectively. The results have firmly confirmed that the miniaturzed probe function quite validly and be very promising.

• Journal of Magnetics
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• v.11 no.3
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• pp.135-138
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• 2006

We studied local anodization on permalloy $(Ni_{80}Fe_{20})$ thin film with an atomic force microscope (AFM), which was performed by applying a voltage between the permalloy sample and conductive AFM tip. Comparing with anodization on Si (100) substrate, nano-structures on the permalloy thin film was fabricated with low processability.In order to improve the processability on the permalloy thin film, we used dot-fabrication method, thatis, a conductive AFM probe was kept at a position on the film during the anodization process.

• YAKHAK HOEJI
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• v.46 no.5
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• pp.331-336
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• 2002

The purpose of this study is to develop a non-invasive blood glucose measurement method by a portable near infrared (NIR) system which was newly integrated by our lab. The portable NIR system includes a tungsten halogen lamp, a specialized reflectance fiber optic probe and a photo diode array type InGaAs detector; which was developed by a microchip technology based on the lithography. Reflectance NIR spectra of different parts of human body (finger tip, earlobe, and inner lip) were recorded by using a fiber optic probe. The spectra were collected over the spectral range 1100 ∼ 1740 nm. Partial least squares regression (PLSR) was applied for the calibration and validation for the determination of blood glucose. The calibration model from earlobe spectra presented better results, showing good correlation with a glucose oxidase method which is a mostly used standard method. This model predicted the glucose concentration for validation set with a SEP of 33 mg/dL. This study indicated the feasibility for non-invasive monitoring of blood glucose by a portable near infrared system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.468-470
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• 2005

본 연구에서는 NSOM(Near-field Scanning Optical Microscope)에서 정밀도의 중요한 요소로 작용하는 100 ~ 200nm Scale의 Optical aperture를 제작하기 위해 Optical Fiber를 이용하여 $CO_2$ Laser Heating Pulling Method에 의하여 제작하고자 한다. Heating Pulling Method 에서 Fiber Tip의 정밀도 및 제작 재현성에 영향을 미치는 중요한 기존의 여러 Fiber Tip 구현방법 중 본 연구에서는 Pulse Width[$PW_{(SEC)}$] 와 Pulling Force 두 요소에 있어서 상호관계를 연구하였으며, 연구 결과 두 변수간의 최적화된 파라미터인 PW 0.07 ~ $0.10_{(SEC)}$ 와 Pulling force 0.2 ~ 0.81b의 구간에서 error율이 최소화되는 범위를 찾을 수 있었고, 그 결과 최적의 상태는 $0.08_{(SEC)}$와 0.21b에서 팁들은 첨예화 되었고 95% 이상의 재현성 및 신뢰성을 얻을 수 있었다.